• 제목/요약/키워드: SiC coating

검색결과 563건 처리시간 0.029초

탄화규소 CVD 공정에서 CH3SiCl3-H2과 C3H8-SiCl4-H2계의 열역학적 비교 (Thermodynamic Comparison of Silicon Carbide CVD Process between CH3SiCl3-H2 and C3H8-SiCl4-H2 Systems)

  • 최균;김준우
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.569-573
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    • 2012
  • In order to understand the difference in SiC deposition between the $CH_3SiCl_3-H_2$ and $C_3H_8-SiCl_4-H_2$ systems, we calculate the phase stability among ${\beta}$-SiC, graphite and silicon. We constructed the phase-diagram of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure (P), temperature (T) and gas composition (C) as variables. Both P-T-C diagrams showed a very steep phase boundary between the SiC+C and SiC region perpendicular to the H/Si axis, and also showed an SiC+Si region with a H/Si value of up to 6700 in the $C_3H_8-SiCl_4-H_2$, and 5000 in the $CH_3SiCl_3-H_2$ system. This difference in phase boundaries is explained by the ratio of Cl to Si, which is 4 for the $C_3H_8-SiCl_4-H_2$ system and 3 for the $C_3H_8-SiCl_4-H_2$ system. Because the C/Si ratio is fixed at 1 in the $CH_3SiCl_3-H_2$ system while it can be variable in the $C_3H_8-SiCl_4-H_2$ system, the functionally graded material is applicable for better mechanical bonding during SiC coating on graphite substrate in the $C_3H_8-SiCl_4-H_2$ system.

Fabrication of Barium Ferrite Films by Sol-Gel Dip Coating and Its Properties.

  • T. B. Byeon;W. D. Cho;Kim, T. O.
    • Journal of Magnetics
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    • 제2권1호
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    • pp.16-21
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    • 1997
  • Those were investigated, the crystallographic, morphological, and magnetic properties of barium ferrite film (SiO2/Si substrate) prepared by sol-gel dip coating. Appropriate sol was prepared by dissolvin barium and iron nitrate in ethylene glycol at 80$^{\circ}C$. To obtain the films, thermally oxidized p-type silicon substrate with (111) of crystallographic orientation were dipped into the sol, dried at 250$^{\circ}C$ to remove organic material, and heated at 800$^{\circ}C$ for 3 hours in air for the crystallization of barium ferrite. It was found that the particles of barium ferrite formed on the substrate exhibited needle-like shape placing parallel to the substrate and its c-axis is long axis direction. There was tendency that the coercive force in horizontal direction to the substrate was higher than that in vertical direction to it. This tendency was profound in large thickness.

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Oxidation Resistance and Electrical Conductivity of $Ti_3SiC_2$ with Thin Oxide Layer

  • Hwang, Sung-Ik;Han, Kyoung-Ran;Kim, Chang-Sam
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1110-1111
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    • 2006
  • [ $Ti_3SiC_2$ ] was coated with $Al_2O_3$, MgO and $SiO_2$ respectively by sol-gel method and cured at 900 and $1200^{\circ}C$. The coated oxides did not react with $Ti_3SiC_2$ at $900^{\circ}C$ but reacted with it to form $TiC_x$ at $1200^{\circ}C$. The specimen coated with $SiO_2$ at $900^{\circ}C$ formed a dense protecting layer and showed the best oxidation resistance at $800^{\circ}C$ in air. However, the dense protecting layers did not form in $Al_2O_3$ and MgO coated specimens cured even at $900^{\circ}C$. MgO coated specimen showed the worst improvement in the oxidation resistance because the reactivity of MgO with $Ti_3SiC_2$ was highest. On the other hand, the electrical conductivities were measured in MgO and $Al_2O_3$ coated specimens to have TiCx but could not be measured in the $SiO_2$ coated ones because of the nonconductive dense protected layers.

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세라믹 섬유 복합체의 제조 및 물성 향상 (Fabrication of ceramic fibre composite and improvement of its property)

  • 김법진;신재혁;신동우;오근호
    • 한국결정성장학회지
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    • 제6권2호
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    • pp.203-212
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    • 1996
  • 본 연구에서는 탄소/탄소 복합체의 내산화성을 증진시키기 위하여 CVD법에 의한 SiC 코팅과 PCS 함침법을 응용하여 실험을 행하였다. 전자현미경으로 시편의 미세구조를 관찰 한 결과 CVD법에 의해서는 표면에 SiC가 고르게 증착되었으며, 함침법에 의해서는 각 탄소 섬유의 표면에 PCS가 wetting된 후 SiC로의 전이가 잘 일어났음을 확인하였고, 이로 인하여 각 섬유들의 결합력을 증대시키고 기계적물성에 증진을 가져왔음을 확인하였다. PCS 함침된 탄소/탄소 복합체 시편은 함침되지 않은 시편에 비해 밀도는 25 %, 곡강도 값은 3.5배, 내산화성은 2.8배가 증가하는 현격한 기계적 물성이 증가함을 보였다. 이러한 증가는 CVD법에 의해 코팅된 탄소/탄소 복합체 사편보다도 우수한 기계적 성질을 나타내였다.

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탄화규소막의 형성에 의한 흑연소지의 내산화성 향상에 관한 연구 (A Study on the Improvement of the Oxidation-Resistance of the Graphite Substrate by Forming of SiC Film on its Surface)

  • 조성준;이종민;김인기;장진석
    • 자연과학논문집
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    • 제8권2호
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    • pp.137-146
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    • 1996
  • Sol-Gel법에 의해 흑연소지의 표면에 SiC막을 형성해 줌으로써 내산화성을 향상시키고자 하였다. 규소(Si) 및 탄소(C)의 근원물질로는 TEOS(Tetraethyl orthosilicate)와 phenol수지를 각각 사용하였으며, TEOS sol의 농도가 SiC막의 형성에 미치는 영향을 알아 보기 위해, $H_2O$/TEOS의 몰비를 2, 4, 6, 8 및 10으로 변화시켜 흑연소지에 SiC가 피복된 상태를 X-ray diffractometer와 SEM(scanning electron microscope)을 이용하여 분석한 결과, 약 5 ${\mu}m$, 12 ${\mu}m$, 7 ${\mu}m$, 7 ${\mu}m$ 및 2 ${\mu}m$의 SiC코팅층이 각각 형성되었음을 알 수 있다. 또, 내산화성을 알아보기 위해 $1600^{\circ}C$에서 코팅된 흑연소지를 다시 공기중에서 $1000^{\circ}C$의 온도하에서 1 시간 동안 열처리 해 준 후의 무게소실율을 조사한 결과, 각각 26.17%, 20.97%, 17.28%, 21.73% 및 28.13%로 나타났다.

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새로운 고경도 Ti-Mo-Si-N 코팅막의 합성 및 기계적 특성 (Synthesis and Characteristics of New Quaternary Superhard Ti-Mo-Si-N Coatings)

  • 전진우;홍승균;김광호
    • 한국표면공학회지
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    • 제39권6호
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    • pp.245-249
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    • 2006
  • In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates(AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si targets in $N_2/Ar$ gaseous mixture. Ternary Ti-Mo-N coatings were substitutional solid-solution of (Ti, Mo)N and showed maximum hardness of approximately 30 GPa at the Mo content of ${\sim}10$. %. The Ti-Mo-Si-N coating with the Si content of 8.8 at. % was a composite consisting of fine (Ti, Mo)N crystallites and amorphous $Si_3N_4$ phase. The hardness of the Ti-Mo-Si(8.8 at. %)-N coatings exhibited largely increased hardness value of ${\sim}48$ GPa due to the microstructural evolution to the fine composite microstructure and the refinement of (Ti, Mo)N crystallites. The average friction coefficient of the Ti-Mo-Si-N coatings largely decreased with increase of Si content. The microstructures of Ti-Mo-Si-N coatings were investigated with instrumental analyses of XRD, XPS, and HRTEM in this work.

Metal-Organic Decomposition법에 의한 강유전성 $YMnO_3$ 박막의 제조 및 특성 (Preparation of Ferroelectric $YMnO_3$ Thin Films by Metal-Organic Decomposition Process and their Characterization)

  • 김제헌;강승구;김응수;김유택;심광보
    • 한국세라믹학회지
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    • 제37권7호
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    • pp.665-672
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    • 2000
  • The ferroelectric YMnO3 thin films were prepared by MOD(metal-organic decomposition) method with Y- and Mn-acetylacetonate as starting materials. Thin films were grown on various substrates by spin-coating technique. The crystalline phases of the thin films were identified by X-ray diffractometer as a function of heat-treatment temperature, pH of coating solution and substrate. In addition, the effect of Mn/Y molar ratio(0.8~1.2) on the formation of hexagonal-YMnO3 phase was investigated. In forming highly c-axisoriented hexagonal-YMnO3 single phase, the Pt coated Si substrate was more effective than the bare Si substrate, and the optimum heat-treatment condition was at 82$0^{\circ}C$ for 30 min. Higher Mn/Y molar ratio within 0.8~1.2 and pH of YMnO3 precursor solution within 0.5~2.5 favored formation of ferroelectric hexagonal phase rather than orthorhombic phase. Leakage current density of the hexagonal-YMnO3 thin film formed on Pt(111)/TiO2/SiO2/Si substrate was low enough as 0.4~4.0$\times$10-8(A/$\textrm{cm}^2$) at 5 V and its remanent polarization(Pr), calculated from the P-E hysteresis loop, was 3 nC/$\textrm{cm}^2$.

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흑연 금형 표면 보호용 PCS 코팅층의 열경화에 의한 조성비 조절 특성 연구 (Study on the Compositional Characteristics of the PCS Coating Layer by Curing Treatment for the Protection of Graphite Mold Surface)

  • 김경호;이윤주;신윤지;정성민;이명현;배시영
    • 한국표면공학회지
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    • 제53권6호
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    • pp.293-299
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    • 2020
  • The characteristics of the polycarbosilane (PCS)-based composite ceramic layer was studied by controlling the curing temperature. The stress at the interface of the graphite and SiOC composite layer was evaluated v ia finite element analysis. As a result, the tensile stress was released as the carbon ratio of the SiC decreases. In experiment, the SiOC layers were coated on the VDR graphite block by dip-coating process. It was revealed that the composition of Si and C was effectively adjusted depending on the curing temperature. As the solution-based process is employed, the surface roughness was reduced for the appropriate PCS curing temperature. Hence, it is expected that the cured SiOC layer can be utilized to reduce cracking and peeling of SiC ceramic composites on graphite mold by improving the interfacial stress and surface roughness.

탄화규소로 도포된 탄소/탄소 복합재의 고온 연소거동 (High Temperature Combustion Behavior of Carbon/Carbon Composites Coated with SiC)

  • 최돈묵;김정일
    • 한국방재학회 논문집
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    • 제1권1호
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    • pp.127-138
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    • 2001
  • CFRCs는 고온에서의 우수한 물성에도 불구하고, 연소에 대한 취약한 성질로 인하여 많은 분야에서 사용에 제약을 받고 있다. 그러므로 EFRCs의 연소저항성을 향상시키기 위해서 수 많은 연구가 수행되어지고 있다. 본 연구에서는 고온에서 보다 개선된 물성과 높은 연소저항성을 부여하고, 다른 도포물질과 비교해서 낮은 열팽창계수의 차이를 보이는 탄화규소를 Pack-Cementation 방법으로 4방향성 CFRCs에 도포하였다. 제작된 탄화규소로 도포된 CFRCs는 광학현미경의 관찰을 통하여 도포 메카니즘을 추정하였으며, TGA 시험을 통하여 개선된 연소저항성을 조사하였다. Arc plasma torch 시험을 통하여 고온 연소특성과 거동을 연구하였다. 그 결과로부터 탄화규소로 코팅된 CFRCs의 기계적 강도와 고온 연소특성이 순수한 4방향성 CFRCs에 비해서 개선되었다는 것을 알았다.

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Fabrication of Uniform Hollow Silica Nanospheres using a Cationic Polystyrene Core

  • Yun, Dong-Shin;Jang, Ho-Gyeom;Yoo, Jung-Whan
    • Bulletin of the Korean Chemical Society
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    • 제32권5호
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    • pp.1534-1538
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    • 2011
  • Uniform, hollow nanosilica spheres were prepared by the chemical coating of cationic polystyrene (cPS) with tetraethylorthosilicate (TEOS), followed by calcination at 600 $^{\circ}C$ under air. cPS was synthesized by surfactant-free emulsion polymerization using 2,2'-azobis (2-methyl propionamidine) dihydrochloride as the cationic initiator, and poly(vinyl pyrrolidone) as a stabilizer. The resulting cPS spheres were 280 nm in diameter, and showed monodispersion. After coating, the hollow silica product was spherically shaped, and 330 nm in diameter, with a narrow distribution of sizes. Dispersion was uniform. Wall thickness was 25 nm, and surface area was 96.4 $m^2/g$, as determined by BET. The uniformity of the wall thickness was strongly dependent upon the cPS surface charge. The effects of TEOS and ammonia concentrations on shape, size, wall thickness, and surface roughness of hollow $SiO_2$ spheres were investigated. We observed that the wall thicknesses of hollow $SiO_2$ spheres increased and that silica size was simultaneously enhanced with increases in TEOS concentrations. When ammonia concentrations were increased, the irregularity of rough surfaces and aggregation of spherical particles were more severe because higher concentrations of ammonia result in faster hydrolysis and condensation of TEOS. These changes caused the silica to grow faster, resulting in hollow $SiO_2$ spheres with irregular, rough surfaces.