Abstract
There is an intensifying demand fur linear motors in vast range of industry applications such as in factory automation and semi-conductor manufacturing equipment due to their high positioning accuracy, high static stiffness, high thrust and excellent dynamic characteristics. This paper presents an iron core type linear motor for machine tool whose rated thrust is up to 6000N. For electromagnetic field and dynamic analysis, finite element method (FEM) is implemented to predict motor performance. Various design parameters are considered to reduce thrust ripple and to improve dynamic performance with the least sacrifice of effective thrust. Experimental results on thrust and static stiffness are also followed to confirmed the validity of the analysis.
