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ITZO 박막의 전자적 및 광학적 특성

  • Lee, Seon-Yeong;Denny, Yus Rama;Gang, Hui-Jae;Heo, Seong;Jeong, Jae-Gwan;Lee, Jae-Cheol;Chae, Hong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.324-324
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    • 2012
  • 투명전도체(Transparent Conducting Oxides: TCOs)는 일반적으로 면저항이 $103{\Omega}/sq$ 이하로 전기가 잘 통하며, 가시광선영역인 380~780 nm에서의 투과율이 80% 이상이고, 3.2eV 이상의 밴드갭을 가지는 재료로써, 전기전도도와 가시광선영역에서 투과성이 높아 전기적, 광학적 재료로 관심을 받아 다년간 연구대상이 되어오고 있다. 현재 가장 널리 사용되고 있는 투명전도체(Transparent Conducting Oxides: TCOs) 소재로는 Indium Tin Oxide (ITO)가 가장 각광받고 있지만, Indium의 가격상승과 박막의 열처리를 통해 저항이 증가하는 단점을 가지고 있어 이를 대체 할 새로운 소재 개발이 필요한 상황이다. 그러므로 투명전도체 소재 개발에 있어서 가장 중요한 연구과제는 Indium Tin Oxide(ITO)의 단점을 개선시키고 안정된 고농도의 In-Zn-Sn-O(ITZO) 박막을 성장시키는 것이다. 본 연구에서는 RF스퍼터링법에 의하여 Si wafer에 In-Zn-Sn-O(IZTO)를 $350{\AA}$ 만큼 증착시키고, 1시간 동안 $300^{\circ}C$, $350^{\circ}C$, $400^{\circ}C$로 각각 열처리 하였다. 박막의 전자적, 광학적 특성은 XPS(X-ray Photoelectron Spectroscopy), REELS(Reflection Electron Energy Loss Spectroscopy)를 이용하여 연구하였다. XPS측정결과, ITZO박막은 In-O, Sn-O and Zn-O의 결합을 가지고 있고, 박막의 열처리를 통해 $400^{\circ}C$에서 Zn2p의 피크가 가장 크게 나타나는 반면 In3d와 Sn3d는 열처리를 했을 때가 Room Temperature에서 보다 피크가 작아지는 것을 확인하였다. 이는 $400^{\circ}C$에서 Zn가 표면에 편석됨을 나타낸다. 그리고 REELS를 이용해 Ep=1500 eV에서의 밴드갭을 얻어보면, 밴드갭은 $3.25{\pm}0.05eV$로 온도에 크게 변화하지 않았다. 또한 QUEELS -Simulation에 의한 광학적 특성 분석 결과, 가시광선영역인 380nm~780nm에서의 투과율이 83%이상으로 투명전자소자로의 응용이 가능하다는 것을 보여주었다.

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Investigations on the Magneto-optical Properties of Bilayered Co/Ni Micro-patterned Anti-dot Arrays

  • Deshpande, N.G.;Zheng, H.Y.;Hwang, J.S.;Lee, S.J.;Lee, Y.P.;Rhee, J.Y.;Kim, K.W.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.251-251
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    • 2012
  • A lot of studies are undergoing on the magneto-optical (MO) properties of patterned magnetic systems for the reason that they have potential application to information technology such as ultrahigh-speed computing. Moreover, they can be considered as the future candidates for high-density MO storage devices. Not only the technical aspects, but there have been also tremendous interests in studying their properties related to the fundamental physics. The MO Kerr-rotation effects (both in reflected and the diffracted modes) and the magnetic force microscopy (MFM) are very useful techniques to investigate the micromagnetic properties of such periodic structures. Hence, in this study, we report on the MO properties of bilayered Cobalt (Co)/ nickel (Ni) micro-patterned anti-dot arrays. Such a ferromagnetic structure was made by sequentially depositing co (40 nm)/Ni (5 nm) bilayer on a Si substrate. The anti-dot patterning with hole diameter of $1{\mu}m$ was done only on the upper Co layer using photolithography technique, while the Ni underlayer was kept uniform. The longitudinal Kerr rotation (LKR) of the zeroth- and the first-order diffracted beams were measured at an incidence of $30^{\circ}$ by using a photoelastic modulator method. The external magnetic field was applied perpendicularly to the reflected and the diffracted beams using an electromagnet capable of a maximum field of ${\pm}5$ kOe. Significantly, it was observed that the LKR of the first-order diffracted beam is nearly 4 times larger than that of the zeroth-order beam. The simulated results for the hysteresis loops matched qualitatively well with the experimentally obtained ones. In conjunction with the LKR, we also investigated the magnetic-domain structure by using a MFM system, which were analyzed to elucidate the origin of the enhanced MO rotation.

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Species Identification and Radiocarbon Dating for the Wooden Board from Daebudo Shipwreck No.2 Using Wiggle Matching (대부도2호선 목부재의 수종과 위글매치를 이용한 방사성탄소연대 분석)

  • Nam, Tae Gwang;Yoon, Yong Hee;Kim, Eung Ho
    • Journal of Conservation Science
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    • v.34 no.5
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    • pp.359-368
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    • 2018
  • The purpose of this study was to analyze the wood species of the stern plank and persimmon seed from Daebudo shipwreck No.2 excavated from Daebudo, Danwon-gu, Ansan-si, and Gyeonggi-do by wiggle-matching of radiocarbon measurements. Results of the analysis showed that all the wooden boards of the hull were made from Pinus Hard Pine Group. The other parts of hull and wooden pegs were made from Pinus Hard Pine Group, Castanea spp., Quercus spp. sect. Lepidobalanus, Alnus spp., and Zelkova serrata Makino. Excavated wide-tooth wooden comb and fine-tooth bamboo comb were made from Acer spp. and Bambusoideae. Excavated rope was made from Pueraria thunbergiana Benth. The stern plank, wooden support, and persimmon stone showed ${\pm}2{\sigma}$ radiocarbon date(95.4% confidence interval) of AD 1151-1224. This indicated that the Daebudo shipwreck No.2 occurred during the early or middle 12-13th century. Our radiocarbon dating results confirmed the date speculated by archeologists based on the ceramic style.

Clinical predictors related to oral health in elderly for visiting healthcare (방문보건대상 노인의 구강건강 수준에 영향을 미치는 관련요인)

  • Cho, Gyung-Sook;Jang, Jong-Hwa
    • Journal of Korean society of Dental Hygiene
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    • v.10 no.6
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    • pp.983-990
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    • 2010
  • Objectives : This study was to investigate the level of oral health, xerostomia, and oral health related activities of daily living(ADL) and the clinical factors influencing oral health related quality of life(OHIP-14) in elderly for visiting healthcare. Methods : Data were obtained from a cross-sectional survey of 106 elderly people(mean age=$77.5{\pm}4.98$). Participants in the study were recruited when they attended the public health center in Cheonan-si. Data were collected by means of a personal interview from July 19 through to August 20, 2010. Oral health related ADL, OHIP-14 and dry mouth was measured by the total 24-items. The data was analysed with t-test, one-way ANOVA, and multiple regression using the SPSS program. Results : Participants had a mean of 13.6 remaining natural teeth, which was significantly with age and perceived oral health. Xerostomia score achieved a mean of 6.39 out of a maximum 12 points. Powerful predictors of OHIP-14 were natural teeth, masticatory difficulty, oral pain, PHP index, perceived oral health, age and living together for the elderly Conclusions : Based on the findings, OHIP-14 has a significantly impact on oral health related ADL. These results suggest that elder people oral health promotion should be developed assessment index which was measured predictors related oral health in the elderly for visiting healthcare.

Influence of the MgO-TiO2 Co-Additive Content on the Phase Formation, Microstructure and Fracture Toughness of MgO-TiO2-Reinforced Dental Porcelain Nanocomposites

  • Waiwong, Ranida;Ananta, Supon;Pisitanusorn, Attavit
    • Journal of the Korean Ceramic Society
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    • v.54 no.2
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    • pp.141-149
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    • 2017
  • The influence of the co-additive concentration (0 - 45 wt% with an interval of 5 wt%) of MgO-$TiO_2$ on the phase formation, microstructure and fracture toughness of MgO-$TiO_2$-reinforced dental porcelain nanocomposites derived from a one-step sintering technique were examined using a combination of X-ray diffraction, scanning electron microscopy and Vickers indentation. It was found that MgO-$TiO_2$-reinforced dental porcelain nanocomposites exhibited significantly higher fracture toughness values than those observed in single-additive (MgO or $TiO_2$)-reinforced dental porcelain composites at any given sintering temperature. The amount of MgO-$TiO_2$ as a co-additive was found to be one of the key factors controlling the phase formation, microstructure and fracture toughness of these nanocomposites. It is likely that 30 wt% of MgO-$TiO_2$ as a co-additive is the optimal amount for $MgTi_2O_5$ and $Mg_2SiO_4$ crystalline phase formation to obtain the maximum relative density (96.80%) and fracture toughness ($2.60{\pm}0.07MPa{\cdot}m^{1/2}$) at a sintering temperature of $1000^{\circ}C$.

Evaluation of strength according to surface abrasion of lithium disilicate glass ceramic by 3-point bending strength test (3점 굽힘강도 시험을 통한 Lithium disilicate glass ceramic의 표면 연마 정도에 따른 강도 평가)

  • Lee, Ha-Na;Kim, Eo-Bin;Kang, Seen-Young;Lee, Kyung-Eun;Kim, Ji-Hwan;Kim, Woong-Chul
    • Journal of Technologic Dentistry
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    • v.40 no.1
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    • pp.9-15
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    • 2018
  • Purpose: The purpose of this study is to investigate the effect of lithium disilicate glass ceramic polishing on the strength of the final prosthesis. Methods: Fourteen lithium disilicate glass ceramic specimens were prepared. These were randomly divided into two groups of seven(LPG: low polishing group, HPG: high polishing group). In LPG, SiC paper was sequentially polished using 300, 600, 800, 1000 grit, and the specifications of the test piece were adjusted. HPG was sequentially polished using 300, 600, 800, 1000, 1200, 1500, and 2000 grit. Two groups of specimens are executed 3- point bending test. Using the statistical program SPSS 22.0, the average values of the strengths of the two groups were compared in the Mann-Whiteney test. The significance level was set at 0.05. Results: The mean strength value of HPG was measured at $307.14{\pm}23.28MPa$ significantly higher than LPG(p<0.001). Conclusion : The final polishing of the prosthesis is aesthetically important but has proven to play an important role in the flexural strength, early fracture, and prolongation of the prosthesis.

Effects of Activated Carbon Particle Sizes on Caffeine Adsorptions (활성탄 입자 크기가 카페인 흡착에 미치는 영향)

  • Kim, Tae-Yang;Do, Si-Hyun;Hong, Seong-Ho
    • Journal of Korean Society of Water and Wastewater
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    • v.29 no.3
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    • pp.407-414
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    • 2015
  • The effect of activated carbon particle diameter (i.e. US sieve No. $8{\times}10$ ($d_p{\approx}2.19mm$), $18{\times}20$ ($d_p{\approx}0.92mm$), $50{\times}60$ ($d_p{\approx}0.27mm$) and $170{\times}200$ ($d_p{\approx}0.081mm$) on caffeine adsorption is investigated. BET surface area was increased with decreasing particle diameter ($d_p$), and caffeine adsorption rates increased with decreasing $d_p$. Moreover, pseudo-second order model is predicted the experimental data more accurately than pseudo-first order model, and the fastest rate constant ($k_2$) was $1.7g\;mg^{-1}min^{-1}$ when $d_p$ was 0.081 mm. Surface diffusion coefficient (Ds) was decreased with decreasing $d_p$ based on the minimum sum of square error (SSE). Practically, certain ranges of Ds are acceptable with high reliability ($R^2$) and it is determined that the effect of $d_p$ on Ds is unclear. The effect of pH on caffeine adsorption indicated the dependency of m/L ratio (mass liquid ratio) and $pH_{pzc}$. The $pH_{pzc}$ (i.e. $7.9{\pm}0.2$) was not affected by $d_p$. The higher caffeine adsorption at pH 4 and pH 7 than at pH 10 is due to $pH_{pzc}$, not $pk_a$ of caffeine.

Preparation and Keeping Quality of Snacks Prepared from Rice Oryza sativa and Dried Oyster Crassostrea gigas (마른 굴(Crassostrea gigas) 첨가 쌀(Oryza sativa) Collet을 이용한 Snack의 제조 및 저장안정성)

  • Kang, Kyung-Hun;Je, Hae-Soo;Park, Si-Young;Kang, Young-Mi;Lee, Jae-Dong;Seoung, Tae-Jong;Park, Jin-Hyo;Kim, Jeong-Gyun
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.49 no.6
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    • pp.750-757
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    • 2016
  • This study investigated the quality, sensory characteristics and commercial potential of a rice snack prepared with dried oyster. Mild and spicy versions of the snack were produced using an oil coating and a mixed seasoning powder coating, respectively. The approximate compositions of the mild snack and spicy snack were 5.13% and 4.78% moisture, 8.92% and 8.94% crude proteins, 17.58% and 20.35% crude lipids, 1.88% and 1.87% ash, and 2% and 1.8% salt, with water activity values of 0.20 and 0.18 and a pH of 6.11 and 6.10, respectively. The color of the mild snack was lighter with more yellow and less red compared with the spicy snack. Thiobarbituric acid levels increased slightly, and hardness decreased slightly during storage at $27{\pm}2^{\circ}C$. The sensory score of the spicy snack was slightly higher than that of the mild snack. These results suggest that the spicy snack might have more commercial potential than that of the mild snack according to its higher sensory test score.

Orientational Control of Nano Structures from Block Copolymer Using Homo-Polymer Nano Interface (단일 성분 고분자 나노 계면의 도입을 통한 블락 고분자 박막의 나노 구조 배향 조절)

  • In, Insik
    • Journal of Adhesion and Interface
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    • v.9 no.4
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    • pp.30-33
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    • 2008
  • Two polymeric interfaces with single component homo-polymers were prepared to control the orientation of block copolymer thin-film nanostructures. Poly(4-acetoxy styrene) (OH-PAS) and poly(4-methoxy styrene) (OH-PMS) which have the average chemical composition of polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) were precisely synthesized through nitroxide-mediated radical polymerization. After dehydration reactions between above polymers and SiOx layers of silicon wafers, the polymer-modified interface induced partial (30%) vertical orientation of PS-b-PMMA thin film in the case of OH-PMS and wholly parallel orientation in the case of OH-PAS. Chemical compositions of polymeric interface layers are regarded as the key parameter to control the orientation of nanostructures of block copolymer thin film.

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Internal Energy Distributions of OH Products in the Reaction of O(3PJ) with HSiCl3

  • Kwak, Hyon-Tae;Ha, Seung-Chul;Jang, Sung-Woo;Kim, Hong-Lae;Park, Chan-Ryang
    • Bulletin of the Korean Chemical Society
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    • v.30 no.2
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    • pp.429-434
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    • 2009
  • The OH($X^2{\Pi},\;{\nu}$"=0, 1) internal state distributions from the reaction of electronically ground state oxygen atoms with HSi$Cl_3$ were measured using laser-induced fluorescence. The ground-state O$(^3P_J)$ atoms with kinetic energies above the reaction barrier were produced by photolysis of N$O_2$ at 355 nm. The OH product revealed strong vibrational population inversion, P(${\nu}$"=1)/P(${\nu}$"=0) = 4.0 ${\pm}$ 0.6, and rotational distributions in both vibrational states exhibit substantial rotational excitations to the limit of total available energy. However, no preferential populations in either of the two $\Lambda$ doublet states were observed from the micropopulations, which supports a mechanism involving a direct abstraction of hydrogen by the atomic oxygen. It was also found that the collision energy between O and HSi$Cl_3$ is effectively coupled into the excitation of the internal degrees of freedom of the OH product ($$ = 0.62, and $<\;f_{rot}>$ = 0.20). The dynamics appear consistent with expectations for the kinematically constrained reaction which supports the reaction type, heavy + light-heavy $\rightarrow$ heavy-light + heavy (H + LH′ $\rightarrow$ HL + H′). The dynamics of oxygen atom collision with HSi$Cl_3$ are discussed in comparison to those with Si$H_4$.