• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.151-156
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• 2001

Experimental frictional and wear characteristics of silicon graphite materials is studied in this paper. Those specimens are lubricated with high temperature and highly pressurized water to simulate the same operating condition for the journal bearing and the thrust bearing on the main coolant pump bearing in the newly developing nuclear reactor named SMART(System-integrated Modular Advanced ReacTor). Operating condition of the bearings is realized by the tribometer and the autoclave. Friction coefficient and wear loss are analyzed to choose the best silicon graphite material. Pin on plate test specimens are used and coned disk springs are used to control the applied force on the specimens. Wear loss ana wear width are measured by a precision balance and a micrometer. The friction force is measured by the strain gauge which can be used under high temperature and high pressure. Three kinds of silicon graphite materials are examined and compared with each other, and each material shows similar but different results on frictional and wear characteristics.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권7호
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• pp.298-304
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• 2003

IPMC(Ionic Polymer-Metal Composite) is a highly sensitive actuator that shows a large deformation in presence of low applied voltage. Generally, IPMC can be fabricated by electroless plating of platinum on both sides of a Nafion (perfluorosulfonic acid) film. When a commercial Nafion film is used as a base structure of the IPMC membrane, the micro-pump structure and the IPMC membrane are fabricated separately and then later assembled, which makes the fabrication inefficient. Therefore, fabrication of an IPMC membrane and the micro-pump structure on a single wafer without the need of assembly have been developed. The silicon wafer was partially etched to hold liquid Nafion to be casted and a 60-${\mu}{\textrm}{m}$ thick IPMC membrane was realized. IPMC membranes with various size were fabricated by casting and they showed 4-2${\mu}{\textrm}{m}$ displacements from $4mm{\times}4mm$ , $6mm{\times}6mm$, $8mm{\times}8mm$ membranes at the applied voltage ranging from 2Vp-p to 5Vp-p at 0.5Hz. The displacement of the fabricated IPMC membranes is fairly proportional to the membrane area and the applied voltage.

• 대한기계학회논문집B
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• 제41권5호
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• pp.365-372
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• 2017

결정질 실리콘 태양전지의 전면전극은 수광면적을 극대화하면서도 전기적 저항을 최소화하기 위하여 미세하면서도 높은 종횡비로 형성되어야 한다. 기존의 전면전극 형성공정은 스크린 인쇄가 이용되었으나, 스크린 제판 개구부의 선폭보다 인쇄된 전극의 선폭이 1.3~2.2 배 넓게 형성되는 문제 때문에 $40{\mu}m$ 급 미만의 미세전극을 형성하기 위해서는 스크린 제판의 개구부는 $30{\mu}m$ 이하여야 한다. 그러나, 개구부가 미세화될수록 인쇄압력의 증가, 실버 페이스트 전이 불량률 상승 및 메쉬 마크로 인한 전극의 전기적 저항 상승과 같은 문제들이 발생한다. 본 연구에서는 스크린 인쇄를 대체하기 위한 차세대 인쇄방식으로서 스크류 펌프방식의 디스펜싱 인쇄를 소개하고, 기존 인쇄방식과 차별화되는 점들에 대해 논의하도록 한다.

• 한국정밀공학회지
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• 제21권2호
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• pp.195-202
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• 2004

This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

• 한국생산제조학회지
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• 제23권2호
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• pp.186-193
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• 2014

This paper presents characteristic analysis of underwater bearing for canned type electric water pump. Characteristic analysis of underwater bearing was performed using self-developed performance tester, which capable of torque change, noise change, motor speed change and abrasion loss test with respect to temperature change of underwater bearing. The performance tester can be monitored in real time by designing the control unit using the Labview program. The performance experiment was performed through comparison of the silicon carbide (SIC) and the carbon bearing. From the experiment results, performance of SIC bearing was better than carbon bearing at the abrasion and temperature experiment.

• 한국레이저가공학회지
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• 제14권4호
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• pp.21-27
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• 2011

In this work, we have studied on time-resolved transient reflective image of single crystalline Si surface after single-shot fs-laser irradiation with varying the laser fluence under two different laser spot sizes. The temporal profiles of transient reflectivity changes as well as its maximum values at the early delay time were found to be strongly dependent on both the laser beam spot size and laser fluence. We have interpreted the dependence of transient reflectivity changes on the laser spot size in terms of a relaxation of the generated free carriers to the bulk silicon, which should be interacted with the plasma.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.299-303
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• 1991

A lamp heated LPCVD equipment has been made. Wafer is heated by an array of fifteen tungsten halogen lamps above the front side of a wafer and pyrometer views the back side of the wafer through $CaF_2$ window. Reactor which consisits of a quartz window and a water cooled-stainless steel plate can be evacuated to $5{\times}10^{-3}$ torr with a rotary vane pump. By pyrolysis of $SiH_4$ at about $600^{\circ}C$, polysilicon has been formed on the silicon dioxide film. The measured results show that thickness nonuniformity is 15% and temperature nonuniformity is 1.1%. Because activation energy of pyrolysis of $SiH_4$ is very high, about 1.8eV, small temperature variation will induce large thickness nonuniformity. The main cause of temperature nonuniformity is unsymmetry of lamp power and an unbalanced cooling structure. Charls & Evans' SIMS result shows that the oxygen content in the deposited polysilicon is comparable to that of silicon substrate but carbon content is ten times higher.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• 천문학회보
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• 제46권2호
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• pp.60.4-61
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• 2021

차세대 중력파 검출기들이 1.5 ㎛ 이상의 장파장에서의 양자광원을 필요로 함에 따라, 이에 대한 기술 개발의 중요성이 대두되고 있다. 차세대 검출기들은 기존의 검출기에 사용되는 test mass를 fused silica에서 silicon으로 변경하면서 열팽창 현상으로 인해 생기는 정밀도의 한계를 뛰어넘으려한다. 하지만 1064 nm 파장의 경우 silicon에서 흡수율이 매우 높으므로 사용할 수 없기에, 흡수율이 상대적으로 낮은 1.5 ㎛ 이상의 영역의 양자광원이 필요하다. 본 발표에서는 1550 nm 파장에서 압축광 개발에 필요한 기술들을 소개하고, 현재까지 진행된 실험 및 실험결과 들을 보고하고자 한다. 압축광의 pump빔을 만드는 SHG, 압축광이 생성되는 OPO, 생성된 압축광의 quadrature를 측정하기 위한 호모다인 측정기, 빛의 분광 잡음을 줄이고, 원하는 spatial mode로 여과시켜주는 mode cleaning cavity에 대한 내용을 설명한다.