• 한국재료학회지
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• 제18권3호
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• pp.148-152
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• 2008

A new cost-effective atomic layer deposition (ALD) technique, known as Proximity-Scan ALD (PS-ALD) was developed and its benefits were demonstrated by depositing $Al_2O_3$ and $HfO_2$ thin films using TMA and TEMAHf, respectively, as precursors. The system is consisted of two separate injectors for precursors and reactants that are placed near a heated substrate at a proximity of less than 1 cm. The bell-shaped injector chamber separated but close to the substrate forms a local chamber, maintaining higher pressure compared to the rest of chamber. Therefore, a system configuration with a rotating substrate gives the typical sequential deposition process of ALD under a continuous source flow without the need for gas switching. As the pressure required for the deposition is achieved in a small local volume, the need for an expensive metal organic (MO) source is reduced by a factor of approximately 100 concerning the volume ratio of local to total chambers. Under an optimized deposition condition, the deposition rates of $Al_2O_3$ and $HfO_2$ were $1.3\;{\AA}/cycle$ and $0.75\;{\AA}/cycle$, respectively, with dielectric constants of 9.4 and 23. A relatively short cycle time ($5{\sim}10\;sec$) due to the lack of the time-consuming "purging and pumping" process and the capability of multi-wafer processing of the proposed technology offer a very high through-put in addition to a lower cost.

• 한국산학기술학회논문지
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• 제20권6호
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• pp.288-296
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• 2019

그간 복사 냉방은 천정이나 바닥면을 냉각 표면으로 활용하기 때문에 표면 온도를 노점 온도 이상으로 높이거나 보조적인 제습 에어컨을 설치해야 하는 문제가 있었다. 본 연구에서는 주택 적용을 목표로 복사 판넬 표면에 결로를 유발시킴으로써 냉각 열량을 증가시키고 실내 쾌적감도 개선할 수 있는 1.0 kW 용량의 복사-대류 방식의 하이브리드 냉방기에 대하여 검토하였다. 이 냉방기는 2개의 냉동 사이클 - 강제 대류 제습 사이클과 복사 판넬 냉방 사이클로 구성된다. 시제품 실험 결과 복사 판넬 사이클의 경우 실외 $35^{\circ}C/24^{\circ}C$, 실내 $27^{\circ}C/19.5^{\circ}C$의 표준 조건에서 냉매 순환량은 8.8 kg/h, 응축 온도 $51^{\circ}C$, 증발 온도 $8.8^{\circ}C$, 냉방 능력은 376 W, 성적계수는 1.75로 나타났다. 또한 복사 판넬의 온도는 $13^{\circ}C{\sim}14^{\circ}C$ 사이에서 고르게 분포되었다. 또한, 상대 습도가 감소할수록 냉방 능력은 감소하나 소비 동력은 거의 변화가 없었다. 제습 사이클의 경우, 표준 조건에서 냉매 순환량은 21.1 kg/h, 응축온도 $61^{\circ}C$, 증발 온도 $5.0^{\circ}C$, 냉방능력은 949 W, COP는 2.11로 나타났다. 한편, 복사 판넬과 제습 냉방 사이클을 동시에 가동시키며 표준 조건에서 시험 결과, 복사 판넬의 냉방 능력은 333 W, 제습부의 냉방 능력은 894 W, COP는 1.89로 나타났다. 홴 풍량이 감소하면 복사 판넬, 제습부 모두 냉방 능력이 감소함을 보였는데 특히 제습부에서 감소량이 두드러졌다. 본 실험 데이터를 기반으로 냉방 부하의 변동에 대비하여 가능한 제어 로직을 제시하였다.

• 소성∙가공
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• 제23권2호
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• pp.88-94
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• 2014

The under-drive brake piston is an essential part in the automatic transmissions of automobiles. This component is manufactured by forging after blanking from S55C plate with a thickness of 6mm. It is difficult to design the plate forging process using a thick plate approach since there will be limited material flow as well as large press loads. Furthermore, the under-drive brake piston has a complex shape with a right angle step, which often results in die unfill and abrupt increase in press load. To overcome these obstacles, a separate die for filling material sufficiently to the corner of the right angle step is proposed. However, this approach induces an uncontrolled workpiece surface between the dies, resulting in flash. This excess flash degrades the tool life in the final machining after cold forging as well as increases the cycle time to obtain the net-shape of the part. In the current study, we propose an optimum process design using a conventional die shaped with the benefit of finite element analysis. This approach enhanced the process efficiency without sacrificing the dimensional accuracy in the forged part. As the result, the optimum plate forging process was done with a two stage die, which reduces weight of by 6% compared with previous process for the under-drive brake piston.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 대한교통학회지
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• 제33권5호
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• pp.478-487
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• 2015

본 연구에서는 검지기에서 수집가능한 교통정보를 이용한 대기행렬이론 기반 가변속도제어 운영모형과 그 효과를 제시하였다. 모형분석결과 가변속도제어를 실시할 때 총 지체가 3개 영역으로 나뉘어 발생하며, 총 통행시간의 증감없이 총 지체가 감소하였다. 이와 같은 가변속도제어 모형의 효과는 이론적 분석 후 VISSIM 미시 시뮬레이터를 통하여 검증하였으며, SSAM을 이용한 고위험 상충건수 분석이 이루어졌다. 분석결과 총 지체가 감소한 것으로 나타났으나, 총 통행시간이 동일하고 운전자의 희망통행속도는 가변속도제어 유무와 관계없이 동일하므로 실제 총 지체가 줄어든 것으로 볼 수 없다. 하지만 위 가변속도제어 모형은 자유속도 유지시간을 증가시키고, 속도편차발생 주기를 늘렸다. 이는 반복적인 지정체의 규모와 횟수 저감을 통해, 상하류부 교통류간 속도 차이를 줄여줌으로써 고위험 상충건수를 약 36.0% 저감하는 것으로 나타난다. 즉, 본 연구에서 제시한 가변속도제어값을 이용하여 가변속도제어를 실시할 경우 총 지체를 최소화함으로써 고위험 상충건수를 저감하는 안전성 향상효과를 기대할 수 있다.

• 설비공학논문집
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• 제12권12호
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• pp.1098-1125
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• 2000

A review on the papers published in the Korean Journal of Air-Conditioning and Refrigerating Engineering in 1998 and 1999 has been done. Focus has been put on current status of research in the aspect of heating, cooling, ventilation, sanitation and building environment. The conclusions are as follows. 1) A review of the recent studies on fluid flow, turbomachinery and pipe-network shows that many experimental investigations are conducted in applications of impingement jets. Researches on turbulent flows, pipe flows, pipe-networks are focused on analyses of practical systems and prediction of system performance. The results of noise reduction in the turbomachinery are also reported. 2) A review of the recent studies on heat transfer analysis and heat exchanger shows that there were many papers on the channel flow with the application to the design of heat exchanger in the heat transfer analysis. Various experimental and numerical papers on heat exchanger were also published, however, there were few papers available for the analysis of whole system including heat exchanger. 3) A review of the recent studies on heat pump system have focused on the multi-type system and the heat pump cycle to utilize treated sewage as the heat source. The defrosting and the frosting behaviors in the fin-tube heat exchanger is experimentally examined by several authors. Several papers on the ice storage cooling system are presented to show the dynamic simulation program and optimal operation conditions. The study on the micro heat pipes for the cooling of high power electronic components is carried out to examine the characteristics of heat and mass transfer processed. In addition to these, new type of separate thermosyphon is studied experimentally. 4) The recent studies on refrigeration/air conditioning system have focused on the system performance and efficiency for new alternative refrigerants. New systems operating with natural refrigerants are drawing lots of attention. In addition to these, evaporation and condensation heat transfer characteristics of traditional and new refrigerants are investigated for plain tubes and also for microfin tubes. Capillary tubes and orifice are main topics of research as expansion devices and studies on thermophysical properties of new refrigerants and refrigerant/oil mixtures are widely carried out. 5) A review of the recent studies on absorption cooling system shows that numerous experimental and analytical studies on the improvement of absorber performance have been presented. Dynamic analysis of compressor have been performed to understand its vibration characteristics. However research works on tow-phase flow and heat transfer, which could be encountered in the refrigeration system and various phase-change heat exchanger, were seemed to be insufficient. 6) A review of recent studies on duct system shows that the methods for circuit analysis, and flow balancing have been presented. Researches on ventilation are focused on the measurement of ventilation efficiency, and variation of ventilation efficiency with ventilation methods by numerous experimental and numerical studies. Furthermore, many studies have been conducted in real building in order to estimate indoor thermal environments. Many research works to get some information for cooling tower design have been performed but are insufficient. 7) A review on the recent studies on architectural thermal environment and building mechanical systems design shows that thermal comfort analysis is sitting environment, thermal performance analysis of Korean traditional building structures., and evaluation of building environmental load have been performed. However research works to improve the performance of mechanical system design and construction technology were seemed to be insufficient.