• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1018-1021
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the horizontal forces simultaneously as the probe tip of the equipment approaches to the interface between thin film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ∼ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester. the feasibility test was performed to evaluate the adhesive strength of semiconductor wafer.

• 센서학회지
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• 제26권6호
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• pp.386-390
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• 2017

A $5^{th}$-order low-pass filter (LPF) chip implemented in a six-layer low-temperature co-fired ceramic (LTCC) dielectric substrate has been presented. Lumped elements constituting the LPF are designed three-dimensionally in multilayers. In order to improve the parasitic and mutual coupling effects between them, the LPF is designed by sequentially integrating the three-dimensional (3D) lumped elements, by comparing it to the results of the schematic circuit and 3D electromagnetic (EM) analysis. The designed 3D LPF chip was fabricated in a six-layer LTCC substrate as small as $4.0{\times}3.22{\times}0.68mm^3$. The measured return and insertion losses are less than -11 dB and -0.61 dB, respectively, below 1.5 GHz.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1448-1452
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin-film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the tangential forces simultaneously as the probe tip of the equipment approaches to the interface between thin-film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ${\sim}$ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester, the feasibility test was performed to evaluate the adhesive strength of thin-film.

• Macromolecular Research
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• 제13권3호
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• pp.265-272
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• 2005

Polyelectrolyte membranes for humidity-sensing were fabricated using a layer-by-layer adsorption process based on the spontaneous self-assembly of alternating layers of cationic and anionic polymers on a silanized ITO patterned glass substrate. The substrate is dipped successively into dilute solutions of a polyanion and a polycation. The homopolymers and copoymers of diallyldimethylammonium chloride (DDA), allylamine hydrochloride (AA), 2-[(methacryloyloxy)ethyl]trimethyl ammonium chloride (METAC) and vinylbenzyl tributyl phosphonium chloride(VTBPC) were used as the polycations. In this experiment, it was found that the resistance varied according to the chemical structure of the polycation. The resistance varied from $10^7$ to $10^5$ $\Omega$, as the humidity was increased from 60 (relative humidity) to $95\%$RH, which is the range of RH values required for a dew sensor operating at high humidity.

• Advances in aircraft and spacecraft science
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• 제2권3호
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• pp.263-273
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• 2015

Carbon nanotube strain sensors, or so called "fuzzy fiber" sensors have not yet been studied sufficiently. These sensors are composed of a bundle of fiberglass fibers coated with CNT through a thermal chemical vapor deposition process. The characteristics of these fuzzy fiber sensors differ from a conventional nanocomposite in that the CNTs are anchored to a substrate fiber and the CNTs have a preferential orientation due to this bonding to the substrate fiber. A numerical model was constructed to predict the strain response of a composite with embedded fuzzy fiber sensors in order to compare result with the experimental results obtained in an earlier study. A comparison of the numerical and experimental responses was conducted based on this work. The longitudinal sensor output from the model matches nearly perfectly with the experimental results. The transverse and off-axis tests follow the correct trends; however the magnitude of the output does not match well with the experimental data. An explanation of the disparity is proposed based on microstructural interactions between individual nanotubes within the sensor.

• 센서학회지
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• 제17권5호
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• pp.346-349
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• 2008

A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector (PD) is proposed as an effective UV sensing device for integration with a GaN n-channel MISFET on auto-doped p-type GaN grown on a silicon substrate. Due to the high hole barrier of the metal-p-GaN contact, the dark current density of the fabricated MSM PD was less than $3\;nA/cm^2$ at a bias of up to 5 V. Meanwhile, the UV/visible rejection ratio was 400 and the cutoff wavelength of the spectral responsivity was 365 nm. However, the UV/visible ratio was limited by the sub-bandgap response, which was attributed to defectrelated deep traps in the p-GaN layer of the MSM PD. In conclusion, an MSM PD has a high process compatibility with the n-channel GaN Schottky barrier MISFET fabrication process and epitaxy on a silicon substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.199-199
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• 2010

A back-gated MOSFET on silicon-on-insulator (SOI) substrate for pH sensor was investigated. We used concentrations of pH solution from 6 to 9. The fabricated back-gated MOSFET has current difference and threshold voltage shift by pH concentrations. Therefore, It can be used to simplification of conventional pH sensor.

• 제어로봇시스템학회논문지
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• 제12궈1호
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• pp.85-92
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• 2006

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

• 대한기계학회논문집A
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• 제30권11호
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• pp.1369-1375
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• 2006

In this work, mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. The fabrication process for stainless steel micromachined devices keeps the membrane and substrate being at the environment of 8.65MPa pressure and $175^{\circ}C$ for a half hour and then subsequently cooled to $25^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the device fabricated using these technologies is 9.03 ppm $kPa^{-1}$ with a net capacitance change of 0.14 pF over a range 0$\sim$180 kPa.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.447-449
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• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.