1 |
Heyderman, L. J., Schift, H., David, C., Gobrecht, J. and Schweizer, T., 'Flow Behavior of Thin Polymer Films used for Hot Embossing Lithography', Microelectronic Engineering, Vol. 54, pp. 229-245, 2000
DOI
ScienceOn
|
2 |
Guo, L. J., 'Recent Progress in Nanoimprint Technology and Its Applications', J. Phys. D:Appl. Phys., Vol. 37, R123-141, 2004
DOI
ScienceOn
|
3 |
Schift, H., Bellini, S. and Gobrecht, J., 'Visualization of Mold Filling Stages in Thermal Nanoimprint by Using Pressure Gradients', J. Vac. Sci. Technol. B, Vol. 25, No. 6, pp. 2312-2316, 2006
|
4 |
Hamrock, B. J., Fundamentals of Fluid Film Lubrication, McGraw-Hill, ISBN 0-07-025956-9
|
5 |
Landis, S., Chaix, N., Gourgon, C., Perret, C. and Leveder, T., 'Stamp Design Effect on 100 nm Feature Size for 8 inch Nanoimprint Lithography', Nanotechnlogy, Vol. 17, pp. 2701-2709, 2006
DOI
ScienceOn
|