Mechanical Properties of TiAlSiN films Coated by Hybrid Process
![]() |
Song, Min-A
(System Solution Research Center, Research Institute of Industrial Science & Technology)
Yang, Ji-Hoon (System Solution Research Center, Research Institute of Industrial Science & Technology) Jung, Jae-Hun (System Solution Research Center, Research Institute of Industrial Science & Technology) Kim, Sung-Hwan (System Solution Research Center, Research Institute of Industrial Science & Technology) Jeong, Jae-In (System Solution Research Center, Research Institute of Industrial Science & Technology) |
1 | F. Lang, Z. Yu, Surf. Coat. Technol., 145 (2001) 80. DOI ScienceOn |
2 | S. Veprek, J. Vac. Sic. Technol. A, 17 (1999) 2401. DOI |
3 | J. Musil, Surf. Coat. Technol., 125 (2000) 322. DOI ScienceOn |
4 | J. H. Jung, J. H. Yang, H. S. Park, M. A Song, J. I. Jeong, J. Kor. Inst. Surf. Eng., 45 (2012) 104. |
5 | D. Yu, C. Wang, X. Cheng, F. Zhang, Appl. Surf. Sci., 255 (2008) 1865. DOI ScienceOn |
6 | I. W. Park, S. R. Choi, J. H. Suh, C. G. Park, K. H. Kim, Thin Solid Films, 447-448 (2004) 443. DOI ScienceOn |
7 | J. S. Kim, G. J. Kim, M. C. Kang, J. W. Kim, K. H. Kim, Surf. Coat. Technol., 193 (2005) 249. DOI ScienceOn |
8 | D. Philippon, V. Godinho, P.M. Nagy, M.P. Delplancke-Ogletree, A. Fernandez, Wear, 270 (2011) 541. DOI ScienceOn |
9 | S. Y. Yoon, S. R. Choi, M. H. Lee, K. H. Kim, J. Kor. Inst. Surf. Eng., 36 (2003) 122. |
10 | P. J. Martin, A. Bendavid, J.M. Cairney, M. Hoffman, Surf. Coat. Technol., 200 (2005) 2228. DOI ScienceOn |
11 | Y. Y. Chang, S. M. Yang, Thin Solid Films, 518 (2010) S34. DOI ScienceOn |
12 | C. C. Koch, D. G. Morris, K. Lu, A. Inoue, MRS Bul., 24 (1999) 146. |
13 | A. A. Voevodin, J. S. Zabinski, Thin Solid Films, 370 (2000) 223. DOI ScienceOn |
14 | K. H. Kim, S. R. Choi, S. Y. Yoon, Surf. Coat. Technol., 298 (2002) 243. |
15 | E. Lugscheider, C. Barimani, C. Wolff, S. Guerreiro, G. Doepper, Surf. Coat. Technol., 86-87 (1996) 177. DOI ScienceOn |
16 | Th. H. De Keijser, J. I. Langford, E. J. Melterneijer, A. B. P. Vogels, J. Appl. Cryst., 15 (1982) 308. DOI |
![]() |