Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.11a
- /
- Pages.275-277
- /
- 2004
Design and fabrication of micromachined accelerometer using SiOG substrate
SiOG 기판을 이용한 초소형 가속도계의 설계 및 제작
- Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Ahn, Si-Hong (Intellimicrons Co., Ltd.) ;
- Park, Chi-Hyun (Intellimicrons Co., Ltd.) ;
- Lee, June-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Jeon, Seung-Hoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
- 정형균 (서울대학교 전기.컴퓨터공학부) ;
- 안시홍 ((주)인텔리마이크론즈) ;
- 박치현 ((주)인텔리마이크론즈) ;
- 이준영 (서울대학교 전기.컴퓨터공학부) ;
- 전승훈 (서울대학교 전기.컴퓨터공학부) ;
- 김용권 (서울대학교 전기.컴퓨터공학부)
- Published : 2004.11.05
Abstract
This paper presents design and fabrication of micromachined accelerometer using
Keywords