• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.114-114
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• 2012

Metal-oxide-semiconductor field-effect transistors (MOSFETs)의 critical dimension (CD)가 sub 45 nm로 줄어듬에 따라 기존에 gate dielectric으로 사용하고 있는 SiO2에서 발생되는 high gate leakage current 때문에 새로운 high dielectric constant (k) 물질들이 연구되기 시작하였다. 여러 가지 high-k 물질 중에서, aluminum-oxide (Al2O3)는 높은 dielectric constant (~10)와 전자 터널링 barrier height (~2eV) 등을 가지기 때문에 많은 연구가 되고 있다. 그러나 Al2O3를 anisotropic한 patterning을 하기 위해 주로 사용되고 있는 halogen-based 플라즈마 식각 과정에서 나타나는 Al2O3와 하부 layer간의 낮은 식각 selectivity 뿐만 아니라 표면에 발생되는 defect, stoichiometry modification, roughness 변화 등의 많은 문제점들로 인하여 device performance가 감소하기 때문에 이를 해결하기 위한 많은 연구들이 진행중이다. 따라서 본 연구에서는 실리콘 기판위의 atomic layer deposition (ALD)로 증착된 Al2O3를 BCl3/Ar 중성빔을 이용하여 원자층 식각한 후 식각 특성을 분석해 보았다. Al2O3 표면을 BCl3로 absorption시킨 후 Ar 중성빔으로 desorption 시키는 과정에서 volatile한 aluminum-chlorides와 boron oxychloride가 형성되어 layer by layer로 제거됨을 관찰 할 수 있었다.

• Korean Journal of Ichthyology
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• v.21 no.1
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• pp.61-64
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• 2009

Four specimens (114.2~134.2 mm SL) of Icelus stenosomus Andriashev, family Cottidae, were collected from Goseong-gun, Gangwon-do, East Sea of Korea. They were identified based on the following characters : a pair of strong spines on occipital region, distinct row of scales on both dorsal and ventral sides of body, vermiculate white lines on dorsal side of body, and small prickled scales scattered sparsely on the head. We propose a new Korean name for the species as a new Korean name : 'Mu-nui-jul-ga-si-hoet-dae'.

• Journal of the Korean Vacuum Society
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• v.13 no.3
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• pp.114-119
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• 2004

Silicon Nitride thin films were deposited on p-type Si (100) substrates by atomic layer deposition (ALD) method at $550^{\circ}C$ using alternating exposures of $SiH_2Cl_2$ and $NH_3$, and the physical and electrical propeties of the deposited films were characterized. The thickness of the films was linearly increased with the number of deposition cycles, and the growth rate of the films was 0.13 nm/cycle with the reactant exposures of $3.0\times10^{9}$ L. The silicon nitride thin films deposited by Alf exhibited similar physical properties with the silicon nitride thin films deposited by low-pressure chemical vapor deposition (LPCVD) method in terms of refractive index and wet etch rate, lowering deposition temperature by more than 200 $^{\circ}C$. The ALD films showed the leakage current density of 0.79 nA/$\textrm{cm}^2$ at 3 MV/cm, which is lower than 6.95 nA/$\textrm{cm}^2$ of the LPCVD films under the same condition.

• Korean Journal of Agricultural Science
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• v.48 no.1
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• pp.103-117
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• 2021

The severe effects of climate change, such as global warming and the El Niño phenomenon, have become more prevalent. In recent years, natural disasters such as drought, heavy rain, and typhoons have taken place, resulting in noticeable damage. Korea is affected by droughts that cause damage to rice fields and crops. Societal interest in droughts is growing, and measures are urgently needed to address their impacts. As the demand for high-quality agricultural products expands, farmers have become more interested in water management, and the demand for field irrigation is increasing. Therefore, we investigated water demand in the irrigation of drought-vulnerable crops. Specifically, we determined the water requirements for crops including cabbage, red pepper, apple, and bean in four regions by calculating the consumptive water use (evapotranspiration), effective rainfall, and irrigation capacity. The total consumptive water use (crop evapotranspiration) estimates for Dangjin-si (cabbage), Yesan-gun (apple), Cheongyang-gun (pepper) in Chungnam, and Goesan-gun (bean) in Chungbuk were 33.5, 206.4, 86.1, and 204.5 mm, respectively. The volumes of groundwater available in the four regions were determined to be the following: Dangjin-si, 4,968,000 m³; Yesan-gun, 4,300,000 m³; Cheongyang-gun, 1,114,000 m³, and Goesan-gun, 3,794,000 m³. The annual amounts available for the representative crops, compared to the amount of evapotranspiration, were 313.9% in Dangjin-si, 29.5% in Yesan-gun, 56.1% in Cheongyang-gun, and 20.1% in Goesan-gun.

• Journal of the Korean Institute of Landscape Architecture
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• v.43 no.2
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• pp.114-124
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• 2015

In the city, the urban park contributes to the quality of citizen life in many ways, and the importance of the urban park as an urban planning facility is growing each day. In this study, evaluation of park service supply adequacy in Suwon-si, the difference in analysis methods, and the type of land use at urban park catchment area analysis were analyzed. As a result, there were remarkable differences between the two analysis methods. In Suwon-si, the catchment area by network analysis was only about 41% of catchment area by buffer analysis. However, when basic local authorities establish planning of parks and green areas, they use buffer analysis to calculate the park service area. It means that such calculations of urban park service areas may be wider than actually used. Also, because there were differences between urban park catchment areas by land use types, guidelines of planning parks and green areas will be adjusted. Although quantitative expansion of the park area is also important for the realization of green welfare, it is necessary to consider city characteristics such as the population size, population density, land use types, and so on.

• 보존과학연구
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• s.22
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• pp.93-114
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• 2001

The composition analysis of Danchung pigments at Geunjeongjeon Hall in Gyeongbokgung Palace were carried out by FXRF and MXRD. The analytical result of the inside pigments at Geunjeongjeon showed that these painted in use the mineral pigments. Gold pigment was pure gold(Au).The main composition identified in green pigments were chalcanthite($CuSO_4$.$5H_2O$) and celadonite($K(Mg, Fe, Al)_2$.$(Si, Al)_4O_10(OH)_2$ ). Red pigments werecinnnabar(HgS).The analytical result of the outside pigments at Geunjeongjeon revealed that these applied to the artificial synthetic pigment. Yellow pigment was chromeyellow($PbCrO_4$). The main composition identified in red pigments were red lead($Pb_3O_4$)and hematite($Fe_2O_3$). Green pigments were emeral green($C_2H_3A_s3Cu_2O_8$) and chromegreen($Cr_2O_3$). Blue pigment was lazurite($Na_6Ca2Al_6Si_6O_24(SO_4)_2$), titanium dioxide($TiO_2$) of white pigment.

• Journal of Welding and Joining
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• v.13 no.1
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• pp.103-114
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• 1995

Plasma Transferred arc(PTA) hard facing process has been developed to obtain an overlay weld metal having excellent wear resistance. The effect of Ti, TiSi$_{2}$ and TiC powders addition on the surface of Aluminum alloy 5083 has been investigated with PTA process. This paper describes the result of test the performance of the overlay weld metal. The result can be summarized as follows 1. Intermetallic compound is formed on surface of base metal in Ti or TiSi$_{2}$ powder but the reaction with surface of base metal is little seen in TiC powder. 2. In formation of composite layer on aluminum alloy surface by plasma transferred arc welding process, high melting ceramics like TiC powder is excellent. 3. The multipass welding process is available for formation of high density of powder. But the more number of pass, the less effect of powder, it is considered, and limits of number of pass. 4. By increasing area fraction of TiC powder on Al alloy surface, in especially TiC powder the hardness increase more than 40% area fraction and 88% shows about Hv 700.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.11 no.3
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• pp.111-114
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• 2001

(Ba,Sr) $RuO_3$ thin films were fabricated on Si(100) wafer by metal organic chemical vapor deposition using ultrasonic spraying. When the substrate temperature was varied, the BSR thin films showed good crystallinity above 50$0^{\circ}C$ and showed (110) preferred orientation by X-ray diffraction measurements. The surface morphology, determined by atomic force microscopy, indicated that the grain size of BSR thin films depended strongly on the Ba/Sr ratio. With the increase in the amount of Sr relative to Ba, the resistivity of BSR films decreased fro m415 to 261 $\mu$$\Omega$${\cdot}$cm.

• Journal of Korea Foundry Society
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• v.24 no.2
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• pp.108-114
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• 2004

$Al_2O_3$, SiC reinforced Al matrix composites were fabricated by centrifugal spray casting method and their wear resistance characteristics have been studied. Particles are generally uniformly distributed in the microstructure of as-cast specimens. In order to investigate the effect of secondary deformation, hot rolling was performed for each specimen of pure Al matrix composites with a reduction of 10, 20, 30, 40 and 50% at $400{\sim}500^{\circ}C$, respectively. Microstructure of specimen showed that particle distribution density and hardness increased because of increasing of reduction ratio. Wear test with a various sliding velocity of 1.98, 2.38, 2.88 and 3.53m/sec showed that the wear resistance characterization of composite improved remarkably compared to the normal alloy and performs without reinforced particles. Microstructural observation for the worn surface of pure Al specimens without particles showed that a change in wear mechanism seemed to separate layer by surface fatigue. In other case of Al composite reinforced with $Al_2O_3$ and SiC, the grinder type of wear mechanism was shown.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.114-115
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• 2006

반도체 기술이 초고집적화 되어감에 따라 공정에서 선폭이 줄어들고, 박막을 다층으로 제조하는 것이 중요하게 되었다. 이와 같은 제조 공정 하에서는 Si 기판과 금속 박막간의 확산이 커다란 문제로 부각되어 왔다. 특히 Cu는 높은 확산성에 의하여 Si 기판과 접합에서 많은 확산에 의한 문제가 발생하게 되며. 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이를 방지하기 위하여 우리는 3개의 화합물로 구성된 Tungsten-Carbon-Nitrogen (W-C-N) 확산방지막을 사용하였다. 실험은 물리적 기상 증착법 (PVD)으로 질소비율을 변화하며 확산방지막을 증착하였고, 이를 여러 온도에서 열처리하여 X-ray Diffraction 분석을 하였다.