• 한국생산제조학회지
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• 제8권6호
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• pp.98-104
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• 1999

As the accuracy of manufactured goods needed high accuracy processing has made the efficiency of NC and measurement technology development, the innovation of machine tools has influence the development of the semi-conductor and optical technology. The movement errors can be expressed in terms of yaw, roll an pitch etc. In the case of expanding the error range, static, dynamic and servo gain errors can be included. Machining center might have twenty-one movement errs including three types of joint errors. Those errors have been measured on the condition of just loading of standard table. Regarding these measuring methods, the mechanical compliance of the structure has not been considered. In this paper, therefor, the influences of the additional load on the positioning accuracy are investigated. The results and the techniques proposed in this study can be considered very effective and useful to compensate more correctly the positioning motion.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1087-1090
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• 2008

This paper presents the electro-luminescence (EL) display lamp which is patterned on a curved surface by the pad printing method. The printing methods, including the gravure, screen, flexo, inkjet, and pad printing, have an advantage of one-step direct patterning. However, in general, the printing and semi-conductor process, except pad printing method, cannot be applied for patterning on a curved surface. Thus, in this paper, we used pad printing method for patterning an EL display lamp on a curved surface. The EL display lamp consists of 5 layers: Bottom electrode; Dielectric layer; Phosphor; Transparent electrode; Bus electrode. Finally, we printed EL display lamp on a dish, which has a radius of curvature 80mm. The EL display lamp was driven at AC 200V of 1kHz.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.30-30
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• 2010

CIGS 태양전지는 박막 태양전지 중 가장 높은 potential을 지닌 태양전지로 각광받고 있으나, 상업적 이행이 타 박막 태양전지에 비해 더디게 진행되고 있다. 그 이유는 기존의 잘 알려진 방식이 고효율에는 유리하나, 양산용 설비의 개발 미비 등 양산관점에서 매우 불리하기 때문이다. 또한, CIGS 태양전지를 상업화하기 위해 많은 기업과 연구 집단에서 개발을 진행하고 있으나, 대부분 각 기업의 노하우적 성격이 강하여, 기술이 보편화되지 못한 것도 주요한 원인이다. CIGS 태양전지의 다양한 제조기술 중 현재까지 가장 양산화에 유리한 기술은 Sputter/Se화 기술이다. 이는 기존 FPD/semi conductor 산업에서 발전된 sputter 및 열처리 기술을 활용할 수 있기 때문이다. 그러나, CIGS 태양전지는 기본적으로 4원~5원 화합물 태양전지이므로, 기존의 장비 및 기술을 그대로 적용하는 것에는 많은 어려움이 따른다. 본 paper에서는 CIGS 태양전지의 일반적인 제조기술과 sputter/Se화 기술에 대해서 논의하고자 한다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 추계학술대회논문집
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• pp.83-88
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• 2004

Micro wires manufactured by the straightening progress are widely used in bio-medical and semi-conductor fields. In this study, we have developed a novel straightener which uses the direct heating method for straightening. In order to avoid the surface oxidization, during the heating process, we supplied the inert gas(Ar) and examined the effect of the gas flow rate. The effect of the tension and the current applied to the tungsten micro wires were thoroughly studied. From various experiments, it was found that when the tension is $500{\sim}600gf$ and the current is about 1.5A, we obtained higher straightness(${\approx}1{\mu}m/1000{\mu}m$) and roundness ($<{\pm}2{\mu}m/100{\mu}m$).

• 한국정밀공학회지
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• 제19권9호
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• pp.82-89
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• 2002

There is an intensifying demand fur linear motors in vast range of industry applications such as in factory automation and semi-conductor manufacturing equipment due to their high positioning accuracy, high static stiffness, high thrust and excellent dynamic characteristics. This paper presents an iron core type linear motor for machine tool whose rated thrust is up to 6000N. For electromagnetic field and dynamic analysis, finite element method (FEM) is implemented to predict motor performance. Various design parameters are considered to reduce thrust ripple and to improve dynamic performance with the least sacrifice of effective thrust. Experimental results on thrust and static stiffness are also followed to confirmed the validity of the analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.23-24
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• 2006

We present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.589-590
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• 2006

Recently, research for the micro printing technology has begun to get into the spotlight. It is due to the superior price competitiveness to existent semi-conductor process for manufacturing some parts of display unit, electronic paper, RF-ID information device, and so on. This paper present screen printing process not for paper publication but for parts of electronics such as PDP wall, LCD CF, and so on. There are two major issues. The first one is how to get a fine and even line pattern. The other one is how to get the same patterns in large area. In this research, we present the design, equipment, and process control of screen printing in order to overcome these issues.

• 한국정밀공학회지
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• 제23권5호
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• pp.184-189
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• 2006

This research presents the performance analysis of the linear type pneumatic actuators that are used in semi-conductor assembly line to transfer some product with high accuracy. To increase positioning and repetitive accuracies, a cross roller guide is implemented inside the pneumatic actuator. The finite element method is used to verify the force against working moments, and reliability analysis is performed to classify the breakdown cases. Also, reliability, failure rate, probability density function, and $B_{10}$ to life are estimated under the boundary of thrust or air leakage conditions. In this study, the failure probabilistic function of the pneumatic actuators is analyzed using Weibull distribution.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 B
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• pp.585-587
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• 1998

It is suggested that the PWM inverter is controlled by Digital Software Programming. VVVF(Variable Voltage Variable Frequency) inverter control being used by PWM control for driving the motor with speed-varying, makes the PWM pattern with calculating the output voltage and frequency, and with controlling the carrier and signal, so actually this method is difficult to correspond with driving the motor by using voltage-varying and frequency-varying. Therefore this research suggested the new algorithm controlled by micro processor which is already stored by various PWM form of output voltage by using fundamental data of the carrier and signal. The PWM wave can be controlled with real time by using extra hardware and digital software and to speed up program processing, the control signals to switch the power semi-conductor of three phase PWM inverter, simultaneously use the output signal by microprocessor and extra hardware, and control signal by software. In the end, this method was proved by applying to Three Phase Voltage-type Inverter.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 B
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• pp.657-658
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• 2006

Recently, the micro on-off valves have been focused on core technology in the fields of the production line of semi-conductor chips and the micro fluid chips for bio-medical applications. A key characteristics for micro valve, operated by compressed air, are high speed response and great repeatability. Indeed, it is also important to keep the pressure on the cross-sectional area of the poppet to be constant regardless of the fluctuation of the pressure exerted on the ports. In this study, we have designed and analysed the high-speed and high flow rate micro on-off valve using the analogy of equivalent magnetic circuit and Finite Element Method(FEM) respectively. In case of poppet, flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.