Mechanical evaluation of SiC-graphite interface of seed crystal module for growing SiC single crystals |
Kang, June-Hyuk
(Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Yong-Hyeon (Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology) Shin, Yun-Ji (Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology) Bae, Si-Young (Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology) Jang, Yeon-Suk (Department of Advanced Materials Engineering, Dong-Eui University) Lee, Won-Jae (Department of Advanced Materials Engineering, Dong-Eui University) Jeong, Seong-Min (Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology) |
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