• Title/Summary/Keyword: Silica removal

검색결과 209건 처리시간 0.027초

Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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    • pp.705-710
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    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

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하수처리시설의 Retrofitting을 위한 파일럿 규모 공기부상공정 연구 (A Pilot Study on Air Flotation Processes for Retrofitting of Conventional Wastewater Treatment Facilities)

  • 박찬혁;홍석원;이상협;최용수
    • 상하수도학회지
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    • 제22권3호
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    • pp.329-336
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    • 2008
  • The pilot study was conducted to evaluate the applicability of air flotation(AF) processes combined with biological nutrient removal(BNR) for the retrofitting of conventional wastewater treatment facilities. The BNR system was operated in pre-denitrification and intermittent aeration; developed ceramic membrane diffusers were installed to separate the solid-liquid of activated sludge at the bottom of a flotation tank. Before performing a pilot scale study, the size distribution of microbubbles generated by silica or alumina-based ceramic membrane diffusers was tested to identify the ability of solid-liquid separation. According to the experimental results, the separation and thickening efficiency of the alumina-based ceramic membrane diffuser was higher than the silica-based ceramic membrane diffuser. In a $100m^3/d$ pilot plant, thickened and return sludge concentration was measured to be higher than 15,000mg SS/L, therefore, the MLSS in the bioreactor was maintained at over 3,000mg SS/L. The effluent quality of the AF-BNR process was 4.2mg/L, 3.7mg/L, 10.6mg/L and 1.6mg/L for $BOD_5$, SS, T-N and T-P, respectively. Lastly, it was revealed that the unit treatment cost by flotation process is lower than about $1won/m^3$ compared to a gravity sedimentation process.

Self-healing Anticorrosion Coatings for Gas Pipelines and Storage Tanks

  • Luckachan, G.E.;Mittal, V.
    • Corrosion Science and Technology
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    • 제15권5호
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    • pp.209-216
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    • 2016
  • In the present study, chitosan based self-healing anticorrosion coatings were prepared by layer by layer (lbl) addition of chitosan (Ch) and polyvinyl butyral (PVB) on mild carbon steel substrate. Chitosan coatings exhibited enhanced coating stability and corrosion resistance in aggressive environments by the application of a PVB top layer. Chitosan layer in the lbl coatings have been modified by using glutaraldehyde (Glu) and silica ($SiO_2$). Performance of different coatings was tested using electrochemical impedance spectroscopy and immersion test. The best anticorrosion performance was observed in case of 10 % Ch_$SiO_2$_PVB coatings, which withstand immersion test over 25 days in 0.5 M salt solution without visible corrosion. 10 % Ch_$SiO_2$ coatings without the PVB top layer didn't last more than 3days. Application of PVB top layer sealed the defects in the chitosan pre-layer and improved its hydrophobic nature as well. Raman spectra and SEM of steel surfaces after corrosion study and removal of PVB_Ch/Glu_PVB coatings showed a passive layer of iron oxide, attributing to the self-healing nature of these coatings. Conducting particle like graphene reinforcement of chitosan in the lbl coatings enhanced corrosion resistance of chitosan coatings.

$Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) 박막의 CMP 메커니즘 연구 (A Study on CMP Mechanism of $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) Thin Films)

  • 신상헌;고필주;김남훈;이우선
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1450-1451
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    • 2006
  • In this paper, we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) ferroelectric fan was fabricated by the sol-gel method. Removal rate and non-uniformity (WIWNU%) were examined by change of silica slurries pH(10.3, 11.3, 12.3). Surface roughness of BLT thin films before and after CMP process was inquired into by atomic force microscopy (AFM). Effects of silica slurries pH(10.3, 11.3, 12.3) were investigated on the CMP performance of BLT film by the surface analysis of X-ray photoelectron spectroscopy(XPS).

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Investigation of As(III) Sorption by Sand and Alumina under Anoxic Conditions

  • Lee, Seungyeol;Park, Minji;Jeong, Hoon Young
    • 한국지구과학회지
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    • 제43권4호
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    • pp.532-538
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    • 2022
  • Under anoxic conditions, this study investigated removal of dissolved As(III) by Si and Al oxides including natural sand, chemically washed sand (silica), alumina, and activated alumina. Despite the similar surface area, natural sand showed greater extents of As(III) sorption than chemically washed sand. This was likely due to the high reactivity of Fe(oxyhydr)oxide impurities on the surface of natural sand. For both sands, As(III) sorption was the greatest at pH 7.1, in agreement with the weakly dissociating tendency of arsenous acid. Also, the least sorption was observed at pH 9.6. At basic pH, elevated silicate, which originated from the dissolution of silica in sands, would compete with As(III) for sorption. Due to the highest surface area, activated alumina was found to quantitatively immobilize the initially added As(III) (6.0×10-7-2.0×10-5 M). Alumina showed As(III) sorption compared to or greater than chemically washed sand, although the former had less than 6% of the surface of area the latter. The greater reactivity of alumina than chemically washed sand can be explained by using the shared charge of oxygen.

CMP 폐슬러리내의 필터링된 연마 입자 재활용에 관한 연구 (A study on the recycle of reused slurry abrasives)

  • 김기욱;서용진;박성우;정소영;김철복
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.50-53
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    • 2003
  • CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

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마그네슘열환원법을 이용한 실리콘-탄소 복합재 제조 및 리튬이차전지 음극재로의 이용 (Preparation of Silicon-Carbon Composite via Magnesiothermic Reduction Method and Its Application to the Anode Material for Lithium Ion Battery)

  • 김으뜸;권순형;김명수;정지철
    • 한국재료학회지
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    • 제24권5호
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    • pp.243-248
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    • 2014
  • Silicon-carbon composite was prepared by the magnesiothermic reduction of mesoporous silica and subsequent impregnation with a carbon precursor. This was applied for use as an anode material for high-performance lithium-ion batteries. Well-ordered mesoporous silica(SBA-15) was employed as a starting material for the mesoporous silicon, and sucrose was used as a carbon source. It was found that complete removal of by-products ($Mg_2Si$ and $Mg_2SiO_4$) formed by side reactions of silica and magnesium during the magnesiothermic reduction, was a crucial factor for successful formation of mesoporous silicon. Successful formation of the silicon-carbon composite was well confirmed by appropriate characterization tools (e.g., $N_2$ adsorption-desorption, small-angle X-ray scattering, X-ray diffraction, and thermogravimetric analyses). A lithium-ion battery was fabricated using the prepared silicon-carbon composite as the anode, and lithium foil as the counter-electrode. Electrochemical analysis revealed that the silicon-carbon composite showed better cycling stability than graphite, when used as the anode in the lithium-ion battery. This improvement could be due to the fact that carbon efficiently suppressed the change in volume of the silicon material caused by the charge-discharge cycle. This indicates that silicon-carbon composite, prepared via the magnesiothermic reduction and impregnation methods, could be an efficient anode material for lithium ion batteries.

용탈처리와 습식 반탄화에 의한 Empty Fruit Bunch의 연료적 특성 향상 (Improvement in The Fuel Characteristics of Empty Fruit Bunch by Leaching and Wet Torrefaction)

  • 공성호;이형우;이재원
    • Journal of the Korean Wood Science and Technology
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    • 제44권3호
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    • pp.360-369
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    • 2016
  • 본 연구에서는 팜 부산물인 Empty Fruit Bunch (EFB)의 연료적 특성을 향상시키기 위해 용탈처리와 습식 반탄화를 연속적으로 수행하였다. 용탈처리는 $25{\sim}90^{\circ}C$에서 5~30분 수행하였으며, $90^{\circ}C$, 10분 조건에서 55.99%의 가장 높은 회분 감소율을 나타냈다. 회분 감소율은 용탈 시간보다 온도에 따라 영향을 받았다. 용탈처리 후 연속적으로 습식 반탄화를 수행하였으며 반응온도 $180{\sim}200^{\circ}C$, 반응시간 5~40분에서 실시하였다. 연속처리에 의해 규소를 제외한 대부분의 무기성분은 제거되었으며 회분 감소율은 41.05~63.58%로 나타났다. 특히, 염소, 칼륨, 마그네슘, 인 성분은 80%이상 제거되었다. 용탈처리 후 $200^{\circ}C$, 40분에서 습식 반탄화를 수행한 결과 발열량은 원시료(4390 kcal/kg)와 비교하여 7.96% 증가한 4736 kcal/kg를 나타냈다.

석유로 오염된 토양의 과수를 이용한 처리에 관한 연구 (A Study on the Treatment of Petroleum-Contaminated Soils Using Hydrogen Peroxide)

  • 최진호;김재호;공성호
    • 한국토양환경학회지
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    • 제2권3호
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    • pp.49-57
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    • 1997
  • 천연 토양 속에 많이 존재하는 철광식인 goethite, magnetite와 과산화수소수를 이용해 펜톤 유사 반응(Fenton-like oxidation)을 유도하여 디젤과 등유로 각각 오염된 모래(silica sand)를 회분식 시스템으로 처리하여 보았다. 과산화수소수의 농도(0%, 1%, 15%), 초기 오염물의 농도(0.2, 0.5, 1.0g디젤, 등유/kg 모래), 그리고 철광석(iron minerals)의 양(0, 1, 5wt% magnetite or goethite)을 달리하여 반응조건들을 조사하였다. 모래-철광석-$H_2O$$_2$system에서의 오염물의 분해는 잔존 Total Petroleum Hydrocarbon(TPH)의 농도를 분석하여 확인하였다. 디젤이 silica sand에 오염된 경우(1.0g오염물/kg soil, 5wt% magnetite)에 과산화수소수의 농도를 0%, 1%, 그리고 15%로 달리하여 본 결과 8일후 각각 0%, 25%, 60%의 TPH 감소를 보였다. 철광석의 양이 lwt%에서 5wt%로 증가되었을 경우, 오염물의제거량이 magnetite의 경우 16%, goethite의 경우 13.1%만큼 증가하였다. 등유가 사용된 경우에 있어서의 오염물 분해는 디젤이 사용된 경우와 비슷하게 나타났다. Magnetite system은 iron(II)과 iron(III)이 공존하며, 미량의 철성분이 용해되므로 goethite system보다 오염물의 분해가 더 많이 일어나는 것으로 보인다. 그러나 용해된 철성분은 철광석 표면에 침전물의 형태로 쌓이게 되어 철광석 표면의 전자교환능력을 감소시키고 과산화수소수를 quenching시키는 것으로 사료된다. 그리하여 goethite system에서 과산화수소수가 적게 소모되어 magnetite system보다 나은 처리효율을 가지는 것으로 나타났다. 이 연구의 결과를 통하여 볼 때 천연토양속에는 magnetite와 goethite같은 철광석이 함유되어 있으므로 별도의 철성분 첨가없이 과산화수소수의 처리만으로도 석유로 오염된 토양의 처리가 가능할 것으로 보인다.

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나노 크기 매킨나와이트로 코팅된 규사를 이용한 아비산염의 흡착 (Sorption of Arsenite Using Nanosized Mackinawite (FeS)-Coated Silica Sand)

  • 이승열;강정천;박민지;양경희;정훈영
    • 한국광물학회지
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    • 제25권4호
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    • pp.185-195
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    • 2012
  • 나노 크기 매킨나와이트(FeS)는 높은 환원력, 흡착성, 그리고 비표면적을 지니고 있어, 염소유기물의 분해와 중금속 및 비금속의 제거에 유용하다. 하지만 매킨나와이트 나노입자는 콜로이드 안정성(colloid stability)의 변화로 지하수 흐름에 따라 쉽게 확산되거나, 입자집적(particle aggregation)에 의해 대수층의 공극을 막을 수 있다. 따라서 투과반응벽(permeable reactive barrier)에 적용하기 위해서 적절한 공학적 변형이 필요하다. 본 연구에서는 코팅법을 적용해 나노크기 매킨나와이트를 변형시킴으로써 본래의 반응성을 유지하고 또한 경제적인 투과반응벽의 설치에 활용하고자 한다. 이를 위해 화학적 처리를 하지 않은 규사(non-treated silica sand, NTS)와 화학적 처리에 의해 불순물이 제거된 규사(chemically treated silica sand, CTS)를 사용해 매킨나와이트를 코팅시켰다. 두 규사 모두 약 pH 5.4에서 매킨나와이트가 최대로 코팅되었으며, 이 pH는 (1) 매킨나와이트의 용해도, (2) 규사 및 매킨나와이트의 표면전하(surface charge)에 의해 영향받았다. 최적 pH에서 NTS와 CTS에 의한 코팅량은 각각 0.101 mmol FeS/g, 0.043 mmol FeS/g으로, NTS 표면에 존재하는 산화철 등의 불순물에 의해 매킨나와이트의 코팅이 현저히 증가했다. 한편 혐기성 조건에서 코팅되지 않은 규사 2종과 최적 pH에서 코팅된 규사 2종을 이용해 아비산염(arsenite)의 흡착실험을 실시했다. pH 7에서 코팅되지 않은 NTS와 코팅된 NTS에 의한 아비산염의 상대적 제거율은 아비산염의 초기 농도에 따라 달라졌다. 낮은 농도에서 코팅되지 않은 NTS가 높은 아비산염의 제거율을 보였으나, 높은 농도에서는 코팅된 NTS가 상대적으로 높은 제거율을 보였다. 이런 차이는 아비산염은 낮은 농도에서 규사 표면에 존재하는 산화물과의 표면배위결합(surface complexation)에 의해 제거되었고, 높은 농도에서 코팅된 매킨나와이트와 반응해 황화비소(arsenic sulfides)로 침전되었기 때문이다. pH 7에서 코팅된 NTS에 비교해 코팅된 CTS는 현저히 낮은 아비산염 제거율을 보였는데, 이는 CTS의 상대적으로 낮은 매킨나와이트 코팅량에 기인했다. 따라서 코팅된 NTS는 코팅된 CTS보다 아비산염의 제거를 위한 투과반응벽의 설치에 더 적합한 물질이며, 특히 아비산염의 오염도가 심한 지하수의 복원에 유용하게 적용될 수 있다.