• Title/Summary/Keyword: SiC slurry

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Fabrication and Characterization of Reaction Sintered SiC Based Materials (반응소결 SiC 재료의 제조 및 특성)

  • Jin, Joon-Ok;Lee, Sang-Pill;Park, Yi-Hyun;Hwang, Huei-Jin;Yoon, Han-Ki;Kohyama, Akira
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2003.05a
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    • pp.294-299
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    • 2003
  • The efficiency of complex slurry preparation route for the development of high performance RS-SiCf/SiC composites has been investigated. The green bodies for RS-SiC and RS-SiCf/SiC composite materials prior to the infiltration of molten silicon were prepared with various C/SiC complex matrix slurries, which associated with both different sizes of starting SiC particles and blending ratios of starting SiC and carbon particles. The reinforcing materials in the composite system were uncoated and C coated Tyranno SA SiC fiber. The characterization of RS-SiC and RS-SiCf/SiC composite materials was examined by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, process optimization methodology is discussed.

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An Experimental Study on the Pozzolan Reaction of discarded Bentonite by Heat Treatment Condition - Focused on discarded Bentonite by cooling using of Water - (소성조건에 따른 폐 벤토나이트의 포졸란 반응성에 관한 실험적 연구 - 주수냉각을 중심으로 -)

  • 장진봉;정민수;김효열;강병희
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2002.05a
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    • pp.85-90
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    • 2002
  • This study aims to propose a fundamental report for pozzolan reaction of discarded Bentonite by heat-treatment as concrete mineral admixture. As discarded bentonite is clay mineral to contain a great quantity a lot of $SiO_2$ and $Al_{2}O_{3}$, it is anticipated to reveal pozzolan reaction ability by heat-treatment. To find out pozzolan reaction ability of discarded Bentonite slurry by heat-treatment, the experiment is excuted Phenolphtalein test, setting test, pH test and the analysis by X-ray diffractor. As a result of this study, discarded Bentonite slurry can be utilized as concrete mineral admixture by heat-treatment and especially, pozzolan reaction ability of discarded Bentonite slurry is superior to the situation of 50$0^{\circ}C$~$700^{\circ}C$, 60min.

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Recovery of Metallurgical Silicon from Slurry Waste (Wafer Sawing 공정의 폐슬러리로부터 금속 실리콘 회수에 관한 연구)

  • Kim, Jong-Young;Kim, Ung-Soo;Hwang, Kwang-Taek;Cho, Woo-Seok;Kim, Kyung-Ja
    • Journal of the Korean Ceramic Society
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    • v.48 no.2
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    • pp.189-194
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    • 2011
  • Metallurgical grade silicon was recovered from slurry waste for ingot sawing process by acid leaching and thermal treatment. SiC abrasive was removed by gravity concentration and centrifugation. Metal impurities were removed by the acid leaching using HF/HCl. The remaining SiC was separated by the thermal treatment at $1600^{\circ}C$ in an inert atmosphere by the difference in melting points. The purity of the obtained silicon was found to be around 99.7%.

non-polar 6H-SiC wafer의 CMP 가공에 대한 연구

  • Lee, Tae-U;Sim, Byeong-Cheol;Lee, Won-Jae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.141-141
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    • 2009
  • Blue light-emitting diodes (LEDs), violet laser diodes 같은 광전소자들은 질화물 c-plane 기판위에 소자로 응용되어 이미 상품화 되어 왔다. 그러나 2족-질화물 재료들은 wurtzite 구조를 가지므로 c-plane에 평행한 자연적인 극성을 띌 뿐만 아니라 결정 내부 stress로 인한 압전현상 또한 나타나 큰 내부 전기장을 형성하게 된다. 이렇게 생성된 내부 전기장은 전자와 홀의 재결합 효율을 감소시키고 소자 응용 시 red-shift의 원인이 되곤 한다. 따라서 최근 들어 m-plane(1-100), a-plane (11-20)같은 무극성을 뛰는 기판 위에 소자를 만드는 방법이 각광을 받고 있는 추세다. 그러나 무극성 기판을 소자에 응용 시 Chemical Mechanical Planarization (CMP)에 의한 가공은 반도체 기판으로써 이용하기 위한 필수 불가결의 공정이다. c면(0001) SiC wafer에 대한 연구는 현재 많이 발표가 되어 있으나 무극성면 SiC wafer에 대한 CMP 공정에 대한 연구사례는 없는 실정이다. 본 연구에서는 C면 (0001)으로 성장된 잉곳을 a면(11-20)과 m(1-100)면으로 절단 후, slurry type (KOH-based colloidal silica slurry, NaOCl), 산화제, 연마제등을 변화하여 CMP 공정을 거침으로서 일어나는 기계 화학적 가공 양상에 대하여 알아보았다. 그 후 표면 형상 분석 하기위해 Atomic Force Microscope(AFM)을 사용하였고, 표면 스크레치를 SEM을 이용해서 알아보았다.

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Properties of Polysiloxane Coated Borosilicate Lining Blocks

  • Song, Jeongho;Song, Ohsung
    • Journal of the Korean Ceramic Society
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    • v.54 no.6
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    • pp.525-529
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    • 2017
  • To improve the thermal resistance of a porous borosilicate lining block, we prepared and applied polysiloxane-fumed silica-ethanol slurry on top of the block and fired the coating layer using a torch for 5 minutes at $800^{\circ}C$. We conducted magnified characterizations using a microscope and XRD analysis to observe phase transformations, and TGA-DTA analysis to determine the thermal resistance. Thermal characterizations showed improved heat resistance with relatively high polysiloxane content slurry. Cross-sectional optical microscope observation showed less melting near the surface and decreased pore formation area with higher polysiloxane content slurry. XRD analysis revealed that the block and coating layer were amorphous phases. TGA-DTA analysis showed an endothermic reaction at around $550^{\circ}C$ as the polysiloxane in the coating layer reacted to form SiOC. Therefore, coating polysiloxane on a borosilicate block contributes to preventing the melting of the block at temperatures above $800^{\circ}C$.

Prevention of Grain Growth during the Liquid-Phase Assisted Sintering of β-SiC (액상소결 시의 β-SiC의 입자성장 방지)

  • Gil, Gun-Young;Noviyanto, Alfian;Han, Young-Hwan;Yoon, Dang-Hyok
    • Journal of the Korean Ceramic Society
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    • v.47 no.6
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    • pp.485-490
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    • 2010
  • In our previous studies, continuous SiC fiber-reinforced SiC-matrix composites ($SiC_f$/SiC) had been fabricated by two different slurry infiltration methods: vacuum infiltration and electrophoretic deposition (EPD). 12 wt% of $Al_2O_3-Y_2O_3$-MgO with respect to SiC powder was used as additives for liquid-phase assisted sintering. After hot pressing at $1750^{\circ}C$ under 20 MPa for 2 h in Ar atmosphere, a high composite density could be achieved for both cases, whereas the problems such as large grain size and non-uniform distribution of liquid phase were observed, which was resulted in the relatively poor mechanical properties of composites. Therefore, efforts have been made to reduce the grain growth during the sintering, including the optimization for hot pressing condition and utilization of spark plasma sintering using a SiC monolith. Based on the results, spark plasma sintering was found to be effective method in decreasing the amount of sintering additive, time and grain growth, which will be explained in comparison to the results of hot pressing in this paper.

Characteristics and Microstructure of Matrix Retaining Electrolyte in Phosphoric Acid Fuel Cell Prepared by Tape Casting (Tape Casting법으로 제조한 인산형 연료전지 전해질 매트릭스의 미세구조 및 특성)

  • 윤기현;허재호;장재혁;김창수
    • Journal of the Korean Ceramic Society
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    • v.31 no.4
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    • pp.375-380
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    • 1994
  • Matrices retaining electrolyte in phosphoric acid fuel cell were prepared with SiC to SiC whisker mixing ratios of 1:0.5, 1:1, 1:1.5, 1:2, 1:3 by tape casting method. When viscosity of the slurry was 5.9 poise and the SiC to SiC whisker mixing ratios were 1:1, 1:1.5, 1:2, the ranges of porosity, acid absorbency and bubble pressure were 80~90%, 2.5~6 and 700~2200 mmH2O, respectively. Those ranges are acceptable for a practical electrolyte-retaining matrix. With increasing the mixing ratio of SiC whisker to SiC, the porosity and the vol.% of large pores in the main pore size distribution which is between 1 and 10 ${\mu}{\textrm}{m}$, increased rapidly. Impedance spectroscopy was measured to know characteristics of matrix inside and contact region of matrix to catalyst layer. When the SiC to SiC whisker mixing ratio was 1:2, hydrogen ions were transported in the matrix most effectively because of high ionic conductivity and low activation energy due to high acid absorbency in spite of high interfacial resistance. The cell current density of the cell made using the matrix was 220 mA/$\textrm{cm}^2$ at 0.7 V.

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Fabrication of Low Temperature Cofiring Substrate Containing Fluorine by Water Swelling (Water Swelling을 이용한 Fluorine함유 저온소결 기판의 제조)

  • 윤영진;최정헌;이용수;강원호
    • Journal of the Microelectronics and Packaging Society
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    • v.9 no.2
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    • pp.19-25
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    • 2002
  • Glass composed of $Li_2$O.MgO. $MgF_2$.$SiO_2$.$B_2O_3$ for the fabrication of green sheet was prepared by melting process, and glass ceramics was prepared by the process of nucleation and grystal growth for the glass of $Li_2$O.MgO. $MgF_2$.$SiO_2$.$B_2O_3$ system with Lithium fluorhectorite and Lithium boron fluorphlogopite crystal phase. Powderization of the glass ceramics was carried out by water swelling. The average particle size at this point was 2.574 $\mu\textrm{m}$. Slurry was prepared for green sheet using high viscous sol fabricated by water swelling, which shows cleavage phenomenon in prepared glass ceramics. The optimum ratio of powder to water for the tape casting was 18:100, and its viscosity was 11,000~14,000 cps.

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Fabrication and Properties of Reaction Bonded SiC Hot Gas Filter Using Si Melt Infiltration Method (용융 Si 침윤방법에 의한 반응소결 탄화규소 고온가스 필터의 제조 및 특성)

  • 황성식;김태우
    • Journal of the Korean Ceramic Society
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    • v.40 no.9
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    • pp.891-896
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    • 2003
  • Novel fabrication technique was developed for high strength Reaction-Bonded SiC (RBSC) hot gas filter for use in IGCC (Integrated Gasification Combined Cycle) system. The room and high temperature fracture strengths for Si-melt infiltrated reaction-bonded SiC were 50-123, and 60-66 MPa, respectively. The average pore size was 60-70 $\mu\textrm{m}$ and the porosity was about 34 vol%. RBSC infiltrated with molten silicon showed improved fracture strength at high temperature, as compared to that of clay-bonded SiC, due to SiC/Si phase present within SiC phase. The thickness for SiC/Si phase was increased with increasing powder particle size of SiC from 10 to 34 $\mu\textrm{m}$. Pressure drop with dust particles showed similar response as compared to that for Schumacher type 20 filter. The filter fabricated in the present study showed good performance in that the filtered powder size was reduced drastically to below 1 $\mu\textrm{m}$ within 4 min.

Semi-Insulating SiC Single Crystals Grown with Purity Levels in SiC Source Materials (고순도 SiC 파우더를 이용한 반절연 SiC 단결정 성장)

  • Lee, Chae Young;Choi, Jeong Min;Kim, Dae Sung;Park, Mi Seon;Jang, Yeon Suk;Lee, Won Jae;Yang, In Seok;Kim, Tae Hee;Chen, Xiufang;Xu, Xiangang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.32 no.2
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    • pp.100-103
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    • 2019
  • The change in vanadium amount according to the growth direction of vanadium-doped semi-insulated (SI) SiC single crystals using high-purity SiC powder was investigated. High-purity SiC powder and a porous graphite (PG) inner crucible were placed on opposite sides of SiC seed crystals. SI SiC crystals were grown on 2 inch 6H-SiC Si-face seeds at a temperature of $2,300^{\circ}C$ and growth pressure of 10~30 mbar of argon atmosphere, using the physical vapor transport (PVT) method. The sliced SiC single crystals were polished using diamond slurry. We analyzed the polytype and quality of the SiC crystals using high-resolution X-ray diffraction (XRD) and Raman spectroscopy. The resistivity of the SI SiC crystals was analyzed using contactless resistivity mapping (COREMA) measurements.