Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Preparation of Ferroelectric $Cr_3C_2$ Thin Film Using Sol-Gel Spin Coating Process

솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조

  • 배호기 (인하대학교 무기재료공학과) ;
  • 고태경 (인하대학교 무기재료공학과)
  • Published : 1994.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{\circ}C$ for 30 min. After the heat treatment, the film was 0.200$\pm$0.010 ${\mu}{\textrm}{m}$ thick and its grain size was 0.059 ${\mu}{\textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{\circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.

Keywords

References

  1. J. Appl. Phys. v.69 no.2 Metalorganic Chemical Vapor Deposition of BaTiO₃ Thin Films B.S. Kwak;K. Zhang;E.P. Boyd;A. Erbil
  2. J. Appl. Phys. v.24 Optically Induced Refractive Index Changes in BaTiO₃ R.L. Townsend;J.T. Lamacchia
  3. J. Ceram. Soc.Japan v.100 no.9 Changes in the Crystal Structure of RF-Magnetron Sputtered BaTiO₃ Thin Films K. Uchino;N.Y.Lee;T. Toba;N. Usuki;H. Aburatani;Y. Ito
  4. Japan. J. Appl. Phys. v.30 Metalorganic Chemical Vapor Deposition of BaTiO₃ Films of MgO(100) H. Nakazawa;H. Yamane;T. Hirai
  5. Appl Phys. Lett v.55 no.2 Epitaxial Growth of Thin Films of BaTiO₃ Using Eximer Laser Ablation G.M. Davis;M.C. Gower
  6. Ceram. Bull. v.55 no.12 Proparation of BaTiO₃ Films by Hydrolysis of Organometallic Compounds J. Fukusima;K. Kodaira;T. Matsushita
  7. Inorg. Mat. v.17 Preparation of ferroelectric Barium Titanate Films from Solutions of Metal Alcoholates M.I. Yanavskaya;N. Ya, Turova;E.P. Turevskaya;A.V. Novoselova;Yu, N. Venevtsev;S.I. Sagitov;E.H. Sovoleva
  8. Mat Res. Soc. Symp. Proc. v.32 Preparation of Barium Titanate Films Using Sol-Gel Techniques R.C. Dosch
  9. Mat. Res. Soc. Symp. Proc. v.121 Sol-Gel Processed BaTiO₃ N. Della;S. Mohallem;M.A. Aegerter
  10. Mat. Res. Soc. Symp Proc. v.180 Sol-Gel Deposition of Electronic Ceramics Films J.M. Bell;B.B. Nissam;M. Anast;B.O. West;L. Spiccia;J. Cullen;I. Watkins;D. Villers;G. Johnston
  11. J Ceram. Soc Japan v.98 no.8 Preparation of Ferroelectric BaTiO₃ Films by Sol-Gel Process and Dielectric Properties T. Tuchiya;T. Kawano;T. Sei;J. Hatano
  12. Appl. Phys. Lett. v.59 no.27 Structural and Optical Properties of Sol-Gel Processed BaTiO₃ Ferroelectric Thin Films M.N. Kamalasanan;S. Chandra;P.C. Joshi;A. Mansingh
  13. Mat Res. Soc. Symp. Proc. v.271 Preparation of BaTiO₃ and PbTiO₃ thin films BaPbO₃ substrates by the sol-gel method and their properties M. Kuwabara;T. Kuroda;S. Dakahashi;T. Azuma
  14. Mat. Res. Soc. Symp. Proc. v.271 Chemical processing and properties of nanocrystalline BaTiO₃ Z. Xu;H.K. Chae;M.H. Frey;D.A. Payne
  15. J. Ceram. Soc. Japan v.99 no.10 Sol-Gel thin film formation C.J. Brinker;A.J. Hurd;G.C. Frye;P.R. Schunk;G.S. Ashley
  16. Adv. Ceram. Mat. v.3 no.2 Sol-gel systhesis of barium titanate powders using barium acetate and titanium (Ⅳ) isoproprxide P.P. Phule;S.H. Risbud
  17. J. Ceram Soc. Japan v.100 no.5 Preparation on monodispersed BaTiO₃ powders by hydrolysis of Ba/Ti bimetallic alkoxide M. Ikeda;S.K. Lee;K. Shinozaki;N. Mizutani
  18. Dokl. Akad. Nauk SSSR v.242 Investigation of the formation of bimetallic alkoxides E.P. Trevskaya;N.Y. Turova;A.V. Novoselova
  19. J. Appl. Phys v.64 no.5 Preparation of Pb(Zr, Ti)O₃ thin films by sol-gel processing: electrical, optical, and electro-optic properties G. Yi;Z, Wu;M. Sayer
  20. Mat. Res. Soc. Symp. Proc. v.32 Effect of water on acd- and base-catalyzed hydrolysis of tetraethylorthosilicates(TEOS) L.C. Klein;G.J. Garvey
  21. J. Am. Ceram. Soc. v.76 no.3 Metal organic resin derived barium titanate:Ⅰ, formation of barium titanium oxycarbonate intermediate S. Kumar;G.L. Messing;W.B. White
  22. J. Mat. Sci. v.25 Preparation of multiple oxide BaTiO₃ fibres by the sol-gel method T. Yoko;K. Kamiya;k. Tanaka
  23. J. Non-Cryst. Solids v.82 Synthesis of glass 'Precusor' BaO, TiO₂nH₂O by gel processing J.L. Respringer;P. Poix;J.C. Bernier
  24. J. Am. Ceram. Soc. v.69 no.9 Kinetics BaTiO₃ and PbTiO₃ formation from metal organic precussors A.S. Shaikh;G.M. Vest
  25. J. Br Ceram. Trans. v.86 no.4 Barium titanate monolithic gels F. Chaput;J.P. Boilot
  26. Mat. Res. Soc. Symp. Proc. v.121 Sol-gel processing of lithium niobate thin layers on silicon D.J. Eichorst;D.A. Payne
  27. J. Mat. Sci. v.23 Formation of LiNbO₃ powders and thin films by hydrolysis of metal alkoxides M.I. Yanovskaya;E.P. Turevskaya;A.P. Leonov;S.A. Ivanov;N.V. Kolganova;S.Y. Stefanovich;N.Y. Turova;Yu, N. Venevtsev
  28. J. Appl. Phys. v.58 no.4 Dielectric properties of fine grained barium titanate ceramics G. Alt;D. Hennings;G. de with
  29. International symposium on applications of ferroelectrics AC conductivity and dielectric properties sol-gel PZT thin films for ferroelectric memory applications X. Chen;A.I. Kingon;O. Auciello
  30. Jpn. J. Appl. Phys. v.32 no.9B Preparation and properties of ferroelectric BaTiO₃ thin films by sol-gel precess T. Hayashi;N. Ohji;K. Hirohara;T. FuKunaga;H. Maiwa