• Title/Summary/Keyword: Si target

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Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System (하이브리드 코팅시스템에 의해 제조된 Cr-Mo-Si-C-N 박막의 미세구조 및 기계적 특성연구)

  • Yun, Ji-Hwan;Ahn, Sung-Kyu;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
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    • v.40 no.6
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    • pp.279-282
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    • 2007
  • Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

Pretilt control of nematic liquid crystal by deposition of $SiO_x$ film (비정질 $SiO_x$ 박막을 이용한 nematic 액정의 선경사각 제어)

  • Park, Jeong-Hun;Son, Pil-Guk;Cha, Seong-Su;Kim, Jae-Chang;Yun, Tae-Hun
    • Proceedings of the Optical Society of Korea Conference
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    • 2006.07a
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    • pp.91-92
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    • 2006
  • Liquid crystal (LC) alignment on $a-SiO_x$ thin film was investigated by means of X-ray photoemission spectroscopy and optical transmittance as we varied the deposition temperature and the target-to-substrate distance. LC molecules can be aligned vertically on $a-SiO_x$ film when the stoichiometric parameter x of $a-SiO_x$ is smaller than 1.56, but they can be aligned homogeneously when x is larger than 1.56. We also found that whether liquid crystals can be aligned vertically or homogeneously on $a-SiO_x$ film can be predicted simply by measuring the change in optical transmittance by deposition of $a-SiO_x$ thin film layers.

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CrN/AlSiN multilayer coatings의 고온안정성 및 특성에 관한 연구

  • Kim, Yeong-Su;Kim, Gwang-Seok;Kim, Seong-Min;Heo, Yong-Gang;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.47-47
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    • 2008
  • Cr and AlSi (Si=20 and 66 at.%) target들을 이용하여 Closed-field unbalanced magnetron sputtering (CFUBMS)으로 증착된 주기($\Lambda$)가 2.3 nm에서 8.0nm인 CrN/AlSiN multilayer coatings의 crystal structure, 화학적 조성, 및 기계적 특성을 glow discharge optical emission spectroscopy (GDOES), X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indenter 등의 분석장비를 이용하여 분석하였다. 고온안정성을 시험하기 위하여 $800^{\circ}C$$1000^{\circ}C$ 공기중 에서 30분 열처리하였다. CrN/AlSiN multilayer coatings의 고온안정성은 Si조성이 증가함에 따라 향상되었다. Si이 18.2 at.%함유된 coating이 가장 우수한 고온안정성을 갖고 있다.

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Fabrication of Si quantum dots superlattice embedded in SiC matrix (SiC 매트릭스를 이용한 실리콘 양자점 초격자 박막 제조)

  • Kim, Hyun-Jong;Moon, Ji-Hyun;Cho, Jun-Sik;Chang, Bo-Yun;Ko, Chang-Hyun;Park, Sang-Hyun;Yoon, Kyung-Hoon;Song, Jin-Soo;O, Byung-Sung;Lee, Jeong-Chul
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.163-166
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    • 2009
  • 다중접합 초 고효율 태양전지 제조를 위해 SiC 매트릭스를 이용한 실리콘 양자점 초격자 박막을 제조하고 특성을 분석하였다. $SiC/Si_{1-x}C_x$(x ~ 0.31)로 실리콘 양자점 초격자 박막을 Si과 C target을 이용한 co-sputtering법으로 초격자 박막을 제조하고, $1000^{\circ}C$에서 20분간 열처리를 하였다. high resolution transmission electron microscopy 사진으로 약1~7nm 크기인 양자점 생성과 분포 밀도를 확인할 수 있었으며, grazing incident X-ray diffraction (GIXRD)를 통해서 Si(111)과 $\beta$-SiC(111)이 생성되었음을 알 수 있었다. Auger electron spectroscopy (AES)측정에서 stoichiometric SiC층과 Si-rich SiC층의 Si 원자농도 (56%, 69%)와 C 원자 농도 (44%, 31%)를 알 수 있었으며, Fourier transform infra-red spectroscopy (FTIR)측정에서 SiC 픽의 위치가 767에서 $800cm^{-1}$으로 이동하는 것을 알 수 있었다.

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Mechanical Properties of TiAlSiN films Coated by Hybrid Process (하이브리드 공정으로 제조한 TiAlSiN 박막의 특성)

  • Song, Min-A;Yang, Ji-Hoon;Jung, Jae-Hun;Kim, Sung-Hwan;Jeong, Jae-In
    • Journal of the Korean institute of surface engineering
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    • v.47 no.4
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    • pp.174-180
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    • 2014
  • In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbide substrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAl and Si target were vaporized with the cathodic arc source and the magnetron sputtering source, respectively. Process gas was the mixture of nitrogen and argon gas. With the increase of Si content, the crystallinity and the grain size of TiAlSiN film was decreased. At the Si content of more than 8 at.%, grain size of TiAlSiN was saturated at around 2 nm. The hardness value of the TiAlSiN film increased with incorporation of Si, and had the maximum value of ~ 3,233 Hv at the Si content of 9.2 at.%. The oxidation resistance of TiAlSiN film was enhanced with the increase of Si content.

Synthesis and Characteristics of New Quaternary Superhard Ti-Mo-Si-N Coatings (새로운 고경도 Ti-Mo-Si-N 코팅막의 합성 및 기계적 특성)

  • Jeon, Jin-Woo;Hong, Seung-Gyun;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
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    • v.39 no.6
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    • pp.245-249
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    • 2006
  • In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates(AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si targets in $N_2/Ar$ gaseous mixture. Ternary Ti-Mo-N coatings were substitutional solid-solution of (Ti, Mo)N and showed maximum hardness of approximately 30 GPa at the Mo content of ${\sim}10$. %. The Ti-Mo-Si-N coating with the Si content of 8.8 at. % was a composite consisting of fine (Ti, Mo)N crystallites and amorphous $Si_3N_4$ phase. The hardness of the Ti-Mo-Si(8.8 at. %)-N coatings exhibited largely increased hardness value of ${\sim}48$ GPa due to the microstructural evolution to the fine composite microstructure and the refinement of (Ti, Mo)N crystallites. The average friction coefficient of the Ti-Mo-Si-N coatings largely decreased with increase of Si content. The microstructures of Ti-Mo-Si-N coatings were investigated with instrumental analyses of XRD, XPS, and HRTEM in this work.

Simultaneous Monitoring of KVN 4 Bands toward Evolved Stars

  • Cho, Se-Hyung
    • The Bulletin of The Korean Astronomical Society
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    • v.39 no.2
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    • pp.112.2-112.2
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    • 2014
  • We propose simultaneous monitoring observations of 22 GHz $H_2O$ and 43/86/129 GHz SiO masers toward ~15 evolved stars in order to investigate spatial structure and dynamical effect from SiO to $H_2O$ maser regions including mass-loss process and development of asymmetry in circumstellar envelopes. We also aim at investigating mutual association and difference between SiO and $H_2O$ masers for establishing SiO and $H_2O$ maser models coupled to hydrodynamical model of circumstellar envelope. In addition, the correlation and difference of SiO maser properties among J=1-0, J=2-1, and J=3-2 transition masers are traced according to different type of stars for constraining SiO pumping models. These scientific goals and target sources were determined based on KVN single dish and VLBI feasibility test observations at 4 bands. As a total observing time of every 2 month monitoring, about 90 and 360 hours (in average per year) are required for single dish and VLBI observations, respectively. From the 2014B observing season, these monitoring observations will be derived as one of KVN key science programs.

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Validation of Gene Silencing Using RNA Interference in Buffalo Granulosa Cells

  • Monga, Rachna;Datta, Tirtha Kumar;Singh, Dheer
    • Asian-Australasian Journal of Animal Sciences
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    • v.24 no.11
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    • pp.1529-1540
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    • 2011
  • Silencing of a specific gene using RNAi (RNA interference) is a valuable tool for functional analysis of a target gene. However, information on RNAi for analysis of gene function in farm animals is relatively nil. In the present study, we have validated the interfering effects of siRNA (small interfering RNA) using both quantitative and qualitative gene silencing in buffalo granulosa cells. Qualitative gene knockdown was validated using a fluorescent vector, enhanced green fluorescence protein (EGFP) and fluorescently labeled siRNA (Cy3) duplex. While quantitatively, siRNA targeted against the luciferase and CYP19 mRNA was used to validate the technique. CYP19 gene, a candidate fertility gene, was selected as a model to demonstrate the technique optimization. However, to sustain the expression of CYP19 gene in culture conditions using serum is difficult because granulosa cells have the tendency to luteinize in presence of serum. Therefore, serum free culture conditions were optimized for transfection and were found to be more suitable for the maintenance of CYP19 gene transcripts in comparison to culture conditions with serum. Decline in fluorescence intensity of green fluorescent protein (EGFP) was observed following co-transfection with plasmid generating siRNA targeted against EGFP gene. Quantitative decrease in luminescence was seen when co-transfected with siRNA against the luciferase gene. A significant suppressive effect on the mRNA levels of CYP19 gene at 100 nM siRNA concentration was observed. Also, measurement of estradiol levels using ELISA (enzyme-linked immunosorbent assay) showed a significant decline in comparison to control. In conclusion, the present study validated gene silencing using RNAi in cultured buffalo granulosa cells which can be used as an effective tool for functional analysis of target genes.

Study on the Enhancement of the Uniform Contact Technology for Large Scale Imprinting with the Design of Vacuum Gripping Pad (진공척 흡착패드 형태에 따른 대면적 임프린팅 균일 접촉 향상 연구)

  • Jang, Si-Youl
    • Tribology and Lubricants
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    • v.24 no.6
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    • pp.326-331
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    • 2008
  • The contact surfaces between mold and target should be in parallel for a proper imprinting process. However, large size of contacting area makes it difficult for both mating surfaces (mold and target planes) to be in all uniform contact with the expected precision level in terms of thickness and position. This is caused by the waviness of mold and target although it is very small relative to the area scale. The gripping force for both mold and target by the vacuum chuck is other major effect to interrupt the uniform contact, which must be avoided in imprinting mechanism. In this study, the cause of non-conformal contact mechanism between mold and target is investigated with the consideration of deformation due to the vacuum gripping for the size $470{\times}370\;mm^2$ LCD panel.

Reduction of Oncogene Expression in Cancer Cells Using siRNA Delivery Systems

  • Kim, Eun-Joong;Kim, Young-Bong;Choi, Han-Gon;Shim, Chang-Koo;Oh, Yu-Kyoung
    • Journal of Pharmaceutical Investigation
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    • v.35 no.5
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    • pp.343-348
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    • 2005
  • Recently, siRNA has been emerging as new therapeutic agents for various diseases such as cancers and infectious diseases. However, the evaluation for delivery systems for siRNA has not been fully done. In this study, we designed and delivered siRNA of oncogenic E6 and E7 proteins to several cell lines and tested the delivery efficiencies of various cationic nonviral delivery vectors. Of cationic delivery systems tested in this study, lipid-based Lipofectamine revealed higher delivery efficiency of siRNA to cervical cancer cell line, SiHa, compared to other delivery systems. Notably, the polyethylenimine, which showed the comparable delivery efficiencies in plasmid DNA, did not show significant delivery of siRNA in cervical cancer cells. These results indicate that the mechanisms involved in siRNA delivery might be different from those in plasmid DNA delivery, and that cationic lipid-based delivery vehicles deliver siRNA with higher efficiency to intracellular target sites.