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A Study on the Reliability Analysis for a Linear Type Pneumatic Actuator with Cross Roller Guide  

Shin Bong-Cheol (인하대학교 기계공학과 대학원)
Cho Myeong-Woo (인하대학교 기계공학과)
Kang Sung-Min ((주)프로텍 부설연구소)
Lee Soo-Jin ((주)프로텍 부설연구소)
Choi Jin-Hwa (인하대학교 산업과학기술연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.5, 2006 , pp. 184-189 More about this Journal
Abstract
This research presents the performance analysis of the linear type pneumatic actuators that are used in semi-conductor assembly line to transfer some product with high accuracy. To increase positioning and repetitive accuracies, a cross roller guide is implemented inside the pneumatic actuator. The finite element method is used to verify the force against working moments, and reliability analysis is performed to classify the breakdown cases. Also, reliability, failure rate, probability density function, and $B_{10}$ to life are estimated under the boundary of thrust or air leakage conditions. In this study, the failure probabilistic function of the pneumatic actuators is analyzed using Weibull distribution.
Keywords
Pneumatic actuator; Finite Element Method; Reliability; Weibull distribution;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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