• 제목/요약/키워드: Si particle size

검색결과 623건 처리시간 0.029초

$\alpha$-SiC의 입도가 반응소결 탄화규소 소결체에 미치는 영향 (Effect of $\alpha$-Silicon Carbide Particle Size in Reaction Bonded Silicon Carbide)

  • 한인섭;양준환;정헌생
    • 한국세라믹학회지
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    • 제26권4호
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    • pp.583-587
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    • 1989
  • Various $\alpha$-silicon carbied and colloidal graphite particles were sintered at 155$0^{\circ}C$ in vacuum atmosphere by reaction bonding sintering method, and the physical properties and microstructural analysis of specimen were investigated. With decreasing particle size, sintered density and 3-point bending strength of materials were increased and 3.2${\mu}{\textrm}{m}$ specimen showed high density and strength, 3.05g/㎤, 40kg/$\textrm{mm}^2$, respectively. The results of X-ray diffractometer and optical micrographs analysis showed that graphite and silicon melt reacted to convert to fine $\beta$-SiC particle and the body was changed to dense material.

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β-SiC 분말 Seeds가 Sol-gel 공정으로 합성된 고순도 β-SiC 분말 형상 및 크기에 미치는 영향 (Effects of β-SiC Particle Seeds on Morphology and Size of High Purity β-SiC Powder Synthesized using Sol-Gel Process)

  • 김규미;조경선;박상환
    • 한국세라믹학회지
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    • 제46권5호
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    • pp.528-533
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    • 2009
  • High purity $\beta$-SiC powders were synthesized using sol-gel processing. TEOS and phenol resin were used as the starting material for the silicon source and carbon source, respectively. The process turned out to be capable of producing high purity SiC powder purity degree with 99.98 %. However, it was difficult to control the shape and size of $\beta$-SiC powders synthesized by sol-gel process. In this study, $\beta$-SiC powder with size of $1{\sim}5$ um an 30 nm were used as the seeds for $\beta$-SiC to control the $\beta$-SiC powder morphology. It was found that $\beta$-SiC powder seeds was effective to increase the powder average size of synthesized $\beta$-SiC using sol-gel process by acting as the preferred growing sites for $\beta$-SiC.

Method and mechanism of dispersing agent free dispersion of short carbon fibers in silicon carbide powder

  • Raunija, Thakur Sudesh Kumar;Mathew, Mariamma;Sharma, Sharad Chandra
    • Carbon letters
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    • 제15권3호
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    • pp.180-186
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    • 2014
  • This study highlights a novel method and mechanism for the rapid and effective milling of carbon fibers (CFs) in silicon carbide (SiC) powder, and also the dispersion of CFs in SiC powder. The composite powders were prepared by chopping and exfoliation of CFs, and ball milling of CFs and SiC powder in isopropyl alcohol. A wide range of CFs loading, from 10 to 50 vol%, was studied. The milling of CFs and SiC powder was checked by measuring the average particle size of the composite powders. The dispersivity of CFs in SiC powder was checked through scanning electron microscope. The results show that the usage of exfoliated CF tows resulted in a rapid and effective milling of CFs and SiC powder. The results further show an excellent dispersion of CFs in SiC powder for all CFs loading without any dispersing agent.

SiC 나노입자를 이용하여 형성한 Ni-SiC 복합도금막의 미세구조 및 특성 (Microstructure and Properties of Ni-SiC Composite Coating Layers Formed using Nano-sized SiC Particles)

  • 이홍기;손성호;이호영;전준미
    • 한국표면공학회지
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    • 제40권2호
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    • pp.63-69
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    • 2007
  • Ni-SiC composite coating layers were formed using two kinds of SiC nano-particles by DC electrodeposition in a nickel sulfamate bath containing SiC particles. The effect of stirring rate and SiC particle type on the microstructure and properties of Ni-SiC composite coating layers were investigated. Results revealed that the trend of deposition rate is closely related to the codeposition of SiC and the deposition rate. or nickel, and the codeposition behavior of SiC can be explained by using hydrodynamic effect due to stirring. The average roughness and friction coefficient are closely related to the codeposition of SiC and SiC particle size. It was found that the Victors microhardness of the composite coating layers increased with increasing codeposition of SiC. The composite coating layers containing smaller SiC particle showed higher hardness. This can be explained by using the strengthening mechanism resulting from dispersion hardening. Anti-wear property of the composite coating layers formed using 130 nm-sized SiC nano-particles has been improved by 2,300% compared with pure electroplated-nickel layer.

나노입자 혼합 복합슬러리를 이용한 반응소결 SiC 재료의 제조 (Fabrication of Reaction Sintered SiC Materials by Complex Slurry with Nano Size Particles)

  • 이상필
    • 대한기계학회논문집A
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    • 제29권3호
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    • pp.425-431
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    • 2005
  • The efficiency of complex slurry preparation route for developing the high performance SiC matrix of $RS-SiC_{f}/SiC$ composites has been investigated. The green bodies for RS-SiC materials prior to the infiltration of molten silicon were prepared with various C/SiC complex slurries, which associated with both the sizes of starting SiC particles and the blending conditions of starting SiC and C particles. The characterization of Rs-SiC materials was examined by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the process optimization is also discussed. The flexural strength of Rs-SiC materials greatly depended on the content of residual Si. The decrease of starting SiC particle size in the C/SiC complex slurry was effective for improving the flexural strength of RS-SiC materials.

반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조 (Size, Shape, and Crystal Structure of Silica Particles Generated as By-products in the Semiconductor Workplace)

  • 최광민;여진희;정명구;김관식;조수헌
    • 한국산업보건학회지
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    • 제25권1호
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    • pp.36-44
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    • 2015
  • Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical $SiO_2$ and the particle size ranged 25 nm to $50{\mu}m$, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous $SiO_2$, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers' health.

급속응고된 Al81-(x+y)Si19NixCey 합금의 나노조직과 기계적 특성 (Nano Structure and Mechanical Properties of Rapidly Solidified Al81-(x+y)Si19NixCey Alloy)

  • 이태행;홍순직
    • 한국분말재료학회지
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    • 제10권6호
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    • pp.406-414
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    • 2003
  • In order to produce good wear resistance powder metallurgy Al-Si alloys with high strength, addition of glass forming elements of Ni and Ce in $Al_{81}$Si$_{19}$ alloy was examined using SEM, TEM, tensile strength and wear testing. The solubility of Si in aluminum increased with increasing Ni and Ce contents for rapidly solidified powders. These bulk alloys consist of a mixed structure in which fine Si particles with a particle size below 500 nm and very fine A1$_3$Ni, A1$_3$Ce compounds with a particle size below 200 nm are homogeneously dispersed in aluminum matrix with a grain size below 600 nm. The tensile strength at room temperature for $Al_{81}$Si$_{19}$, $Al_{78}$Si$_{19}$Ni$_2$Ce$_{0.5}$, and $Al_{76}$Si$_{19}$Ni$_4$Ce$_1$ bulk alloys extruded at 674 K and ratio of 10 : 1 is 281,521, and 668 ㎫ respectively. Especially, $Al_{73}$Si$_{19}$Ni$_{7}$Ce$_1$ bulk alloy had a high tensile strength of 730 ㎫. These bulk alloys are good wear-resistance bel ter than commercial I/M 390-T6. Specially, attactability for counterpart is very little, about 15 times less than that of the I/M 390-T6. The structural refinement by adding glass forming elements such as Ni and Ce to hyper eutectic $Al_{81}$Si$_{19}$ alloy is concluded to be effective as a structural modification method.d.tion method.

Squeeze Casting에 의한 Al-SiCp 복합재료의 제조 조건에 관한 연구 (A Study on Fabrication Conditions of Al-SiCp Composites by Squeeze Casting)

  • 김석원;우기도;한상원
    • 한국주조공학회지
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    • 제14권5호
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    • pp.471-479
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    • 1994
  • Al-2%Si-2%Mg alloy containing SiC particle in 20, $70{\mu}m$ were prepared by mean of squeeze casting with various pressure 50, 100, 150 and 220MPa respectively. The specimens were made by casting into $50{\Phi}{\times}100{\ell}$ mold under various squeeze conditions(pressures, pressurizing temperature, particle sizes). Mechanical properties(hardness, tensile strength, elongation and wear characteristics) were evaluated at room temperature with those various fabrication factors. It became feasible to make favorable Al-SiCp composite free from casting defects by the injection of Ar gas during melting and 100MPa pressure squeeze casting. However, pressure of 50MPa was not sufficient to avoid completely porosity formation as a result of precessing and shrinkage during solidification. As the particle size is smaller and the squeeze pressure is higher, the hardness and tensile strength at room temperature are higher. Cell size became smaller gradually with increase of squeeze pressure. With increase of squeeze pressure(MPa), wear behaviors of those composites were changed from adhesive into abrasive wear, and the tendency of above behavior became outstanding with increasing sliding speed. The chemical reaction(4Al+3SiC${\rightarrow}$$Al_4C_3+3Si$) is more accelerated at interface between SiCp and matrix with increase of squeeze pressure. Therefore $Al_4C_3$ intercompound and Si peak intensity is increased at interface.

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자동차 섀시 시스템에 유입되는 먼지입자에 의한 고무-씨일 부품의 마멸특성 -PART II: 먼지유입에 따른 고무-씨일의 마멸특성- (Wear Characteristics of Rubber-Seal for Inflow of Dust Particles in Automobile Chassis System -PART II: The Influence of Dust Particle Inflow on Wear Characteristics of Rubber-Seal-)

  • 이영제;정순오;원태영;김기훈;김대성
    • Tribology and Lubricants
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    • 제25권4호
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    • pp.261-264
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    • 2009
  • Environmental factors affect parts of the automobile. When dust particles are embedded, specially, friction and wear of the rubber-seal in automobile chassis system are increased. Increase in friction and wear leads to weakness of component and reduction of mechanical life. In this study, the wear characteristics of rubber-seal for inflow of dust particles are investigated. Silica($SiO_2$) and alumina($Al_2O_3$) particles are used as a dust particle because these particles are main elements of dust particles. The sliding wear tester are used for investigate the wear characteristics of rubber-seal. If the single dust particle($SiO_2$) is embedded in the rubber-seal component, the influence of dust particle size is more than that of inflow rate on the wear characteristics of rubber-seal. If the mixed dust particles are embedded in the rubber-seal component, the wear rate is increased as the rate of alumina that has a bigger hardness is increased. If the mixed dust particles that have different hardness are embedded in the rubber-seal component, the influence of particle size is more than that of particle hardness.

분무열분해법에 의한 MgO-Al2O3-SiO2계 화합물의 분체합성 및 그 특성 (A Study on the Preparation of MgO-Al2O3-SiO2 System Ceramic Powders by Spray Pyrolysis Method)

  • 박정현;박찬욱;조경식
    • 한국세라믹학회지
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    • 제25권4호
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    • pp.397-407
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    • 1988
  • Spinel, mullite and cordierite powders have synthesized from Mg(NO3)2.6H2O, Al(NO3).9H2O and SiCl4 solution by spray pyrolysis method. The two-fluid nozzle was used as an atomizer. The powders of sinel and mullite were synthesized above 80$0^{\circ}C$, but the cordierite composition was noncrystalline for all synthersizing temperature. Those noncrystalline powders were crystallized to $\alpha$-cordierite during calcining at 130$0^{\circ}C$ for 2hrs. The synthesized spinel, mullite and cordierite powders seem to be consisted of agglomerated hollow spherical particles. For all powders, the particle size ranged from submicron to about 3${\mu}{\textrm}{m}$ and mean particle size was about 1.4${\mu}{\textrm}{m}$ in diameter. The specific surface area values of spinel, mullite and cordierite powders were maximum for powders prepared at 100$0^{\circ}C$, and those were 45.9, 25.8 and 13.6$m^2$/gr, respectively.

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