• Title/Summary/Keyword: Sensitivity to metals

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$SnO_2$-based thin film gas sensors in array for recognizing inflammable gases (가연성 가스 인식을 위한 $SnO_2$계열의 박막 가스센서)

  • 이대식;심창현;이덕동
    • Journal of the Korean Vacuum Society
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    • v.10 no.3
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    • pp.289-297
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    • 2001
  • Highly-porous $SnO_2$thin films were prepared for recognizing and detecting of the inflammable gases, like butane, propane, LPG, carbon monoxide. To obtain sensing films, Sn, Pt/Sn, Au/Sn, and Pt,Au/Sn films were deposited employing a thermal evaporator for Sn film and a sputter for novel metals of Pt or/and Au. These films were annealed for 2 h at $700^{\circ}C$ to form $SnO_2$-based thin films. The films showed the tetragonal structure and also exhibited many defects and porosity, which could give high sensitivity to thin films. The thin films showed high sensitivity and reproductivity to the tested gases(butane, propane, LPG, and carbon monoxide) to even to low gas concentrations in range of workplace environmental standards. Especially, Pt/$SnO_2$film showed the highest sensitivity to butane, LPG, and carbon monoxide. And pure $SnO_2$ film manifested the highest sensitivity to propane. By using the sensing patterns from the films, we could reliably recognize the kinds and the quantities of the tested inflammable gases within the range of the threshold limit values(TLV) and the lower explosion limit(LEL) through the principal component analysis(PCA).

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Improvement of detection sensitivity of impurities on Si wafer surface using synchrotron radiation (방사광을 이용한 Si 웨이퍼 표면불순물 검출감도 향상)

  • 김흥락;김광일;강성건;김동수;윤화식;류근걸;김영주
    • Journal of the Korean Vacuum Society
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    • v.8 no.1
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    • pp.13-19
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    • 1999
  • Total reflection X-ray fluorescence spectroscopy using synchrotron radiation source called as TRSFA was explored to achieve high sensitivities to impurity metals on Si wafer surface. It consists of monochromating part to select a specific wavelength, slit part to shield direct beam and to control monochromated beam, and main chamber to dectect fluorescent X-ray counts of impurities on si wafer. Monochromated X-ray of 10.90 KeV was selected and the optimum total reflection condition on silicon wafer was obtained through tuning the dead time and fluorescent X-ray count of Si and Fe. TRSFA system could increase the sensitivity as high as 50 times in comparision with TRXFA using normal X-ray source. But the trend was varied since the surface conditions of Si wafers and, therefore, the reflectivities were different. Furthemore, there seems to be a promising path to reaching a detection limit useful to the next generation metal impurities control, because Fe impurity below to the $5\times10^{9}\textrm{atomas/cm}^2$ can be detectable through the developed TRSFA system.

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Photon Energy Dependence of the Sensitivity of LiF TLDs Loaded with Thin Material (얇은 박막을 얹은 TLD 반응감도의 광자 에너지에 대한 의존성)

  • Min Byongim J;Kim Sookil;Loh John J.K;Cho Young Kap
    • Radiation Oncology Journal
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    • v.17 no.3
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    • pp.256-260
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    • 1999
  • Purpose : An investigation has been carried out on the factors which affect the response reading of thermoluminescent dosimeters (TLD-100) loaded with thin material in high energy Photon. The aim of the study was to assess the energy response of TLD-100 to the therapeutic ranges of photon beam. Materials and Methods : In this technique, TLD-100 (abbreviated as TLD) chips and three different thin material (Tin, Gold, and Tissue equivalent plastic plate) which mounted on the TLD chip were used in the clinical photon beam. The thickness of each metal plates was 0.1 mm and TE plastic plate was 1 mm thick. These compared with the photon energy dependence of the sensitivities of TLD (normal chip), TLD loaded with Tin or Gold plate, for the photon energy range 6 MV to 15 MV, which was of interest in radiotherapy. Results : The enhancement of surface dose in the TLD with metal plate was clearly detected. The TLD chips with a Gold plate was found to larger response by a factor of 1.83 in 10 MV photon beam with respect to normal chip. The sensitivity of TLD loaded with Tin was less than that for normal TLD and TLD loaded with Gold. The relative sensitivity of TLD loaded with metal has little energy dependence. Conclusion : The good stability and linearity with respect to monitor units of TLD loaded with metal were demonstrated by relative measurements in high energy Photon ($6\~15$ MV) beams. The TLD laminated with metals embedded system in solid water phantom is a suitable detector for relative dose measurements in a small beam size and surface dose.

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Sensitivity Enhancement of RF Plasma Etch Endpoint Detection With K-means Cluster Analysis

  • Lee, Honyoung;Jang, Haegyu;Lee, Hak-Seung;Chae, Heeyeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.142.2-142.2
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    • 2015
  • Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

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Rapid Bioassay Technique Based on Temperature Control of Ceriodaphnia dubia (Ceriodaphnia dubia의 온도조절에 근거한 단기급성독성 조사법)

  • PARK Jong Ho;LEE Sang Ill;CHO Young Oak;LEE Won Ho;YEON Ik Jun;CHO Kyu Seok
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.37 no.3
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    • pp.209-214
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    • 2004
  • A method for rapid acute toxicity test based on temperature control of Ceriodaphnia dubia has been developed and evaluated. A new toxicity test based on temperature control (TTBTC) which are based on temperature control, was developed and compared for the adsorption of the better methodology for short-term toxicity screening. Initially, daphnid larval are exposed to toxicants and at the same time the temperature of the water bath containing media is increased to high temperature $(35.5^{\circ}C).$ After 1.25 hrs of contact time, the number of the daphnids, either living (no toxic effect) or dead (toxic effect), is counted by the naked eyes. Effect of exposure time on test sensitivity was not significantly different between 1 to 1.5 hr. Comparison of the rapid 1.25 hr acute toxicity test developed in this study and the standard 48 hr acute toxicity test using heavy metals, cyanide and pentachlorophenol indicated that the 1.25 hour test provides an acceptable level of sensitivity in toxicity test for C. dubia.

Radiolabeling of nanoparticle for enhanced molecular imaging

  • Kim, Ho Young;Lee, Yun-Sang;Jeong, Jae Min
    • Journal of Radiopharmaceuticals and Molecular Probes
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    • v.3 no.2
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    • pp.103-112
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    • 2017
  • The combination of nanoparticle with radioisotope could give the in vivo information with high sensitivity and specificity. However, radioisotope labeling of nanoparticle is very difficult and radioisotopes have different physicochemical properties, so the radioisotope selection of nanoparticle should be carefully considered. $^{18}F$ was first option to be considered for labeling of nanoparticle. For the labeling of $^{18}F$ with nanoparticle, Prosthetic group is widely used. Iodine, another radioactive halogen, is often used. Since radioiodine isotopes are various, they can be used for different imaging technique or therapy in the same labeling procedures. $^{99m}Tc$ can easily be obtained as pertechnatate ($^{99m}{TcO_4}^-$) by commercial generator. Ionic $^{68}Ga$ (III) in dilute HCl solution is also obtained by generator system, but $^{68}Ga$ can be substituted for $^{67}Ga$ because of the short half-life (67.8 min). $^{64}Cu$ emits not only positron but also ${\beta}-particle$. Therefore $^{64}Cu$ can be used for imaging and therapy at the same time. These radioactive metals can be labeled with nanoparticle using the bifunctional chelator. $^{89}Zr$ has longer half-life (78.4 h) and is used for the longer imaging time. Unlike different metals, $^{89}Zr$ should use the other chelate such as DFO, 3,4,3-(LI-1,2-HOPO) or DFOB.

Ecological Risk Assessment(ERA) of Abandoned Mine Drainage(AMD) in Korea Based on Vibrio fisheri, Selenastrum capricornutum, and Daphnia magna (국내 폐광산 지역의 Vibrio fisheri, Selenastrum capricornutum, 그리고 Daphnia magna를 이용한 생태 위해성 평가)

  • Kim, Ki-Tae;Lee, Byoung-Cheun;Kim, Dong-Wook;Kim, Sang-Don
    • Journal of Korean Society of Environmental Engineers
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    • v.29 no.2
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    • pp.163-168
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    • 2007
  • Ecological risk assessment(ERA) to 5 abandoned mine drainage was investigated by using chemical measurement and bioassay experiment. From the results of chemical analysis, the high concentration of heavy metals are detected in most area. The Arsenite were mostly detected in Songcheon, Nakdong, and Dukum abandoned mine area, and various heavy metals were highly dispersed in Nakdong area. The study area have also high biological toxicity, resulted from the bioassay based on WET(Whole Effluent Toxicity) test by using Vibrio fisheri, Selenastrum copricornutum, and Daphnia magna. The maximum toxicity was shown in the point where the mine waters start to flow. The sensitivity of toxicity by S. capricornutum was relatively high considering the values of toxicity in all samples, from 1.3 to 32.0 TU. The different sensitivities of toxicity recommends the use of battery system, resulted from at least two test species for bioassay or ecological risk assessment of mine drainage. Besides, the results showed high hazard quotient(i.e., greater than 1 HQ value indicating potentially significant toxic risks) with regard to abandoned mine drainage area in this study. On the other hand, the biological toxicity results were sharply decreased by attenuation along further distance from discharging of mine waters. Therefore, environmental parameters including the dilution factor, dissolved organic matter, and hardness should be considered when the remediation and ERA of abandoned mine drainage is planned.

Impact Damage on Brittle Materials with Small Spheres (I) (취성재료의 소구충돌에 의한 충격손상 (I))

  • U, Su-Chang;Kim, Mun-Saeng;Sin, Hyeong-Seop;Lee, Hyeon-Cheol
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.11
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    • pp.93-100
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    • 2001
  • Brittle materials are very weak for impact because of typical characteristics which happen to be easily fractured with low fracture toughness and crack sensitivity. When brittle materials are subjected to impact due to small spheres, high contact pressure is occurred to impact surface and then local damage on specimen is developed, since there are little plastic deformations due to contact pressure compared to metals. This local damage is a dangerous factor which gives rise to final fracture of structures. In this research, the crack propagation process of soda lime glass by impact of small sphere is explained and the effects of the constraint conditions of impact spheres and materials for the material damage were studied by using soda-lime glass. that is the effects for the materials and sizes of impact ball, thickness of specimen and residual strength. Especially, this research has focused on the damage behavior of ring crack, cone crack and several kinds of cracks.

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Construction and Characterization of a Recombinant Bioluminescence Streptomycetes for Potential Environmental Monitoring

  • Park, Hyun-Joo;Hwang, Keum-Ok;Kim, Eung-Soo
    • Journal of Microbiology and Biotechnology
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    • v.12 no.4
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    • pp.706-709
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    • 2002
  • Bacterial bioluminescence has been known to be a highly valuable reporter system for its potential application as an effective and simple environmental monitoring method for toxic compounds. In this short report, we constructed a streptomycetes-Escherichia coli shuttle vector-containing bioluminescence system and evaluated its potential application for toxic compounds monitoring. The luxAB biolurninescence genes from Vibrio harveyi were cloned into a streptornycetes-E. coli shuttle vector (named pESK004) and functionally expressed in Streptomyces lividans. The recombinant S. lividans containing pESK004 exhibited an optimal biolurninescence at the optical density ($OD_{600\;nm}$) of 0.4-0.5 and aldehyde concentration of 0.005%. When the recombinant bioluminescence streptomycetes was exposed to a toxic compound such as heavy metals, chlorinated phenols, or pesticides, the bioluminescence was decreased proportionally to the concentration of toxic compound in the assay mixture. The $EC_{50}$ (effective concentration to decrease 50% of the bioluminescence prior to exposure) values in the recombinant biolurninescence streptomycetes for mercury, 2,4-dichlorophenol, and malathion were measured at 2.2 ppm, 144.0 ppm, and 82.4 ppm, respectively. The degree of sensitivity and specificity pattern toward these toxic compounds characterized in this recombinant bioluminescence streptomycetes were unique when compared with previously reported bacterial bioluminescence systems, and this revealed that a recombinant bioluminescence streptomycetes might provide an alternative or complementary system for potential environmental monitoring.

Cooling Characteristic Analysis of Transformer's Radiator (변압기 냉각 특성 해석)

  • Kim, Hyun-Jae;Yang, Si-Won;Kim, Won-Seok;Kweon, Ki-Yeoung;Lee, Min-Jea
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.1920-1925
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    • 2007
  • A transformer is a device that changes the current and voltage by electricity induced between coil and core steel, and it is composed of metals and insulating materials. In the core of the transformer, the thermal load is generated by electric loss and the high temperature can make the break of insulating. So we must cool down the temperature of transformer by external radiators. According to cooling fan's usage, there are two cooling types, OA(Oil Natural Air Natural) and FA(Oil Natural Air Forced). For this study, we used Fluent 6.2 and analyzed the cooling characteristic of radiator. we calculated 1-fin of detail modeling that is similar to honeycomb structure and multi-fin(18-fin) calculation for OA and FA types. For the sensitivity study, we have different positions(side, under) of cooling fans for forced convection of FA type. The calculation results were compared with the measurement data which obtained from 135.45/69kV ultra transformer flowrate and temperature test. The aim of the study is to assess the Fluent code prediction on the radiator calculation and to use the data for optimizing transformer radiator design.

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