• 한국재료학회지
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• 제20권9호
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• pp.451-456
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• 2010

A promising candidate material for a $H_2$ permeable membrane is SiC due to its many unique properties. A hydrogen-selective SiC membrane was successfully fabricated on the outer surface of an intermediate multilayer $\gamma-Al_2O_3$ with a graded structure. The $\gamma-Al_2O_3$ multilayer was formed on top of a macroporous $\alpha-Al_2O_3$ support by consecutively dipping into a set of successive solutions containing boehmite sols of different particle sizes and then calcining. The boehmite sols were prepared from an aluminum isopropoxide precursor and heated to $80^{\circ}C$ with high speed stirring for 24 hrs to hydrolyze the precursor. Then the solutions were refluxed at $92^{\circ}C$ for 20 hrs to form a boehmite precipitate. The particle size of the boehmite sols was controlled according to various experimental parameters, such as acid types and acid concentrations. The topmost SiC layer was formed on top of the intermediate $\gamma-Al_2O_3$ by pyrolysis of a SiC precursor, polycarbosilane, in an Ar atmosphere. The resulting amorphous SiC-on-$Al_2O_3$ composite membrane pyrolyzed at $900^{\circ}C$ possessed a high $H_2$ permeability of $3.61\times10^{-7}$ $mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ and the $H_2/CO_2$ selectivity was much higher than the theoretical value of 4.69 in all permeation temperature ranges. Gas permeabilities through a SiC membrane are affected by Knudsen diffusion and a surface diffusion mechanism, which are based on the molecular weight of gas species and movement of adsorbed gas molecules on the surface of the pores.

• 마이크로전자및패키징학회지
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• 제9권3호
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• pp.37-41
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• 2002

본 연구에서는 자기 공명 특성을 이용한 박막 센서의 멤브레인 및 박막 센서의 특성을 알아보았다. 멤브레인으로 유망한 물질로 $Si_xN_y$과 SiC가 있으며, 최적의 멤브레인 형성 조건을 알고자 박막의 잔류 응력 및 물성을 비교 분석하였다. 그 중에서 박막 센서에 적용 가능한 멤브레인으로 SiC보다 적절한 인장응력과 낮은 열팽창 계수를 가지는 $Si_xN_y$이 센서의 구조층으로 우수하였으며, $Si_xN_y$위에 박막 센서 물질을 증착 및 패턴닝(patterning)을 함으로써 센서의 자기 이력 곡선 및 자기 공진 주파수를 분석하였다. 센서에 인가되는 외부 자기장을 제거하면 자장에 의해 형성된 자화(magnetization)가 탄성 모드로 바뀌면서 에너지 방출에 의해 센서에서 전압이 발생하는데 이때 전압 발생 구간이 길어지면 기계적 진동이 야기되어 신호가 발생한다. 그리고 센서의 길이 및 폭이 증가할수록 자기공명 주파수가 감소하는 것을 볼 수 있다.

• Membrane and Water Treatment
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• 제10권5호
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• pp.353-360
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• 2019

ZSM-5 membrane was prepared on tubular macroporous ${\alpha}$-alumina support using a different synthesis route. The effects of organic template agent and Si/Al ratio of the synthesis gel on morphology, structure, and separation performance of the ZSM-5 membrane used for dehydration of isopropanol were investigated. High water perm-selectivity ZSM-5 membrane with a thickness of about $3.0{\mu}m$ and a low Si/Al ratio of 10.1 was successfully prepared from organotemplate-free synthesis gel with a molar composition of $SiO_2$ : $0.050Al_2O_3$ : $0.21Na_2O$ : NaF : $51.6H_2O$ at $175^{\circ}C$ for 24 h. The ZSM-5 membrane exhibited high pervaporation performance with a flux of $3.92kg/(m^2{\cdot}h)$ and corresponding separation factor of higher than 10,000 for dehydration of 90 wt.% isopropanol/water mixture at $75^{\circ}C$.

• 한국전기전자재료학회논문지
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• 제25권1호
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• pp.33-36
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• 2012

In this study, the thickness effects of $Al_2O_3$ layer on the sensing properties of $SiO_2/Al_2O_3$ (OA) stacked membrane were investigated using electrolyte-insulator-semiconductor (EIS) structure for high quality pH sensor. The $Al_2O_3$ layers with a respective thickness of 5 nm, 15 nm, 23 nm, 50 nm, and 100 nm were deposited on the 5-nm-thick $SiO_2$ layers. The electrical characteristics and sensing properties of each OA membranes were investigated using metal-insulator-semiconductor (MIS) and EIS devices, respectively. As a result, the OA stacked membrane with 23-nm-thick $Al_2O_3$ layer shows the excellent characteristics as a sensing membrane of EIS sensor, which can enhance the signal to noise ratio.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• 한국공간구조학회논문집
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• 제16권4호
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• pp.29-36
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• 2016

The objective of this research is to development of a parametric design system for membrane structures. The parametric design platform for the spatial structures has been designed and implemented. Rhino3D is used as a 3D graphic kernel and Grasshopper is introduced as a parametric modeling engine. Modeling components such as structural members, loading conditions, and support conditions are developed for structural modeling of the spatial structures. The interface module with commercial structural analysis programs is implemented. An iterative generation algorithm for design alternatives is a part of the design platform. This paper also proposes a design approach for the parametric design of Spoke Wheel membrane structures. A parametric modeling component is designed and implemented. SOFiSTik is examined to interact with the design platform as the structural analysis module. The application of the developed interface is to design optimally Spoke Wheel Shaped Ductile Membrane Structure using parametric design. It is possible to obtain objective shape by controlling the parameter using a parametric modeling designed for shape finding of spoke wheel shaped ductile membrane structure. Recently, looking at the present Construction Trends, It has increased the demand of the large spatial structure. But, It requires a lot of time for Modeling design and the Structural analysis. Finally an optimization process for membrane structures is proposed.

• 센서학회지
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• 제21권4호
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• pp.283-286
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• 2012

This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromic materials of Pd and Pd/$WO_3$ were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change to transparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/$WO_3$. However, phase transition from ${\alpha}$ to ${\beta}$ is shown at 6 %. Pd/$WO_3$ structure show the more linear response to hydrogen range of 2 % ~10 %. Also, almost 2 times fast response and recovery characteristics are shown at Pd/$WO_3$. These fast performances are come from the fact that Pd promoted the chemical reaction between hydrogen and $WO_3$.

• 센서학회지
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• 제24권6호
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• 한국세라믹학회지
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• 제36권10호
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• pp.1040-1047
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• 1999

After alumina sol was prepared by Yoldas process supported membranes were fabricated by adding ce and Re solution and SiO2 sol into alumina sol. The particle size of alumina sol was 11 nm and it was monodispersed transparent and stable for long time. The pore size of un-doped membrane started to increase to about 7,5nm at 1000$^{\circ}C$ and it was grown to twice (about 15nm) at 1100$^{\circ}C$ However the pore size of doped alumina was uniform to 1100$^{\circ}C$. The effect of retardation of grain growth was superior in SiO2 addition to that of Ce and Ru Because SiO2 doped samples transformed to needed-like phase and densified at 1200$^{\circ}C$ their application in membranes was limited. Ce and Ru doped sample showed vermicular structure identical to the un-doped ones at 1200$^{\circ}C$ But the particle size was smaller than that of un-doped ones.

• 한국수소및신에너지학회논문집
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• 제30권2호
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• pp.128-135
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• 2019

In this study, the mesoporous $SiO_2$ (5, 10, or 15 wt%) was incorporated into the polybenzimidazole matrix in order to improve the proton conduction as well as physiochemical properties of composite membrane. The chemical structure of mesoporous $SiO_2$ and crystallinity of as-prepared membranes were analyzed by Fourier-transform infrared (FT-IR) spectroscopy and X-ray diffraction (XRD) analysis, respectively. The thermal stability of the pristine $X_1Y_9$ and composite membranes were evaluated by thermogravimetric analyzer (TGA). On other side, the physical and chemical properties of the pristine $X_1Y_9$ and composite membranes were also determined by acid uptake and oxidative stability tests, respectively. With the incorporation of 15 wt% $SiO_2$, the composite membrane exhibits the higher proton conductivity that may be applicable for non-humidified high temperature fuel cell applications.