• 제목/요약/키워드: Semiconductor Manufacture

검색결과 121건 처리시간 0.021초

실험계획법을 이용한 진공유리 Pillar의 배치공정 최적화 (The Arrangement Process Optimization of Vacuum Glazing Pillar using the Design of Experiments)

  • 김재경;전의식
    • 반도체디스플레이기술학회지
    • /
    • 제11권1호
    • /
    • pp.73-78
    • /
    • 2012
  • In this study, the optimal process condition was induced about the pillar arrangement process of applying the screen printing method in the manufacture process of vacuum glazing panel. The high precision screen printing is technology which pushes out the paste and spreads it by using the squeegee on the stainless steel plate in which the pattern is formed. The screen printing method is much used in the flat panel display field including the LCD, PDP, FED, organic EL, and etc for forming the high precision micro-pattern. Also a number of studies of screen printing method have been conducted as the method for the cost down through the improvement of productivity. The screen printing method has many parameters. So we used Taguchi method in order to decrease test frequencies and optimize this parameters efficiently. In this study, experiments of pillar arrangement were performed by using Taguchi experimental design. We analyzed experimental results and obtained optimal conditions which are 4 m/s of squeegee speed, $40^{\circ}$ of squeegee angle and distance between metal mask and glass.

FEM을 이용한 진공유리 패널의 지지대 설계변수 설정 (The Pillar Design Variable Determination up of the Vacuum Glazing Panel using FEM)

  • 김재경;전의식
    • 반도체디스플레이기술학회지
    • /
    • 제10권4호
    • /
    • pp.101-106
    • /
    • 2011
  • There are various methods in the flat panel display manufacture. The cost reduction effect is very big in case of using the screen printing method. The screen printing method is much used in the process of forming PDP barrier and can apply to the process of arranging the pillars for maintaining the vacuum gap of the vacuum glazing panel. The pillar which is one of the core elements for comprising vacuum glazing maintains the vacuum gap overcoming the vacuum pressure difference with the atmospheric pressure generated in vacuum glazing. At the same time, the deformation phenomenon by vacuum pressure is relived. In this paper, by using FEM about three considered in the pillar design and arrangement kinds of limiting factors, the simulation was performed. The pillar optimum arrangement method at within the maximum allowable tensile stress and heat transfer coefficients according to the arrangement try to be presented based upon the analyzed result data review and this validity tries to be verified by FEM.

전기화학적 전착에 의한 ZnSe박막 구조 및 발광특성 (Structural and luminescent properties of ZnSe thin films by electrochemical deposition)

  • 김환동;최길호;윤도영
    • 반도체디스플레이기술학회지
    • /
    • 제7권4호
    • /
    • pp.19-22
    • /
    • 2008
  • Thin film has been an increasing important subject of intensive research, owing to the fact that these films possess desirable optical, electrical and electrochemical properties for uses in many semi-conducting nano-crystal applications, such as light-emitting diodes, lasers and solar cell applications. Here, ZnSe thin films were deposited by electrochemical method for the applications of light emitting diode. Electrochemical deposition of ZnSe thin film is not easy, because of the high difference of reduction potential between zinc ion and selenium acid. In order to handle the band gap of ZnSe crystal thin films easily, electrochemical methods are promising to manufacture these films economically. Therefore we have investigated the present study to characterize zinc selenide thin films deposited on ITO glass plates electrochemically. The luminescent properties of ZnSe films have been evaluated by UV-Vis spectrometer and luminescence spectrometer. And the morphology of the film surface has been discussed qualitatively from SEM images.

  • PDF

유한요소해석을 이용한 CIGS 박막 태양전지용 Fe-Ni 합금 기판재 열적 거동 연구 (Study on Thermal behavior of Flexible CIGS Thin Film Solar Cell on Fe-Ni Alloy Substrates using Finite Element Analysis)

  • 한윤호;이민수;김동환;임태홍
    • 한국표면공학회지
    • /
    • 제48권1호
    • /
    • pp.23-26
    • /
    • 2015
  • What causes the transformation of a solar cell is the behavior difference of thermal expansion occurred between the substrate and the layer of semiconductor used in the solar cell. Therefore, the substrate has to possess a behavior of thermal expansion that is similar with that of semiconductor layer. This study employed electroforming to manufacture Fe-Ni alloy materials of different compositions. To verify the result from a finite element analysis, a two-dimensional Mo substrate was calculated and its verification experiment was conducted. The absolute values from the finite element analysis of Mo/substrate structure and its verification experiment showed a difference. However, the size of residual stress of individual substrate compositions had a similar tendency. Two-dimensional CIGS/Mo/$SiO_2$/substrate was modeled. Looking into the residual stress of CIGS layer occurred while the temperature declined from $550^{\circ}C$ to room temperature, the smallest residual stress was found with the use of Fe-52 wt%Ni substrate material.

전선피복용 컴파운드의 제조에서 가소제의 종류와 첨가량에 따른 물성 변화 연구 (Study on Property Modification with Kind and Additive Amount of Plasticizer in the Manufacture of Compounds for Cable Sheath)

  • 리시앙수;이상봉;조을룡
    • 반도체디스플레이기술학회지
    • /
    • 제18권2호
    • /
    • pp.11-16
    • /
    • 2019
  • The four different polymer compounds were manufactured with the two kinds of plasticizers [(di-2-ethylhexyl sebacate(DOS), and di-2-butyl sebacate(DBS)] and two different additive amounts(18, 26 phr) of the same plasticizer for making cable sheath for ship. Ethylene-vinylacetate, ethylene-propylene-diene-copolymer as matrix polymers and ethylene-vinylacetate grafted maleic anhydride as coupling agent were selected for compounding with fire retardant, closslinking agent, filler, and other additives besides plasticizer. The compound including DOS showed the higher ${\Delta}T$ than that including DBS at the same additive amount in the rheology test. And with increasing plasticizer, the compounds resulted in lower tensile strength and higher elongation by lubricating effect of plasticizer. DOS yielded better aging resistance and cold resistance than DBS due to the good heat resistance and low solidifying point of DOS compared to DBS.

청정도 가스 이송용 재료의 특성과 전해연마에 관한 연구 (A Study on the Characteristics of Electro Polishing and Utility Materials for Transit High Purity Gas)

  • 이종형;박신규;양성현
    • 한국산업융합학회 논문집
    • /
    • 제7권3호
    • /
    • pp.259-263
    • /
    • 2004
  • In the manufacture progress of LCD or semiconductor, there are used many kinds of gas like erosion gas, dilution gas, toxic gas as a progress which used these gas there are required high puritize to increase accumulation rate of semiconductor or LCD materials work progress of semiconductor or LCD it demand many things like the material which could minimize metallic dust that could be occured by reaction between gas and transfer pipe laying material, illumination of the surface, emition of the gas, metal liquation, welding etc also demand quality geting stricted. Material-Low-sulfur-contend (0.007-0010), vacuum-arc-remelt(VAR), seamless, high-purity tubing material is recommend for enhance welding lower surface defect density All wetted stainless steel surface must be 316LSS elecrto polishinged with ${\leq}0.254{\mu}m$($10.0{\mu}in$) Ra average surface finish, $Cr/Fe{\geq}1.1$ and $Cr_2O_3$ thickness ${\geq}25{\AA}$ From the AES analytical the oxide layer thickness (23.5~36 angstroms silicon dioxide equivalent) and chromum to iron ratios is similar to those generally found on electropolished stainless steel., molybdenum and silicon contaminants ; elements characteristic of stainless steel (iron, nickel and chromium); and oxygen were found on the surface Phosphorus and nitrogen are common contaminants from the electropolish and passivation steps.

  • PDF

반도체 FAB 공정에서의 효율적 흐름제어를 위한 시뮬레이션 (Simulation of Efficient Flow Control for FAB of Semiconductor Manufacturing)

  • 한영신;전동훈
    • 한국멀티미디어학회논문지
    • /
    • 제3권4호
    • /
    • pp.407-415
    • /
    • 2000
  • 설비 집약적이며 복잡한 생산 시스템중의 하나인 반도체 FAB 공정은 제품의 흐름시간과 대기시간, 공정 중 재고를 줄이는 것이 흐름제어의 가장 중요한 목표이다. 이에 본 연구에서는 소품종 다랑 생산 시스템에서 발생하는 비경제성을 줄이고 생산성을 향상시키기 위하여 현재 반도체 양산 회사에서 주로 채택하고 있는 In-Line Layout을 분석하고 새로운 제안 방식인 그룹테크놀로지를 이용한 Job Shop 형태의 Stand Alone Layout과 함께 각각의 모델로 구축하고 시뮬레이션 함으로써 일별 생산 계획상의 회수 변화에 따른 각Layout의 특성을 비교, 분석하였다. 이 때 사용한 시뮬레이션 툴은 모델 구축 및 시뮬레이션이 용이하고 범용적인 (이산형 제조 시스템용) ProSys를 사용하였다. 연구 결과로는 일별 생산 계획상의 회수 초기에는 In-Line Layout이 Stand Alone Layout보다 대체로 생산량 측면에서 우세하지만 일별 생산계획상의 회수가 증가된 14회부터는 Stand Alone Layout이 더 우세한 것으로 나타났다

  • PDF

Nb2O5 반도체 산화물을 이용한 염료 감응 태양전지 특성 연구 (A Study on the Characteristics of Dye-Sensitized Solar Cell Using Nb2O5 Semiconductor Oxides)

  • 김해마로;이돈규
    • 전기전자학회논문지
    • /
    • 제23권1호
    • /
    • pp.330-333
    • /
    • 2019
  • 실리콘 태양전지와 비교해 제조비용이 저렴하고 뛰어난 안정성을 가지고 있는 염료 감응 태양전지에 관한 다양한 연구가 지속적으로 이루어지고 있다. 본 연구에서는 $TiO_2$$Nb_2O_5$을 혼합하여 만든 반도체 산화물을 사용하여 염료 감응 태양전지의 특성을 연구하였다. $Nb_2O_5$을 서로 다른 비율로 첨가하여 태양전지를 제작하였고, 이에 따른 표면적, 전기적 특성을 측정하였다. $Nb_2O_5$가 첨가될수록 염료 및 전해질의 접촉 면적이 증가하게 되었고, 이에 따라 염료 감응 태양전지의 단락 전류, 개방전압, 곡선인자 및 변환 효율이 개선됨을 확인하였다.

임피던스 변화를 이용한 실시간 기판 변형 측정 (In-situ Warpage Measurement Technique Using Impedance Variation)

  • 김우재;신기원;권희태;온범수;박연수;김지환;방인영;권기청
    • 반도체디스플레이기술학회지
    • /
    • 제20권1호
    • /
    • pp.32-36
    • /
    • 2021
  • The number of processes in the manufacture of semiconductors, displays and solar cells is increasing. And as the processes is performed, multiple layers of films and various patterns are formed on the wafer. At this time, substrate warpage occurs due to the difference in stress between each film and pattern formed on the wafer. the substrate warping phenomenon occurs due to the difference in stress between each film and pattern formed on the wafer. We developed a new warpage measurement method to measure wafer warpage during real-time processing. We performed an experiment to measure the presence and degree of warpage of the substrate in real time during the process by adding only measurement equipment for applying additional electrical signals to the existing ESC and detecting the change of the additional electric signal. The additional electrical measurement signal applied at this time is very small compared to the direct current (DC) power applied to the electrostatic chuck whit a frequency that is not generally used in the process can be selectively used. It was confirmed that the measurement of substrate warpage can be easily separated from other power sources without affecting.

미세홈 가공시 전해 인프로세스 드레싱의 영향에 관한 연구 (A Study on the Effect of Electrolytic In-process Dressing in Slot Grinding)

  • 유정봉;이석우;정해도;최헌종
    • 한국정밀공학회지
    • /
    • 제16권1호통권94호
    • /
    • pp.18-25
    • /
    • 1999
  • Chipping is an unavoidable phenomenon in the slot grinding process of hard and brittle materials. However, it should be reduced for the improvement of surface integrity in the manufacture of optical and semiconductor components. Electrolytic In-process Dressing (ELID) technique for metal bonded superabrasive grinding wheel has been developed for mirror surface grinding of hard and brittle materials. Electrically dressed wheel surface has sharply exposed abrasives and results in lower grinding force, higher grinding efficiency in grinding. The paper deals with a newly developed method for slot grinding using ELID and was implemented to improve grooved surface quality and decreases chipping size on the edge of the groove. As a result, we accomplished chipping-free grooves and obtained the clear ground surfaces on glass and WC.

  • PDF