• 제목/요약/키워드: SiC size

검색결과 1,134건 처리시간 0.054초

Growth of Highly (100) Oriented (Na0.5Bi0.5)TiO3 Thin Films on LaNiO3 Electrode (LaNiO3 전극위에 (100)으로 배향된 (Na0.5Bi0.5)TiO3 박막의 성장)

  • Yoo Young-Bae;Park Min-Seok;Son Se-mo;Chung Su-Tae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제19권2호
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    • pp.176-180
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    • 2006
  • [ $(Na_{0.5}Bi_{0.5})TiO_3$ ][NBT] thin films were prepared on a highly (100) oriented $LaNiO_3[LNO]$ by sol-gel process. X-ray diffraction patterns of the NBT films annealed above $600^{\circ}C$ for 5 minutes have confirmed a highly (100) oriented growth and pseudocubic structure (a=3.884${\AA}$). The (l00) orientation factor increased from 90 to $99\%$ with increasing soaking time from 5 to 60 minutes at $600^{\circ}C$. The NBT films ($600^{\circ}C$/5 min,) have a flat and dense microstructure with large columnar grains, and their grain size are about 44 nm. The Au/NBT/LNO/Si hetero structure sample show a ferroelectric properties.

Preparation of Ferroelectric $Cr_3C_2$ Thin Film Using Sol-Gel Spin Coating Process (솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조)

  • 배호기;고태경
    • Journal of the Korean Ceramic Society
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    • 제31권7호
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    • pp.795-803
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    • 1994
  • Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

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Development of World's Largest 21.3' LTPS LCD Using Sequential Lateral Solidification (SLS) Technology

  • Kang, Myung-Koo;Kim, H.J.;Chung, J.K.;Kim, D.B.;Lee, S.K.;Kim, C.H.;Chung, W.S.;Hwang, J.W.;Joo, S.Y.;Maeng, H.S.;Song, S.C.;Kim, C.W.;Chung, Kyu-Ha
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.241-244
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    • 2003
  • The world largest 21.3" LTPS LCD has been successfully developed using SLS crystallization technology. Successful integration of gate circuit, transmission gate and level shifter was performed in a large area uniformly. Uniformity and high performance from high quality grains of SLS technology make it possible to come true a uniform large size LTPS TFT-LCD with half number of data driver IC's used in typical a-Si LCD. High aperture ratio of 65% was obtained using an organic inter insulating method, which lead a high brightness of 500cd/cm2.

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Characteristics of Porous Ceramics Depending on Water Content of the Water Glass and Heat Treatment Temperature (물유리의 수분 함량 및 열처리 온도에 따른 다공체의 특성)

  • Kong, Yang-Pyo;Seo, Sang-Hun;Kim, Jong-Ho;Suhr, Dong-Soo
    • Journal of the Korean Ceramic Society
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    • 제42권10호
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    • pp.691-697
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    • 2005
  • Porous ceramics which have closes pore were fabricated by heat treatment at 100$\∼$ 600$^{\circ}C$ for 30 min using dried water glasses with 25, 35, and 45 wt$\%$ water contents. Size and distribution of the closed pore were varied depending on the water contents and heat treatment temperature. The expansion procedure could be distinguished by two stages. The frist stage occurred around loo$\%$ due to the evaporation of water and the second stage occurred at 200$\∼$400$^{\circ}C$ due to the decomposition of Si-OH compounds. The specimen was not expanded successfully because of the softening of the dried water glass at 500$\∼$600$^{\circ}C$.

Preparation of Porous Glass Membranes by the Phase-Separation Technique (상분리법에 의한 다공질 유리막의 제조)

  • 현상훈;최봉호
    • Journal of the Korean Ceramic Society
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    • 제25권1호
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    • pp.59-65
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    • 1988
  • To develop porous glass membranes used for a effective membrane-separation process, porous glasses and glass membranes were prepared from the sodium borosilicate parent glass by the phaseseparation technique and effects of heat-treatment and leaching conditions on their characteristics were investigated. The crack-free glass membranes could be fabricated from the 9.4 Na2-O-30.7 B2O3-59.2 SiO2-0.7 Al2O3(wt%) parent glass by heat-treatment at the lower temperature(550-570$^{\circ}C$) and for longer than 45 hrs for the phase separation, followed by leaching with 3N-HCl+60% ethylene glycol solution at 90$^{\circ}C$ over 25 hrs. Porous glasses prepared in this work showed large specific surface areas(400㎡/g) and narrow pore size distribution with the mean pore radius of 14${\AA}$ enough for the application as reverse osmosis membranes. The salt-rejection efficiency and product-flux of the glass membranes heat-treated at 570$^{\circ}C$ for 80 hrs were found to be 51.8% and 270cc/㎡. hr, respectively. This result suggests that the porous glass membranes fabricated in this study could be applied for the reverse osmosis process.

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Effects of Thermal Heat Treatment Process on the Ferroelectric Properties of ReMnO3 (Re:Ho, Er) Thin Films (ReMnO3(Re:Ho, Er) 박막의 강유전성에 미치는 열처리 공정의 영향)

  • Kim, Eung-Soo;Chae, Jung-Hoon
    • Journal of the Korean Ceramic Society
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    • 제42권11호
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    • pp.763-769
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    • 2005
  • Ferroelectric $ReMnO_3$(Re:Ho, Er) thin films were deposited on Si(100) substrate by Metal-Organic Chemical Vapor Deposition (MOCVD). Crystallinity and electric properties of $ReMnO_3$(Re:Ho, Er) thin films were investigated as a function of thermal heat treatment process, CHP (Conventional Heat-treatment Process) and RTP (Rapid Thermal Process). $ReMnO_3$(Re:Ho, Er) thin films prepared by RTP showed higher c-axis preferred orientation and homogeneous surface roughness than those prepared by CHP. The remnant polarization of ferroelectric hysteresis loop of $ReMnO_3$(Re:Ho, Er) thin films was strongly dependent on the c­axis preferred orientation of hexagonal single phase, and the leakage current characteristics of thin films were dependent on the homogeneity of grain size as well as surface roughness of thin films.

Fabrication of Stabilized Fine Leucite Powder and Its Thermal Expansion Properties (상안정화된 Leucite의 미세분말 합성과 열적 팽창 특성 연구)

  • Hong, Sung-Jin;Kim, Deug-Joong;Yoo, Young-Sung
    • Journal of the Korean Ceramic Society
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    • 제46권5호
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    • pp.493-496
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    • 2009
  • Phase stabilized leucite, which has high coefficient of thermal expansion, was synthesized, and its thermal expansion behavior was investigated. The homogeneous leucite phase was synthesized by solid state reaction from the mixture of $K_2CO_3-Al_2O_3-SiO_2$. and its stabilization from tetragonal to cubic phase was attempted by adding $Cs_2CO_3$ into starting materials. And fine powder with an average particle size of a few hundreds ${\mu}m$ were fabricated by planetary milling. During milling, amorphization of leucite was observed and recrystallized after heat treatment. The thermal expansion behavior of tetragonal and cubic leucite has measured and discussed. The average coefficient of thermal expansion of tetragonal and cubic phase leucite from room temperature to $750^{\circ}C$ was $21.4{\times}10^{-6}/^{\circ}C$ and $14.5{\times}10^{-6}/^{\circ}C$, respectively.

First Hydrogelation of Discrete Metal Complexes. Structures and Fluxional Behavior of Cyclopalladium(II) Complexes

  • Na, Young-Mee;Noh, Tae-Hwan;Ha, Byung-Jo;Hong, Jong-Ki;Jung, Ok-Sang
    • Bulletin of the Korean Chemical Society
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    • 제30권3호
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    • pp.573-576
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    • 2009
  • The reaction of $(en)Pd(NO_3)_2$ (en = ethylenediamine) with 1,4-bis(dimethyl-4-pyridylsilyl)benzene (L) affords cyclodimer, $[(en)Pd(L)]_2(NO_3)_4$, whereas the reaction of $(tmeda)Pd(NO_3)_2$ (tmeda = N,N,N’,N’-tetramethylethylenediamine) with L gives cyclotrimer, $[(tmeda)Pd(L)]_3(NO_3)_6$. Both complexes exist as catenane in water. The catenated cyclodimer is rigid whereas the catenated cyclotrimer is dynamic in water. The catenated cyclotrimers afford hydrogel containing 98.5% water below 2 ${^{\circ}C}$. The hydrogel changes to its sol around 38 ${^{\circ}C}$, and to its clear solution at 78 ${^{\circ}C}$. Such a notable difference between $[(en)Pd(L)]_2(NO_3)_4$ and $[(tmeda)Pd(L)]_3(NO_3)_6$ might be explained by their different dynamic behavior via ring size effects.

Microstructural investigation of the electroplating Cu thin films for ULSI application (ULSI용 Electroplating Cu 박막의 미세조직 연구)

  • 박윤창;송세안;윤중림;김영욱
    • Journal of the Korean Vacuum Society
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    • 제9권3호
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    • pp.267-272
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    • 2000
  • Electroplating Cu was deposited on Si(100) wafer after seed Cu was deposited by sputtering first. TaN was deposited as a diffusion barrier before depositing the seed Cu. Electroplating Cu thin films show highly (111)-oriented microstructure for both before and after annealing at $450^{\circ}C$ for 30min and no copper silicide was detected in the same samples, which indicates that TaN barrier layer blocks well the Cu diffusion into silicon substrate. After annealing the electroplating Cu film up to $450^{\circ}C$, the Cu film became columnar from non-columnar, its grain size became larger about two times, and also defects density of stacking faults, twins and dislocations decreased greatly. Thus the heat treatment will improve significantly electromigration property caused by the grain boundary in the Cu thin films.

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The Karyotype of Payamphistomum cervi(Zeder, 1790) from Korean Cattle (한국산 사슴쌍구흡충의 핵형분석)

  • Lee, Jae-Gu;Kim, Yong-Hwan;Park, Bae-Geun
    • Parasites, Hosts and Diseases
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    • 제25권2호
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    • pp.154-158
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    • 1987
  • As a series of systematic classification of paramphistomes, the worms in the rumen and reticulum were collected on 214 Korean cattle slaughtered at Jeonju abattoir from January, 1986 to April, 1987 and were classified by means of morphology. Afterwards, the karyotype of Paramphistomum cervi(Zeder, 1790) was detected by means of modified air.drying method from germ cells of the worms. The results were summarized as follows: 1. In the chromosome number of 254 p. cervi, the haploid cell was n:9 and the diploid 2n=18. The meiotic divisions were observed frequently; 1,924 haploid and 32 diploid cells were reliable. Nine pairs of mitotic chromosomes were homologous in the metaphase stage, and the chromosomes were composed of five medium-sized metacentrics (m) , subtelocentrics(st) or submetacentrics(sm) and four small-siRed subtelocentrics(st) or submetacentrics(sm). Meiotic metaphase was composed of five medium and four small chromosomes in size. 2. As a series of C-banding method, C-band was showed in centromeric region from all of the haploid germ cells. Whereas chromosome No. 3 and 5 included heterochromatin on the tip region, chromosome No. 4 on the distal region and No. 6 proximal region. And chromosomes No. 2 and 8 showed a remarkable C-band distinguished from other chromosomes.

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