• Title/Summary/Keyword: Si/O-doped

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Structural and Electrical Properties of [(Co1-xCux)0.2(Ni0.3Mn0.7)0.8]3O4 Spinel Thin Films for Infrared Sensor Application (적외선 센서용 [(Co1-xCux)0.2(Ni0.3Mn0.7)0.8]3O4 스피넬 박막의 구조 및 전기적 특성)

  • Lee, Kui Woong;Jeon, Chang Jun;Jeong, Young Hun;Yun, Ji Sun;Cho, Jeong Ho;Paik, Jong Hoo;Yoon, Jong-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.12
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    • pp.825-830
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    • 2014
  • $[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ ($0{\leq}x{\leq}1$) thin films prepared by metal organic decomposition process were fabricated on SiN/Si substrate for infrared sensor application. Their structural and electrical properties were investigated with variation of Cu dopant. The $[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ (CCNMO) film annealed at $500^{\circ}C$ exhibited a dense microstructure and a homogeneous crystal structure with a cubic spinel phase. Their crystallinity was further enhanced with increasing doped Cu amount. The 120 nm-thick CCNMO (x=0.6) thin film had a low resistivity of $53{\Omega}{\cdot}cm$ at room temperature while the Co-free film (x=1) showed a significantly decreased resistivity of $5.9{\Omega}{\cdot}cm$. Furthermore, the negative temperature coefficient of resistance (NTCR) characteristics were lower than $-2%/^{\circ}C$ for all the specimens with $x{\geq}0.6$. These results imply that the CCNMO ($x{\geq}0.6$) thin films are a good candidate material for infrared sensor application.

Fabrication of Oxygen Sensitive Particles and Characteristic Analysis (산소감응성 입자 제조 및 특성 분석 연구)

  • Jeong, Won-Taek;Yi, Seung-Jae;Kim, Hyun-Dong;Kim, Kyung-Chun
    • Journal of the Korean Society of Visualization
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    • v.9 no.4
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    • pp.41-46
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    • 2011
  • Oxygen sensitive functional particles(OSParticle) were fabricated by three different methods for using the particles as oxygen sensors and PIV tracers. The used methods were a physical coating method, an ion-exchange method and a dispersion polymerization method. The physical coating method is dipping $SiO_2$ hollow particles into dye solution then drying. This method is very simple, but particles are not uniform in diameter and luminescence. The particles fabricated by the ion-exchange method have very uniform diameter and well doped. However, it can not be used in water since the particles are hydrophobic. In case of the dispersion polymerization method, the diameter of OSParticles is quite uniform. The diameter of OSParticles can be changed by controlling the quantity of AIBN (2,2'-azobis isobutyronitrile). For the purpose of dissolved oxygen concentration measurement in micro scale water flows, the dispersion polymerized OSParticles turn out to be the most superior functional particles. The luminescent intensity of OSParticles was tested with the variation of dissolved oxygen concentration in water samples. As a result, the luminescent intensity of OSParticles is monotonically decreased with increasing DO (Dissolved oxygen) concentration of water.

Preparation and Characterization of Proton Conductive Phosphosilicate Membranes Based on Inorganic-Organic Hybrid Materials

  • Huang, Sheng-Jian;Lee, Hoi-Kwan;Kang, Won-Ho
    • Bulletin of the Korean Chemical Society
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    • v.26 no.2
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    • pp.241-247
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    • 2005
  • A series of proton conductive inorganic-organic hybrid membranes doped with phosphoric acid ($H_3PO_4$) and/or triethylphosphate (PO(OEt)$_3$) have been prepared by sol-gel process with 3-glycidoxypropyltrimethoxysilane (GPTMS), 3-aminopropyltriethoxysilane (APTES) and tetraethoxysilane (TEOS) as precursors. High proton conductivity of 3.0 ${\times}$ $10^{-3}$ S/cm with composition of 50TEOS-30GPTMS-20APTES-50$H_3PO_4$ was obtained at 120 ${^{\circ}C}$ under 50% relative humidity. Thermal stability of membrane was significantly enhanced by the presence of SiO$_2$ framework up to 250 ${^{\circ}C}$. XRD revealed that the gels are amorphous. IR spectra showed a good complexation of $H_3PO_4$ in the matrix. The conductivity under 75% relative humidity was significantly improved by addition of APTES due to the increase in concentration of defected site in hybrid matrix. The effect of PO(OEt)$_3$, humidifying time, and heat-treatment were also investigated. PO(OEt)$_3$ had no improvement on conductivity and conductivity increased with humidifying time, however, decreased with heating temperature.

Synthesis of Terephthalate Intercalated Zn-Al Layered Double Hydroxides Using AZO Thin Film (AZO박막을 이용한 Terephthalate가 삽입된 Zn-Al 층상 이중 수산화물의 합성)

  • Park, Ki-Tae;Yoon, Soon-Gil
    • Korean Journal of Materials Research
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    • v.27 no.3
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    • pp.161-165
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    • 2017
  • In this paper, synthesis of terephthalate intercalated Zn-Al: Layered double hydroxides (LDHs) was studied. We designed freestanding Zn-Al: carbonate LDH nanosheets for a facile exchange technique. The as-prepared Zn-Al carbonate LDHs were converted to terephthalate intercalated Zn-Al:LDHs by ion exchange method. Initially, Al-doped ZnO (AZO) thin films were deposited on p-Si (001) by facing target sputtering. For synthesis of free standing carbonate Zn-Al:LDH, we dipped the AZO thin film in naturally carbonated water for 3 hours. Further, Zn-Al: carbonate LDH nanosheets were immersed in terepthalic acid (TA) solution. The ion exchange phenomena in the terephthalate assisted Zn-Al:LDH were confirmed using FT-IR analysis. The crystal structure of terephthalate intercalated Zn-Al:LDH was investigated by XRD pattern analysis with different mole concentrations of TA solution and reaction times. The optimal conditions for intercalation of terephthalate from carbonated Zn-Al LDH were established using 0.3 M aqueous solution of TA for 24 hours.

펜타센의 박막두께 변화와 전극의 종류에 따른 펜타센 유기박막 트랜지스터의 특성 변화

  • Kim, Tae-Uk;Min, Seon-Min;No, Yong-Han
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.112-112
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    • 2011
  • 유기박막 트랜지스터(Organic Thin Film Transistor: OTFT)는 낮은 공정비용과 기존의 고체 실리콘 트랜지스터로서 실혐 할 수 없는 플렉시블 디스플레이, 스마트카드, 태양전지 등의 매우 넓은 활용범위로 각광받고 있는 연구 분야 중 하나이다. 본 연구에서는 열 증발 증착장비(Thermal Evaporator)를 이용하여 펜타센을 활성층으로 사용한 유기박막 트랜지스터를 제작하였다. Heavily doped된 N형 실리콘 기판을 메탄올, 에탄올, 불산 처리를 하여 세척을 한 후 PECVD를 이용하여 SiO2를 200 nm 증착하였다. 그 후 열 증발 증착 장비를 사용하여 펜타센을 활성층으로 사용하였고, 분말 형태의 펜타센의 질량을 15~60 mg으로 조절하여 활성층의 두께를 조절하였다. 펜타센 증착 후 100도에서 열처리를 하고, 그 후 Shadow Mask를 이용하여 전극을 150nm 증착하였다. 이때 전극은 Au, Al, Ni 세가지 종류를 사용하였다. 펜타센의 질량을 조절하여 증착한 활성층의 두께는 60 mg일 때 약 60 nm, 45 mg일 때 약 45 nm로 1:1의 비율로 올라가는 것을 확인 할 수 있었고, 펜타센의 두께가 30 nm일 때 특성이 가장 잘 나오는 것을 볼 수 있었다. 펜타센의 두께가 두꺼울수록 게이트에서 인가되는 전압의 필드가 제대로 걸리지 않아 특성이 나쁘게 나온 것으로 보인다. 또한 활성층을 30 nm로 고정하고 전극의 종류를 바꿔가며 전기적 특성(캐리어 이동도, 문턱전압, 전달특성 등)을 측정 했을 때 전극으로 Al보다는 Au와 Ni를 사용했을 때 전기적 특성이 더 우수하게 나오는 것을 볼 수 있었다. 메탈과 펜타센과의 일함수 차이에 따른 결과로 보여진다.

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Crystallization Behavior and Electrical Properties of IZTO Thin Films Fabricated by Ion-Beam Sputtering (이온빔 스퍼터링으로 증착한 IZTO 박막의 결정화 거동과 전기적 특성 분석)

  • Park, Ji Woon;Bak, Yang Gyu;Lee, Hee Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.2
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    • pp.99-104
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    • 2021
  • Ion-beam sputtering (IBS) was used to deposit semiconducting IZTO (indium zinc tin oxide) thin films onto heavily-doped Si substrates using a sintered ceramic target with the nominal composition In0.4Zn0.5Sn0.1O1.5, which could work as a channel layer for oxide TFT (oxide thin film transistor) devices. The crystallization behavior and electrical properties were examined for the films in terms of deposition parameters, i.e. target tilt angle and substrate temperature during deposition. The thickness uniformity of the films were examined using a stylus profilometer. The observed difference in electrical properties was not related to the degree of crystallization but to the deposition temperature which affected charge carrier concentration (n), electrical resistivity (ρ), sheet resistance (Rs), and Hall mobility (μH) values of the films.

Correlationship of the electrical, optical and structural properties of P-doped ZnO films grown by magnetron sputtering (마그네트론 스퍼터링에 의해 phosphorous 도핑된 ZnO 박막의 전기적, 광학적, 구조적 특성의 연관성)

  • Ahn, Cheol-Hyoun;Kim, Young-Yi;Kang, Si-Woo;Kong, Bo-Hyun;Han, Won-Suk;Cho, Hyung-Koun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.177-177
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    • 2007
  • ZnO는 3.36eV의 넓은 밴드캡을 가지는 II-IV족 반도체로써 태양전지, LED와 같은 광학적 소자로 이용이 기대가 되는 물질이다. 더욱이, 상온에서의 60meV에 해당하는 큰 엑시톤 에너지와 밴드캡 에지니어링이 가능하다는 장점 때문에 광학적 소자로 널리 이용되고 있는 GaN을 대체할 수 있는 물질로 주목을 받고 있다. 하지만, p-type ZnO는 형성이 어렵고 낮은 이동도와 케리어 농도의 특성을 보이고, 대기 중에 장시간 노출할 경우 n-type ZnO의 특성으로 돌아가는 불안정성을 보이고 있다. 최근에 몇몇의 연구자들에 의해 V족의 원소인 P(phosphorous), N(nitrogen), As(arsenic))를 도핑하여 p-type ZnO의 형성에 대한 논문이 발표되고 있다. 또한, V족 원소 중에 P는 p-type ZnO 형성에 효과적인 도핑 물질로 보고되 고 있다. 본 연구는 마그네트론 스퍼터링을 이용하여 다양한 온도에서 성장된 P도핑 ZnO 박막의 특성에 대해 연구하였다. P도핑된 ZnO 박막은 사파이어 기판에 buffer층을 사용한 Insulator 특성의 ZnO박막위에 400, 500, 600, $700^{\circ}C$에서 성장되 었다. 박막의 특성 분석에는 325nm의 파장을 가지는 He-Cd의 레이져 광원을 사용하여 10K의 저온 PL과 0.5T의 자기장을 사용한 van der Pauw configuration에 의한 Hall effect측정, 그리고 결정성 분석에는 XRD와 TEM을 이용하였다. 상온 Hall-effect 측정 결과, $400{\sim}600^{\circ}C$ 에서 성장된 박막은 n-type의 특성을 보였고, $700^{\circ}C$에서 성장된 Phosphorous 도핑 ZnO박막은 $1.19{\times}10^{17}$의 캐리어 농도를 가지는 p-type의 특성을 보였다. 그리고 XRD분석과 TEM분석을 통하여 박막의 성장온도가 증가 할수록 P도핑된 ZnO박막의 결정성이 향상되는 것을 알 수 있었다. 또한 10K의 저온 PL분석을 통해 p도핑에 의한 액셉터에 관련된 피크들을 관찰할 수 있었다.

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Progress in $MgB_2$ Superconductor Wires and Tapes

  • Kim, Jung-Ho;Kumakura, Hiroaki;Rindflesich, Matthew;Dou, Shi Xue;Hwang, Soo-Min;Joo, Jin-Ho
    • Progress in Superconductivity
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    • v.12 no.2
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    • pp.75-81
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    • 2011
  • We report on the progress that has been made in developing $MgB_2$ superconducting wires and tapes for commercialization and research efforts. A number of techniques have been developed to overcome the obstacle posed by the poor critical current density ($J_c$) of pristine $MgB_2$. Chemical doping has proved to be the effective way to modify and enhance the superconducting properties, such as the $J_c$ and the irreversibility field ($B_{irr}$). More than 100 different types of dopants have been investigated over the past 8 years. Among these, the most effective dopants have been identified to be SiC and malic acid ($C_4H_6O_5$). The best results, viz. a $B_{irr}$ of 22 T and $J_c$ of $30,000\;A{\cdot}cm^{-2}$ at 4.2 K and 10 T, were reported for malic acid doped $MgB_2$ wires, which matched the benchmark performance of commercial low temperature superconductor wires. In this work, we discuss the progress made in $MgB_2$ conductors over the past few years at the University of Wollongong, Hyper Tech Research, Inc., and Ohio State University.

Silicon Electro-optic Orbital Angular Momentum Sign Modulator for Photonic Integrated Circuit (광 집적회로용 실리콘 기반 궤도 각운동량 부호 변환기)

  • Lee, In-Joon;Kim, Sang-In
    • The Journal of the Korea institute of electronic communication sciences
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    • v.15 no.4
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    • pp.659-664
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    • 2020
  • In this paper, we propose a silicon-based electro-optic (EO) modulator which can modulate a sign of a topological charge number l of |l|=1 orbital angular momentum (OAM) mode. The proposed EO modulator consists of position-dependent doped Si waveguide core and undoped SiO2, cladding, which enables control of the effective index and propagation loss of two OAM constitutive eigenmodes. The modulator functions as OAM mode maintaining waveguide at -0.33V and as topological charge sign inverter at 10V. The output OAM mode purity is calculated through electric field distribution, showing high purity of |l|>0.92 in both cases.

A study on the thermochromism of $V_{1-x}M_xO_2$thin film ($V_{1-x}M_xO_2$박막의 thermochromism에 대한 연구)

  • Lee, Si-U;Lee, Mun-Hui
    • Korean Journal of Materials Research
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    • v.4 no.6
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    • pp.715-722
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    • 1994
  • Thermochromic $Vo_{2}$ thin films for "smart windows" were prepared by electron beam evaporationmethod on a glass substrate and spectral transmittances were examined by spectrophotometer. Substratetemperature of $300^{\circ}C$ and annealing temperature of $400^{\circ}C$ were found to be effective to give athermochromism on $Vo_{2}$ thin film due to the crystallization of the thin film. Furthermore, annealing of$Vo_{2}$ thin film affected the spectral transmittance and reduced the transmittance significantly at wavelengthbelow 500nm.$V_{0.95}W_{0.05}O_{2}$ thin film doped by 5 atomic percent of W showed semiconductor-metal transition around 0$0^{\circ}V_{0.995}W_{0.005}O_{2}$thin film which contains 0.5 atomic percent Sn showed therrnochrornisrn when it was depositedat substrate temperature of $300^{\circ}C$ and annealed at $450^{\circ}C$ for 5 hours in argon gas. The transitiontemperature of the $V_{0.995}W_{0.005}O_{2}$ thin film was found to be about $25^{\circ}C$ and showed some hysterisis. and showed some hysterisis.

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