• Title/Summary/Keyword: SiOG

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Design and fabrication of micromachined accelerometer using SiOG substrate (SiOG 기판을 이용한 초소형 가속도계의 설계 및 제작)

  • Jung, Hyoung-Kyoon;Ahn, Si-Hong;Park, Chi-Hyun;Lee, June-Young;Jeon, Seung-Hoon;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 2004.11a
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    • pp.275-277
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    • 2004
  • This paper presents design and fabrication of micromachined accelerometer using $100{\mu}m$ thick SiOG substrate. The proposed accelerometer has a resonant frequency, 6kHz. To reduce the off-axis sensitivity of the accelerometer, the mode characteristic of the accelerometer is investigated using ANSYs modal analysis. Because the accelerometer is fabricated using an SiOG substrate, it is expected to be integrated as one-chip IMU sensor with a gyroscope using an SiOG substrate.

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A High Yield Rate MEMS Gyroscope with a Packaged SiOG Process (SiOG 공정을 이용한 고 신뢰성 MEMS 자이로스코프)

  • Lee Moon Chul;Kang Seok Jin;Jung Kyu Dong;Choa Sung-Hoon;Cho Yang Chul
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.3 s.36
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    • pp.187-196
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    • 2005
  • MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

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Effects of Package Induced Stress on MEMS Device and Its Improvements (패키징으로 인한 응력이 MEMS 소자에 미치는 영향 분석 및 개선)

  • Choa Sung-Hoon;Cho Yong Chul;Lee Moon Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.11 s.176
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    • pp.165-172
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    • 2005
  • In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

Mathematics in Chosun Dynasty and Si yuan yu jian (조선(朝鮮) 산학(算學)과 사원옥감(四元玉鑑))

  • Hong, Sung-Sa;Hong, Young-Hee
    • Journal for History of Mathematics
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    • v.20 no.1
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    • pp.1-16
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    • 2007
  • In the 19th century, Chosun mathematicians studied the most distinguished mathematicians Qin Jiu Shao(泰九韶), Li Ye(李治) Zhu Shi Jie(朱世傑) in Song(宋), Yuan(元) Dynasty and they established a solid theoretical development on the theory of equations. These studies began with their study on Si yuan yu jian xi cao(四元玉鑑細艸) compiled by Luo Shi Lin(羅士琳). Among those Chosun mathematicians, Lee Sang Hyuk(李尙爀, $1810{\sim}?$) and Nam Byung Gil(南秉吉 $1820{\sim}1869$) contributed prominently to the research. Relating to Si yuan yu jian xi cao, Nam Byung Gil and Lee Sang Hyuk compiled OgGamSeChoSangHae(玉監細艸詳解) and SaWonOgGam(四元玉鑑), respectively and then later they wrote SanHakJeongEi(算學正義) and IkSan(翼算), respectively. The latter in particular contains most creative results in Chosun Dynasty mathematics. Using these books, we study the relation between the development of Chosun mathematics and Si yuan yu jian.

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Fabrication Process and Mechanical Properties of High Volume Fraction SiC Particle Preform (고부피분율 SiC분말 예비성형체의 제조공정과 기계적특성)

  • 전경윤
    • Journal of Powder Materials
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    • v.7 no.1
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    • pp.27-34
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    • 2000
  • The fabrication process and mechanical properties of SiC particle prefrrms with high volume fraction ranged 50∼71% were investigated to make metal matrix composites for possible applications as heat sinks in electronic packares. The SiC particle preforms with 50∼71vol% of reinforcement were fabricated by a new modified process named ball milling and pressing method. The SiC particle performs were fabricated by ball milling of SiC particles with single sized of 48${\mu}$m in diameter or two different size of 8${\mu}$m and 48${\mu}$min diameter, with collodal SiO2 as inorgnic binder in distilled water, and the mixed slurries were cold pressed for consolidation into final prefom. The compressive strengths og calcined SiC particle prefoms increased from 20MPa to 155MPa with increasing the content of inorganis binder, temperature and time for calcination. The increase of compressive strength of SiC particle bridge the interfaces of two neighboring SiC particles.

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Comparison of the fit of the coping pattern constructed by manual and CAD/CAM, depending on the margin of the abutment tooth (지대치 변연 형태에 따른 수작업과 CAD/CAM으로 제작한 coping 패턴의 적합도 비교)

  • Han, Min-soo;Kwon, Eun-Ja;Chio, Esther;Kim, Si-chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.10
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    • pp.6611-6617
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    • 2015
  • The purpose of this study is to compare the marginal and internal fit of metal and zirconia coping which is fabricated by manual and CAD/CAM(Computer Aided Design/Computer Aided Manufacturing). The model is prepared with Urethane material and two abutment teeth are fabricated with a knife and chamfer margin. Silicon replica technique is used to measure the marginal fit of manually fabricated and the CAD/CAM coping. Internal fitting level is measured with a microscope and the image is captured with a CCD camera. The distance between abutment teeth and coping is measured with a callibrated image analyzer software; marginal opening (MO), marginal gap (MG), internal gap (IG) at maximum curvature area, axial gap (AG), and occlusal gap (OG). Two-way ANOVA test is applied to compare fabrication technique and to analysis of abutment pattern. In addition, one-way ANOVA and Scheffe's test is used to analyze each parameter of the test. The result shows that the fit is < $120{\mu}m$ except OG of CAD/CAM and MO of knife margin. The CAD/CAM fabricated coping showed higher fit level at chamfer margin. However, knife margin showed better fitness compared to chamfer margin at MG. AG showed the minimum dimension with a constant result (< $38{\mu}m$).

Study on snack intakes in obese elementary students in Jeju city (제주시 지역 일부 초등학교 비만아동의 간식 섭취 실태)

  • Ko, Yangsook;Lee, You-Yeong;Chae, Insook;Lee, Yunkyoung;Jekal, Yoonsuk;Park, Hyeung-Keun
    • Journal of Nutrition and Health
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    • v.50 no.1
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    • pp.85-97
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    • 2017
  • Purpose: This study was conducted to investigate dietary habits related to weight reduction and snack intake habits of $4^{th}$ to $5^{th}$ grade elementary students located in Jeju-si, Jeju, South Korea. Methods: The $4^{th}$ and $5^{th}$ grade elementary school students (total n = 234, equally matched numbers of normal weight children and overweight/obese children (n = 117/group)) were surveyed using a questionnaire and a 24-hour dietary recall method in Oct 2015. Results: The percentage of students who experienced reduced food intake to control weight was 26.3% in the normal weight group (NG) and 77.6% in the obese group (OG). Most frequently answered meal for reduced intake was snacks in the NG and dinner in the OG. Percentages of daily calorie intake among subjects were 17.2% for breakfast, 33.8% for lunch, 29.7% for dinner, and 19.3% for snacks. Frequency of snack intake was 2.1 times a week in NG and 1.6 times a week in OG, which showed a statistical difference between body weight groups. Types of snack foods were distinctly different depending on where children consumed them, although no difference was observed between NG and OG. In addition, snack intake level of low energy and nutrient-dense foods was significantly lower in the OG compared to the NG, whereas snack intake level of energy dense and low-nutritive foods was not different between the OG and NG. Conclusion: Taken together, snack intake level with consideration of frequency and amount of snack intake showed that children in the OG consumed significantly less low energy and nutrient-dense foods compared to the NG. Therefore, nutritional education for choosing healthy snack foods for children regardless of body weight status is crucial based on family-school links.

Modulation of Drug Resistance in Ovarian Cancer Cells by Inhibition of Protein Kinase C-alpha (PKC-α) with Small Interference RNA (siRNA) Agents

  • Zhao, Li-Jun;Xu, Heng;Qu, Jun-Wei;Zhao, Wan-Zhou;Zhao, Yi-Bing;Wang, Jin-Hua
    • Asian Pacific Journal of Cancer Prevention
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    • v.13 no.8
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    • pp.3631-3636
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    • 2012
  • Objective: To determine whether silence of $PKC-{\alpha}$ expression by small interference RNA (siRNA) might regulate MDR1 expression and reverse chemoresistance of ovarian cancer. Methods: We measured gene and protein expression of MDR1 and $PKC-{\alpha}$ in ovarian cancer cells and assessed their correlation with cell drug resistance. We also examined whether blocking $PKC-{\alpha}$ by RNA interference (RNAi) affected MDR1 expression and reversed drug resistance in drug sensitivity tests. Results: The drug resistance cell lines, OV1228/DDP and OV1228/Taxol, had higher gene and protein expression of MDR1 and $PKC-{\alpha}$ than their counterpart sensitive cell line, OV1228. SiRNA depressed $PKC-{\alpha}$ gene protein expression, as well as MDR1 and protein expression and improved the drug sensitivity in OV1228/DDP and OV1228/Taxol cells. Conclusion: These results indicated that decreasing $PKC-{\alpha}$ expression with siRNA might be an effective method to improve drug sensitivity in drug resistant cells with elevated levels of $PKC-{\alpha}$ and MDR1. A new siRNA-based therapeutic strategy targeting $PKC-{\alpha}$ gene could be designed to overcome the chemoresistance of ovarian cancer.

Synergy effect for performance of anionic SDS/ADS mixtures with amphoteric and nonionic surfactants

  • Noh, Hongche;Kang, Taeho;Ryu, Ji Soo;Kim, Si Yeon;Oh, Seong-Geun
    • Journal of the Korean Applied Science and Technology
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    • v.33 no.3
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    • pp.449-458
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    • 2016
  • Detergency and surface active properties of mixed anionic surfactants with amphoteric and nonionic were investigated. Sodium dodecyl sulfate (SDS) and ammonium dodecyl sulfate (ADS) as anionic surfactants and cocamidopropyl betaine (CAPB) as an amphoteric surfactant were used. Nonionic surfactants, which are butyl glucoside (BG), octyl glucoside (OG), decyl glucoside (DG), lauryl dimethylamine oxide (AO) and saponin were also used. To study the synergy effects of mixed SDS/ADS anionic surfactant systems, amphoteric and nonionic surfactants were added into the mixed anionic surfactants. Investigated properties of surfactant mixtures were critical micelle concentration (CMC), surface tension (${\gamma}$), wettability. In addition, based on these properties, detergency of each sample was examined. Surfactant mixtures are anionics (SDS/ADS), anionic/amphoteric/nonionic (SDS/ADS/CAPB/saponin), and anionic/nonionic (SDS/ADS/BG/saponin, SDS/ADS/OG/saponin, SDS/ADS/DG/saponin, and SDS/ADS/AO/saponin). With the addition of amphoteric and nonionic to mixed anionic surfactants, CMC and ${\gamma}$ were decreased. Addition of CAPB, which is amphoteric, showed the best property at CMC and ${\gamma}$. Furthermore, as the chain length of hydrocarbon in alkyl glucosides was increased, the CMC and ${\gamma}$ were enhanced. However, the wettability did not exactly match up with CMC and ${\gamma}$. The surfactant mixture, which contained DG, showed the best performance at wetting time. Detergency was measured at various temperatures ($15^{\circ}C$, $30^{\circ}C$, $50^{\circ}C$). The cleaning performance was enhanced by increasing washing temperature. Moreover, detergency was influenced by not only CMC and ${\gamma}$ but also wettability. Although CMC and ${\gamma}$ were not minimum at surfactant mixture that included DG, the best cleaning performance showed in that sample.

A Study on the Energy Saving through Pollutant removal of Intake gate (취수구 스크린 협잡물 제거를 통한 에너지 절감효과 분석)

  • Kim, Byeong-Kakg;Park, Inn;You, Si-Og;Jang, Seung-Don
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.930-931
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    • 2011
  • As the upsurge in oil prices and global warming, Energy saving is needed to overall industry. If The head of Intake gate screen is high. The pumping process involves a loss of energy and results in high emissions of greenhouse gases. Therefore, blockages in intake gate should be free. Another advantage of cleaning is stabilizing pumping system. Because vibration and cavitation decreases when loss of head is low.

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