• Journal of the Korean Ceramic Society
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• v.51 no.6
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• pp.566-569
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• 2014

ZnO and SiC powders were fabricated to make crack-free composite membranes. Parts of some membranes were re-treated with an encapsulation process. These membranes were characterized by XRD, BET, and FE-SEM analyzes. The hydrogen permeation fluxes of the encapsulated and heat-treated membranes after encapsulation were observed using Sievert's type equipment. Values were measured at 1 bar with increasing temperatures. The obtained values of encapsulated and further heat-treated membrane at 298 K were $4.20{\times}10^{-6}$ and $8.64{\times}10^{-5}mol/m^2sPa$, respectively.

• Membrane Journal
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• v.14 no.3
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• pp.201-206
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• 2004

The stability of the prepared silica membrane by chemical vapor deposition (CVD) method in the HI-$H_2O$ gaseous mixture was evaluated aiming at the application for hydrogen iodide decomposition in the thermochemical IS process. Porous $\alpha$-alumina having pore size of 100 nm was modified by the different CVD temperature using tetraethoxysilane as the Si source. The CVD temperature was $700^{\circ}C$, $650^{\circ}C$, and $600^{\circ}C$. The $H_2$/H$_2$ selectivities of the modified membranes which were measured by single-component permeation experiment showed 43.2, 12.6, and 8.7 at $600^{\circ}C$ for the M1 (CVD temperature was $700^{\circ}C$), M2 (CVD temperature was $650^{\circ}C$) and M3 membranes (CVD temperature was $600^{\circ}C$), respectively. Stability experiment in the HI-$H_2O$ gaseous mixture was carried out at $450^{\circ}C$. The prepared silica membrane at $600^{\circ}C$ of CVD temperature was more stable than that at the other CVD temperature.

• Membrane Journal
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• v.16 no.4
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• pp.268-275
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• 2006

Novel SILEMs were prepared by multi-stage phase separation process combined by the low temperature phase separation (LTPS) and the high temperature phase separation (HTPS) using room temperature ionic liquids (RTILs) which have a high ionic conductivity. PVDF and imidazolium series ionic liquids were used as membrane material and electrolyte, respectively. To study the ion conducting properties, the SILEMs were tested using LCR meter at temperature controlled from 30 to $130^{\circ}C$. Under humid conditions, with increasing temperature from 30 to $100^{\circ}C$, the ion conductivity of the cast $Nafion^{(R)}$ membrane increased linearly, but then started to decrease after $100^{\circ}C$. However, in the case of the SILEMs, with increasing operating temperature, the ion conductivity increased. Also, the ion conductivity behaviors of the SILEMs were almost same, regardless of humidity. The ion conductivity of the SILEMs was $2.7{\times}10^{-3}S/cm$ and increased almost linearly up to $2.2{\times}10^{-2}S/cm$ with increasing temperature to $130^{\circ}C$. The effects of an inorganic filler on the physical properties of the SILEMs were studied using the $SiO_2$. The addition of $SiO_2$ could improve the mechanical strength of the SILEMs, though the ionic conductivity was decreased slightly.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05a
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• pp.197-201
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• 2002

This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

• Proceedings of the Membrane Society of Korea Conference
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• 2004.11a
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• pp.172-175
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• 2004

• Journal of Energy Engineering
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• v.20 no.3
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• pp.171-177
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• 2011

PVA/GLA/$Al_2O_3{\cdot}3SiO_2$ composite membranes were prepared through the reaction polyvinyl alcohol (PVA) with glutaraldehyde (GLA) as a cross-linking agent and subsequently adding aluminum silicate ($Al_2O_3{\cdot}3SiO_2$) as an inorganic material. The water uptake decreased as the GDL contents increased due to cross-linking process of PVA with GDL, and the ion conductivity increased as the $Al_2O_3{\cdot}3SiO_2$ contents increased in PVA/GLA/$Al_2O_3{\cdot}3SiO_2$ composite membranes. The cross-linking structure of the polymers was confirmed using IR and the tendency of water uptake. The thermal analysis of the copolymers was carried out by TGA. TGA results showed that PVA/GLA composite membrane were more heat-resistant than PVA due to the cross-linking of PVA, and the heat stability of the composite membranes improved much more as the concentration of $Al_2O_3{\cdot}3SiO_2$ increased. Membranes prepared in this study seem to be have thermal stability and increase a tendency of the cation conductivity up to $60^{\circ}C$, but to be exhibit lower performance tendency at over $90^{\circ}C$. Therefore, it is necessary to do more aggressive effort to explore the possibility of application as an ion-conductive composite electrolyte.

• Journal of Microbiology and Biotechnology
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• v.14 no.3
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• pp.635-638
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• 2004

An ATP-binding-cassette (ABC) transporter gene in the cephabacin biosynthetic gene cluster of Lysobacter lactamgenus was characterized. The amplified orf10 (cpbJ) gene was subcloned into pET-28a(+) vector and expressed in E. coli BL21(DE3) strain by 0.5 mM IPTG at $30^{\circ}C$. The membrane fraction of recombinant E. coli cells was separated by ultracentrifugation, and solubilized using 2.5% octyl-$\beta$-D-glucoside. Using the solubilized membrane fraction, the artificial proteoliposomes were reconstituted and analyzed for the biological activity of CpbJ protein. Upon measuring ATPase activity, the proteoliposome made from recombinant E. coli membrane proteins showed slightly higher activity than that from host E. coli membrane proteins. In the measurement of membrane transport activity, the reconstituted proteoliposome of recombinant E. coli membrane proteins exhibited higher activity when both substrates of cephalosporin C and L-Ala-L-Ser were applied, compared to the case of cephalosporin C or L-Ala-L-Ser only. It implies that the CpbJ protein is an ABC transporter secreting cephabacin antibiotics synthesized in cytoplasm.

• Journal of Sensor Science and Technology
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• v.12 no.3
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• pp.103-111
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• 2003

A chromel-alumel thermoelectric flow sensor using $Si_3N_4/SiO_2/Si_3N_4$ thermal isolation membrane was fabricated. Temperature coefficient of resistance of thin film Pt-heater was about $0.00397/^{\circ}C$, and Seebeck coefficient of chromel-alumel thermocouple was about $36\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and $N_2$-flow sensitivity increased as heater voltage increased or the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_2$-flow sensitivity and thermal response time of the sensor were about $1.5\;mV/sccm^{1/2}$ and 0.18 sec., respectively. Linear range in flow sensitivity of the flow sensor was wider than that of Bi-Sb flow sensor.

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.37-40
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• 2003

We have studied micro-machining technologies to fabricate parts and sensors used in the semiconductor equipment. The studies were based on the silicon integrated circuit processes, and composed of the anisotropic etching of single crystal silicon to fabricate a membrane structure for hot and cold junctions in the infrared absorber. KOH and TMAH were used as etching solutions for the anisotropic wet etching for membrane structure formation. The etching characteristic was observed for the each solution, and etching rate was measured depending upon the temperature and concentration of the etching solution. The different characteristics were observed according to pattern directions and etchant concentration. The pattern was made to incline $45^{\circ}$ on the primary flat, and optimum etching property was obtained in the case of 30 wt% and $90^{\circ}C$ of KOH etching solution for the formation of the membrane structure.

• Proceedings of the Membrane Society of Korea Conference
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• 1994.04a
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• pp.58-58
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• 1994

슬립캐스팅법으로 제조한 튜브형 $\alpha$-알루미나 담체 (평균기공크기 = $0.1 \mum$)에 졸-겔 침지코팅(dipcoating) 또는 가압코팅 (pressurized coating) 법에 의하여 극미세입자 $\gamma$-AlOOH, $TiO_2, SiO_2$, 및 aluminosilicate diphasic 졸을 코팅한 후 300 ~ 500$\circ$C 에서 열처리하여 세라믹 복합막을 제조하였다. 복합막 전체에 대한 균열유무는 $N_2$ 기체투과율의 평균압력에 대한 의존성으로부터 평가하였으며, 한외여과 (ultrafiltration)에의 응용성을 규명하기 위하여 막의 재질 및 제조조건에 따른 polyethylene glycol (PEG) 수용액의 분획분자량 변화를 측정하였다. 합성 세라믹 복합막의 분획분자량 측정 결과 $SiO_2$의 경우 2,000 정도로 매우 우수하였으며 $\gamma-Al_2O_3, TiO_2$, 그리고 aluminosilcate 막들은 6,000 ~ 10,000 범위 값을 갖고 있었다. 또한 막의 기공크기 및 분획분자량을 제어하기 위한 방법으로서 $TiO_2$ 복합막을 300 ~ 700$\circ$C 에서 열처리하였으며 이들에 대한 분획분자량 변화를 비교 분석하였다.