• 센서학회지
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• 제29권1호
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• pp.40-44
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• 2020

An integrated multifunctional sensor, capable of raising an early electric-fire warning, was fabricated. An arc-light, temperature, and humidity sensor was fabricated on a flexible substrate using a printed thin film of indium tin oxide. A polyethylene terephthalate (PET) substrate was used as the flexible substrate. The sensor was fabricated on a PET substrate, and its operating characteristics were tested. The operating performances of the sensor when serving as an arc-light, a temperature, and a humidity sensor were estimated to be 0.6247 Ω/W, 80.6 Ω/K, and -4.08 Ω/RH, respectively. The feasibility of the proposed fire sensor was demonstrated; it costs low and offers multiple functionalities.

• 센서학회지
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• 제24권3호
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• pp.159-164
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• 2015

Solid state electrochemical and chemo-resistive gas sensors have been used widely but can operate only under high temperature. For reducing the power consumption and optimizing the structure of the substrate of these sensors, we conducted device and circuit simulations using the COMSOL Multiphysics simulator. For assessing the effective types of substrate and heat isolation, we conducted three-dimensional thermal simulations in two separate parts; (a) by changing the shape of the contacting holes and (b) punching additional holes on the substrate. Thus, it was possible to achieve high temperature in the sensor end of the substrate while maintaining low power consumption, and temperature in the circuit.

• 전기학회논문지
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• 제60권3호
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• pp.594-599
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• 2011

A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.116-120
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• 2020

In this paper, we developed an electrochemical glucose sensor strip using a paper substrate. The paper glucose sensor strip is eco-friendly because it uses paper as a substrate, and it has the advantage that it can be manufactured only with four printing, drying and cutting processes. The paper glucose sensor is significantly simplified by the production process than the conventional glucose sensors because the production of only four printing on the paper substrate. In this paper, eco-friendly tracing paper was used to develop a paper glucose sensor strip, and screen-printing technology was used to form a carbon/silver electrode, insulating layer and glucose oxidase(GOD) layer. The developed paper glucose sensor strip has a flat structure with a size of 30 × 4.6 ㎟, and blood injection is a type of direct contact with the exposed enzyme layer above the strip. In this paper, the performance of paper glucose sensor strips was evaluated by analyzing the cyclic voltammetry(CV) and chronoamperometry(CA) characteristics.

• 생물환경조절학회지
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• 제19권1호
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• pp.12-18
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• 2010

토마토를 대상으로 암면과 코이어를 사용한 자루재배에서 일사량제어와 배액전극제어법의 급액제어 능력을 실험한 결과, 배지 종류에 관계없이 일사량제어법에 비해 배액전극제어법에서 배지함수량과 배액량이 안정 적이었다. 총수확량과 상품과량은 배액전극제어법에서 많았으며, 동일한 급액제어 처리 안에서는 배지간 차이는 없었다. 당도는 급액제어 방법의 차이보다는 배지의 종류에 영향을 많이 받았다. 배액전극제어법은 펄라이트뿐만 아니라 암면과 코이어배지에서도 범용적으로 일사량제어법에 비해 유리한 것으로 나타났다.

• 센서학회지
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• 제28권6호
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• pp.390-394
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• 2019

This paper presents an inkjet-printed plastic force sensor using PEDOT:PSS. Using a piezoelectric-type inkjet printer, the force sensor was manufactured by printing PEDOT:PSS ink onto a polyimide (PI) substrate film. Applying a vertical force of 0 to 100 N to the force sensor on the PI substrate with a thickness of 64 mm, the resistance of the force sensor increased in proportion to the input force by the length deformation of the PI substrates and the sensor pattern. As a result, the fabricated sensor has a characteristic of 0.001% /N with a linearity of 99.38%. In addition, as the thickness of the PI substrate film increased, the sensitivity of the sensor increased linearly. The fabricated force sensor is expected to be applied to industrial sites and healthcare fields.

• ETRI Journal
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• 제38권4호
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• 센서학회지
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• 제18권5호
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• pp.343-348
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• 2009

$NiO{\cdot}(Co_{0.25}Mn_{0.75})_2O_3$(Mn-Ni-Co) and $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thick films were screen printed on Pt patterned alumina substrate to investigate the effects of sintering temperature on humidity and temperature sensing properties of ceramic sensors. A raise in sintering temperature increased resistance and B constant of the Mn-Ni-Co temperature sensor. This may have derived from the synergic effects of the reduction in charge carriers caused by the substitution of Co for Mn as well as the formation of microcracks from the difference in thermal expansion coefficients. Dependence of resistance on humidity of the Mn-Ni-Co temperature sensor, however, was not found. BST films sintered at temperatures in the range of $1100^{\circ}C$ to $1150^{\circ}C$ showed excellent humidity sensing properties. The BST humidity sensor was faster in its response than the Mn-Ni-Co temperature sensor. The humidity sensor, however, proved to be unstable under various temperatures, suggesting a need for a temperature stabilizing device. In contrast, the Mn-Ni-Co temperature sensor was stable under humid conditions.

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.7-10
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• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• 생물환경조절학회지
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• 제30권1호
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• pp.27-36
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• 2021

정전용량 수분측정 센서는 수경용 배지 양쪽에 구리 및 테플론으로 절연된 전극판(30cm×10cm)을 부착하여 배지의 넓은 부분에 걸쳐 측정하도록 개발되었다. 본 연구는 콘덴서형 정전용량 센서로부터 출력되는 정전용량 값을 배지 함수량으로 변환하는 것이다. 정량화 실험은 양액을 공급하면서 배지 물무게와 정전용량 변화를 측정하고 그 값을 비교하는 방식으로 수행되었다. 배지 함수량과 정전용량은 본 연구를 위해 특별히 개발된 소프트웨어와 함께 센서와 로드셀을 사용하여 20~30초마다 측정되었다. 상용 curve-fitting 프로그램을 이용하여 배지 함수량과 정전용량을 변수로 정전용량 값으로 배지 함수량을 추정하였다. 공급하는 물의 양이 증가하면 정전용량도 증가하는 경향을 보였다. 배지 내 물무게에 따른 정전용량에 대한 변동계수(coefficient of variation, cv)는 배지 내 물무게가 1.0kg 수준에서 다른 무게에 비해 높아 함수량 보정은 물무게를 1.7~6.0kg 수준에서 수행하였다. 정전용량과 물무게 사이의 상관 계수는 0.996이었고 보정식에 의해 정전용량으로 추정된 함수량은 로드셀로 측정한 배지 함수량과 비교하였다.