• Title/Summary/Keyword: SiC diameter expansion

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The Diameter Expansion of 6H-SiC Single Crystals by the Modification of Inner Guide Tube (새로운 가이드 튜브를 통한 6H-SiC 단결정의 직경 확장에 관한 연구)

  • Son, Chang-Hyun;Choi, Jung-Woo;Lee, Gi-Sub;Hwang, Hyun-Hee;Choi, Jong-Mun;Ku, Kap-Ryeol;Lee, Won-Jae;Shin, Byoung-Chul
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.795-800
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    • 2008
  • A sublimation method using the SiC seed crystal and SiC powder as the source material is commonly adopted to grow SiC bulk single crystal. However, it has proved to be difficult to achieve the high quality crystal and the process reliability because SiC single crystal should be grown at very high temperature in closed system. The present research was focused to improve SiC crystal quality grown by PVT method through using the new inner guide tube. The new inner guide tube was designed to prevent the enlargement of polycrystalline region into single crystalline region and to enlarge the diameter of SiC single crystal. The 6H-SiC crystals were grown by conventional PVT process. The seed adhered on seed holder and the high purity SiC source materials are placed on opposite side in sealed graphite crucible surrounded by graphite insulation. The SiC bulk growth was conducted around 2300 $^{\circ}C$ of growth temperature and 50 mbar in an argon atmosphere of growth pressure. The axial thermal gradient across the SiC crystal during the growth was estimated in the range of 15${\sim}$20 $^{\circ}C$/cm.

Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design (도가니 구조 변경을 통한 6H-SiC 단결정의 직경 확장에 관한 연구)

  • Kim, Jung-Gyu;Kyun, Myung-Ok;Seo, Jung-Doo;An, Joon-Ho;Kim, Jung-Gon;Ku, Kap-Ryeol;Lee, Won-Jae;Kim, Il-Soo;Shin, Byoung-Chul
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.7
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    • pp.673-679
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    • 2006
  • A sublimation method using the SiC seed crystal and SiC powder as the source material is commonly adopted to grow SiC bulk single crystal. However, it has proved to be difficult to achieve the high quality crystal and the process reliability because SiC single crystal should be grown at very high temperature in closed system. In this study, SiC crystal boules were prepared with different angles in trapezoid-shaped graphite seed holders using sublimation physical vapor transport technique (PVT) and then their crystal quality was systematically investigated. The temperature distribution in the growth system and the crystal shape were varied with angles in trapezoid-shaped graphite seed holders, which was successfully simulated using 'Virtual Reactor'. The SiC polytype proved to be the n-type 6H-SiC from the typical absorption spectrum of SiC crystal. The micropipe densities of SiC wafers in this study were measured to be < $100/cm^2$. Consequently, SiC single crystal with large diameter was successfully achieved with changing angle in trapezoid-shaped graphite seed holders.

The Electric Properties And Fabrication of High Temperature Heating Elements of $MoSi_2$ (이규화몰리브덴 고온발열체의 전기적 특성 및 제조에 관한 연구)

  • 이후인;심건주;한상옥
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.605-608
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    • 2001
  • Molybdenum disilicide is widely used for manufacturing high-temperature heating elements owing to its low electrical resistivity, good thermal conductivity, and ability to withstand oxidation at high temperatures. MoSi$_2$heating elements with 4-5wt% of montmorillonite type bentonite as plasticzer and a small amount of Si$_3$N$_4$, ThO$_2$, and B as additives was manufactured. Extruded rods of 3.7mmø and 6.7mmø diameter and 400mm long were fabricated using a vacuum extruder, which were then sinrered for 4-5 hrs. at the max. temperrature of 140$0^{\circ}C$. After 10 minute's oxidation treatment, the diameter of the rod is reduced. The heating elements thus prepared was stable at 1$700^{\circ}C$ and the physical properties such as specific electrical resistivity, hardness, apparent densisty, thermal expansion coefficient, and bending strength were almost identical with thoes of commercial heating elements. In this study we have tried to gain the practical knowledge of manufacturing MoSi$_2$heating elements so that it may be utilized later in a research of pilot scale and eventually be transferred to industry.

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Fabrication of Hypereutectic Spray-formed Al-Si Alloy and Its Deformation Behavior (분무성형을 통한 과공정 Aㅣ-Si 합금 제조 및 기계적 특성)

  • Ha T. K.;Kim J.;Park W. J.;Lee E. S.;Ahn S.;Chang Y. W.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2001.05a
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    • pp.20-23
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    • 2001
  • Hypereutectic Al-25Si alloy, which is expected to be applied to the cylinder-liner-part of the engine-block of an automobile due to its excellent wear resistance, low density and low thermal expansion coefficient, has been fabricated through a spray forming process. The obtained microstructure of the hypereutectic Al-25Si alloy appeared to consist of Al matrix and equiaxed Si particles of average diameter of 5-7 mm. To characterize the deformation behavior of this alloy, a series of load relaxation and compression tests have been conducted at temperatures ranging from RT to $500^{\circ}C$. The strain rate sensitivity parameter (m) of this alloy has been found to be very low (0.1) below $400^{\circ}C$ and reached maximum value of about 0.2 at $500^{\circ}C$. During the deformation above $300^{\circ}C$ in compression, strain softening has been observed. The diagram of extrusion pressure vs. ram-speed has been constructed. The extrusion has been successfully conducted at the temperatures of $300^{\circ}C$ and above with the ratio of area reduction of 28 and 40 in this study.

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Deformation Behavior of Spray-formed Hypereutectic Al-Si Alloys (분무성형을 통해 제조된 과공정 Al-Si 합금의 기계적 특성)

  • Park W. J.;Ha T. K.;Ahn S.;Chang Y. W.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2001.10a
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    • pp.285-288
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    • 2001
  • Hypereutectic Al-25Si-X alloys, expected to be applied to the cylinder-liner-part of the engine-block of an automobile due to the excellent wear resistance, low density and low thermal expansion coefficient has been fabricated through a spray forming process. The obtained microstructure of the hypereutectic Al-25Si-X alloy appeared to consist of Al matrix and equiaxed Si particles of average diameter of $5-7{\mu}m$. To characterize the deformation behavior of this alloy, a series of load relaxation and compression tests have been conducted at temperatures ranging from RT to $500^{\circ}C$. The strain rate sensitivity parameter (m) of this alloy has been found to be very low (0.1) below foot and reached 0.2 at $500^{\circ}C$. During the deformation above 300'c in compression, strain softening has been observed. The diagram of extrusion pressure vs. ram-speed has been constructed, providing the extrusion condition of Al-25Si-X alloys.

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Mechanical evaluation of SiC-graphite interface of seed crystal module for growing SiC single crystals (탄화규소 단결정 성장을 위한 종자결정모듈의 탄화규소-흑연 간 접합계면의 기계적 특성 평가)

  • Kang, June-Hyuk;Kim, Yong-Hyeon;Shin, Yun-Ji;Bae, Si-Young;Jang, Yeon-Suk;Lee, Won-Jae;Jeong, Seong-Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.5
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    • pp.212-217
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    • 2022
  • Large thermal stress due to the difference between silicon carbide and graphite's coefficients of thermal expansion could be formed during crystal growing process of silicon carbide (SiC) at high temperature. The large thermal stress could separate the SiC seed crystals from graphite components, which bring about the drop of the seed crystal during crystal growth. However, the bonding properties of SiC seed crystal module has hardly reported so far. In this study, SiC and graphite were bonded using 3 types of bonding agents and a three-point bending tests using a mixed-mode flexure test were conducted for the bonded samples to evaluate the bonding characteristics between SiC and graphite. Raman spectroscopy, X-ray Photoelectron Spectroscopy, and X-ray Computed Tomography were used to analyze the bonding characteristics and the microstructures of the SiC-graphite interfaces bonded with the bonding agents. As results, an excellent bonding agent was chosen to fabricate SiC seed crystal module with 50 mm in diameter. An SiC single crystal with 50 mm in diameter was successfully grown without falling out during top seeded solution growth of SiC at high temperature.

Structural and optical properties of Si nanowires grown by Au-Si island-catalyzed chemical vapor deposition (Au-Si 나노점을 촉매로 성장한 Si 나노선의 구조 및 광학적 특성 연구)

  • Lee, Y.H.;Kwak, D.W.;Yang, W.C.;Cho, H.Y.
    • Journal of the Korean Vacuum Society
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    • v.17 no.1
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    • pp.51-57
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    • 2008
  • we have demonstrated structural evolution and optical properties of Si-nanowires (NWs) synthesized on Si (111) substrates with nanoscale Au-Si islands by rapid thermal chemical vapor deposition (RTCVD). The Au-Si nano-islands (10-50nm in diameter) were employed as a liquid-droplet catalysis to grow Si-NWs via vapor-liquid-solid mechanism. The Si-NWs were grown by a mixture gas of SiH4 and H2 at a pressure of 1.0 Torr and temperatures of $500{\sim}600^{\circ}C$. Scanning electron microscopy measurements showed that the Si-NWs are uniformly sized and vertically well-aligned along <111> direction on Si (111) surfaces. The resulting NWs are ${\sim}60nm$ in average diameter and ${\sim}5um$ in average length. High resolution transmission microscopy measurements indicated that the NWs are single crystals covered with amorphous SiOx layers of ${\sim}3nm$ thickness. In addition, the optical properties of the NWs were investigated by micro-Raman spectroscopy. The downshift and asymmetric broadening of the Si main optical phonon peak were observed in Raman spectra of Si-NWs, which indicates a minute stress effects on Raman spectra due to a slight lattice distortion led by lattice expansion of Si-NW structures.

Synthesis of Monolithic Gel to Bulk glass-Ceramic in Multicomponent Li2O-Al2O3-SiO2 System (Sol-Gel법에 의한 Li2O-Al2O3-SiO2계 괴상겔 및 결정화유리의 합성)

  • 양중식;작화제부
    • Journal of the Korean Ceramic Society
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    • v.25 no.5
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    • pp.541-551
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    • 1988
  • The purpose of this investigation was to prepare multicomponent monolithic Li-Al-Si gels of composition(mol%) 16.67 Li2O-16.67 Al2O3-66.67 SiO2 and to convert the gels to monolithic glass-ceramic at low temperature without melting. The hydrolysis, DTA, TGA, TMA, SEM, pore distribution, density and the activation energy for crystallization of the glass-ceramic formation with rawmaterials of which tetraethl orhosilicate of networkforming cation(Si) is partially hydrolyzed, aluminum isoproxide and lithium methoxide prepared by Li-metal react with methanol were studied. The results were as follows : 1) Monolithic gels which were added with additional water, resulting in a total water content 2.5 to 3.0 times the stoichiometric amount required to fully hydrolyze the alkoxides. 2) Specimens were dried to form crylinders 60mm in length and 40mm in diameter in about 800 hrs at 5$0^{\circ}C$. 3) $\beta$-eucryptite crystals and $\beta$-spodumene crystals were detected in samples heated above 75$0^{\circ}C$. 4) Within the temperature and range of 25-50$0^{\circ}C$ and 1,00$0^{\circ}C$ the thermal expansion coefficient for crystallized samples were shown as 2.6-5.7$\times$10-7/$^{\circ}C$ and 7.4-12.5$\times$10-7/$^{\circ}C$, respectively. 5) The activation energy for the crystal growth was 11.01kcal/mol at 794$^{\circ}C$ to 85$0^{\circ}C$.

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Pore-Controlled Synthesis of Mesoporous Silica Particles by Spray Pyrolysis from Aqueous Silicic Acid (규산 수용액으로부터 분무열분해법에 의한 기공 특성이 제어된 메조기공의 다공성 실리카 분말 합성)

  • Chang, Han Kwon;Lee, Jin Woo;Oh, Kyoung Joon;Jang, Hee Dong;Kil, Dae Sup;Choi, Jeong Woo
    • Particle and aerosol research
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    • v.8 no.2
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    • pp.89-95
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    • 2012
  • Spherical mesoporous silica particles, of which main pore diameter was 3.8 nm, were successfully prepared by spray pyrolysis from aqueous silicic acid. The effect of precursor concentration, reaction temperature, and the addition of urea and PEG on the particle diameter and pore properties such as pore diameter, total pore volume, and specific surface area were investigated by using FE-SEM, particle size analyzer, and nitrogen absorption-desorption analysis. With an increase of the precursor concentration from 0.2 M to 0.7 M, the average particle diameter, total pore volume, and specific surface area of the porous silica particles increased from 0.56 to $0.96\;{\mu}m$, 0.434 to $0.486\;cm^3/g$, 467.8 to $610.4\;m^2/g$, respectively. Within the temperature range $(600\;^{\circ}C{\sim}800\;^{\circ}C)$, there was no significant difference in the pore diameter, total pore volume, and specific surface area. In addition, the addition of urea as an expansion aid led to slight increases in particle diameter, pore diameter, and specific surface area. However, when the polyethylene glycol (PEG) as an organic template was used, the total pore volume of porous particles increased dramatically.

THE PHYSCIAL PORPERTIES OFY Y2O3-CONTAINING GLASS INFILTRATED ALUMINA CORE MADE BY PRESSURELESS POWDER PACKING METHOD (무가압 분말충전 알루미나에 이트리아를 함유한 붕규산염 유리를 침투시킨 코아 도재의 물성)

  • Whang, Seung-Woo;Lee, Keun-Woo
    • The Journal of Korean Academy of Prosthodontics
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    • v.35 no.1
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    • pp.221-243
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    • 1997
  • The objective of this study was to characterize the mechanical properties of $Y_{2}O_{3}$-containing glass infiltrated ceramic core material, which was made by pressureless powder packing method. A pure alumina powder with a grain size of about $4{\mu}m$ was packed without pressure is silicon mold to form a bar shaped sample, and applied PVA solution as a binder. Samples were sinterd at $1350^{\circ}C$ for 1 hour. After cooling, $Y_{2}O_{3}$-containing glass($SiO_{2},\;Y_{2}O_{3},\;B_{2}O_{3},\;Al_{2}O_{3}$, ect) was infiltrated to the sinterd samples at $1300^{\circ}C$ for 2 hours and cooled. Six different proportions $Y_{2}O_{3}$ of were used to know the effect of the mismatch of the thermal expansion coefficient between alumina powder and glass. The samples were ground to $3{\times}3{\times}30$ mm size and polished with $1{\mu}m$ diamond paste. Flexural strength, fracture toughness, hardness and other physical properties were obtained, and the fractured surface was examined with SEM and EPMA. Ten samples of each group were tested and compared with In-Ceram(tm) core materials of same size made in dental laboratory. The results were as follows : 1. The flexural strengths of group 1 and 3 were significantly not different with that of In-Ceram, but other experimental groups were lower than In-Ceram. 2. The shrinkage rate of samples was 0.42% after first firing, and 0.45% after glass infiltration. Total shrinkage rate was 0.87%. 3. After first firing, porosity rate of experimental groups was 50%, compared with 22.25% of In-Ceram. After glass infiltration, porosity rate of experimental groups was 2%, and 1% in In-Ceram. 4. There was no statistical difference in hardness between two materials tested, but in fracture toughness, group 2 and 3 were higher than In-Ceram. 5. The thermal expansion coefficients of experimental groups were varied to $4.51-5.35{\times}10^{-6}/^{\circ}C$ according to glass composition, also the flexural strengths of samples were varied. 6. In a view of SEM, many microparticles about $0.5{\mu}m$ diameter and $4{\mu}m$ diameter were observed in In-Ceram. But in experimental group, the size of most particles was about $4{\mu}m$, and a little microparticles was observed. The results obtained in this study showed that the mismatch of the thermal expansion coefficients between alumina powder and infiltrated glass affect the flexural strength of alumin/glass composite. The $Y_{2}O_{3}$-containing glass infiltrated ceramic core made by powder packing method will takes less time and cost with sufficient flexural strength similar to all ceramic crown made with slip casting technique.

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