Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.11a
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- Pages.1448-1452
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- 2003
Design & development of a device for thin-film evaluation using a two-component loadcell
2축 로드셀을 이용한 박막평가장치의 설계 및 개발
- Published : 2003.11.05
Abstract
A scratch tester was developed to evaluate the adhesive strength at interface between thin-film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the tangential forces simultaneously as the probe tip of the equipment approaches to the interface between thin-film and substrate of wafer. The capacity of each component of force sensor is 0.1 N