• Title/Summary/Keyword: SiNc

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Formation of Nano-crystal using Si-rich thin film for Non Volatile Memory Device Application (비휘발성 메모리 소자 응용을 위한 Si-rich 박막을 사용한 Nano-crystal 형성)

  • Jang, Kyung-Soo;Jung, Sung-Wook;Kim, Hyun-Min;Hwang, Hyung-Sun;Choi, Seok-Ho;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.128-129
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    • 2005
  • In this research, non-volatile memory effects and nano-crystal creation have been investigated in SiNx containing Si nano-crystals (Si-nc) produced by ICP-CVD and rapid thermal annealing. The quantum dots were created during rapid thermal annealing of Si-rich SiNx thin films. The quantum dot creation was analyzed with photoluminescence spectra, and in case of Si-rich SiNx, it is conformed that the quantum dots are formed easily at 750$\sim$800nm wavelength.

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Effect of Hydrogen Dilution Ratio and Crystallinity of nc-Si:H Thin Film on Realizing High Mobility TFTs (고이동도 TFTs 구현에 nc-Si:H 박막의 수소 희석비와 결정성이 미치는 영향)

  • Choi, Jiwon;Kim, Taeyong;Pham, Duy phong;Jo, Jaewoong;Cui, Ziyang;Xin, Dongxu;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.4
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    • pp.246-250
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    • 2021
  • TFTs technologies with as high mobility as possible is essential for high-performance large displays. TFTs using nanocrystalline silicon thin films can achieve higher mobility. In this work, the change of the crystalline volume fraction at different hydrogen dilution ratios was investigated by depositing nc-Si:H thin films using PECVD. It was observed that increasing hydrogen dilution ratio increased not only the crystalline volume fraction but also the crystallite size. The thin films with a high crystalline volume fraction (55%) and a low defect density (1017 cm-3·eV-1) were used as top gate TFTs channel layer, leading to a high mobility (55 cm2/V·s). We suggest that TFTs of high mobility to meet the need of display industries can be benefited by the formation of thin film with high crystalline volume fraction as well as low defect density as a channel layer.

저가 고효율 실리콘계 (protocrystalline Si/$\mu$c-Si:H) 적층형 박막 태양전지 개발

  • Im, Goeng-Su
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.11a
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    • pp.191-202
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    • 2005
  • 비정질 실리콘 태양전지 대신에 열화가 더 적은 프로터결정 실리콘(pc-Si:H)을 상층전지 흡수층으로 사용한 고효율 실리콘계 적층형(pc-Si:H/$\mu$c-Si:H) 박막 태양전지를 개발하였다. 우선, 높은 전도도와 넓은 에너지 밴드갭 특성을 갖는 p-a-SiC:H 박막을 개발하였고, p/i 계면의 특성 향상을 위해 p-nc-SiC:H 완충층을 개발하였다. 프로터결정 실리콘 다층막을 제작하고 FTIR, 평면 TEM, 단면 TEM 측정을 통해 프로터결정 실리콘 다층막의 우수한 열화 특성의 원인을 규명하였다. 적층형 태양전지의 성능향상을 위해 n-p-p 구조의 터널접합을 제안, 제작하고 특성을 분석하였으며, pc-Si:H/a-Si:H 적층형 태양전지에 적용하여 성능향상을 이루었다. 양질의 하층전지용 마이크로결정 실리콘 박막을 증착하기 위하여 광CVD법과 플라즈마CVD법을 결합한 2단계 마이크로결정 실리콘 증착법을 개발하였다.

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Effects of Amorphous Si3N4 Phase on the Mechanical Properties of Ti-Al-Si-N Nanocomposite Films Prepared by a Hybrid Deposition System (하이브리드 증착 시스템에 의해 합성된 나노복합체 Ti-Al-Si-N 박막 내 존재하는 Si3N4 비정질상이 기계적 특성에 미치는 영향)

  • An, Eun-Sol;Jang, Jae-Ho;Park, In-Uk;Jeong, U-Chang;Kim, Gwang-Ho;Park, Yong-Ho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.304-304
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    • 2014
  • Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti,Al)N crystallites and amorphous $Si_3N_4$ by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film having the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of $nc-(Ti,Al)N/a-Si_3N_4$.

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Performance of FRP confined and unconfined geopolymer concrete exposed to sulfate attacks

  • Alzeebaree, Radhwan;Gulsan, Mehmet Eren;Nis, Anil;Mohammedameen, Alaa;Cevik, Abdulkadir
    • Steel and Composite Structures
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    • v.29 no.2
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    • pp.201-218
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    • 2018
  • In this study, the effects of magnesium sulfate on the mechanical performance and the durability of confined and unconfined geopolymer concrete (GPC) specimens were investigated. The carbon and basalt fiber reinforced polymer (FRP) fabrics with 1-layer and 3-layers were used to evaluate the performances of the specimens under static and cyclic loading in the ambient and magnesium sulfate environments. In addition, the use of FRP materials as a rehabilitation technique was also studied. For the geopolymerization process of GPC specimens, the alkaline activator has selected a mixture of sodium silicate solution ($Na_2SiO_3$) and sodium hydroxide solution (NaOH) with a ratio ($Na_2SiO_3/NaOH$) of 2.5. In addition to GPC specimens, an ordinary concrete (NC) specimens were also produced as a reference specimens and some of the GPC and NC specimens were immersed in 5% magnesium sulfate solutions. The mechanical performance and the durability of the specimens were evaluated by visual appearance, weight change, static and cyclic loading, and failure modes of the specimens under magnesium sulfate and ambient environments. In addition, the microscopic changes of the specimens due to sulfate attack were also assessed by scanning electron microscopy (SEM) to understand the macroscale behavior of the specimens. Results indicated that geopolymer specimens produced with nano-silica and fly ash showed superior performance than the NC specimens in the sulfate environment. In addition, confined specimens with FRP fabrics significantly improved the compressive strength, ductility and durability resistance of the specimens and the improvement was found higher with the increased number of FRP layers. Specimens wrapped with carbon FRP fabrics showed better mechanical performance and durability properties than the specimens wrapped with basalt FRP fabrics. Both FRP materials can be used as a rehabilitation material in the sulfate environment.

Anatomy of the diaphyseal nutrient foramen in the long bones of the pectoral limb of German Shepherds

  • Sim, Jeoung-Ha;Ahn, Dongchoon
    • Korean Journal of Veterinary Research
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    • v.54 no.3
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    • pp.179-184
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    • 2014
  • This study investigated the anatomy of the nutrient foramen (NF) in German Shepherds by recording the number, site, position, and direction of penetration of the nutrient canal (NC) in the humerus, radius, and ulna of 50 individuals. The site index of the nutrient foramen (SI) was calculated as the ratio of the length to the NF site from the proximal end to the greatest length of the bone. The NF diameter was measured using different sized needles. Most humeri had only one NF on the caudal surface, particularly on the lateral supracondylar crest, or distal cranial surface. All radii had one NF, usually on the caudal surface, while most ulnae had one NF located on either the cranial or lateral surfaces. The SI and NF diameters were 58.0~59.5% and 0.73~0.78 mm in the humerus, 30.4~30.9% and 0.74~0.76 mm in the radius, and 29.3~29.8% and 0.67~0.68 mm in the ulna, respectively. With the exception of the relatively proximal NF of the radius, the direction of penetration followed Berard's rule. This study provides novel information on the location and diameter of the NF and direction of the NC in the long bones of the pectoral limb of German Shepherds.