• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• Proceedings of the Korea Concrete Institute Conference
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• 2008.11a
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• pp.809-812
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• 2008

Over the past few decades, considerable numbers of studies on the durability of concrete have been carried out extensively. The majority of these researches have been performed on sound uncracked concrete, although most of in-situ concrete structures have more or less micro-cracks. It is only recent approach that the attention has shifted towards the influence of cracks and crack width on the penetration of chloride into concrete. The penetration of chlorides into concrete through the cracks can make a significant harmful effect on reinforcement corrosion. Author of this study examined the effect of cracks on chloride penetration by short tem experiment. However, it is necessary to accomplish the effect by long term experiment to get reliable goal. In this study, the long term experiment was carried out and the experimental result was compared with short term experiment. Crack tends to decrease with elapsed time because of self-healing. Especially this trend was obvious in concrete sample with wide crack with.

• Textile Coloration and Finishing
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• v.30 no.1
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• pp.9-19
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• 2018

To prepare bio-inspired antifouling coating materials having similar structure with lotus, self-crosslinkable waterborne polyurethanes emulsions containing paraffin wax (CWPU/P0, 0.25, 0.5, 1.0, 1.5, 2.0, the number indicated the wt% of wax) were prepared by an emulsifier-free/solvent free prepolymer mixing process. The as-polymerized CWPU/P emulsions containing 0 - 1.00wt% of paraffin wax were found to be stable after 4 months, however, CWPU/P emulsions containing 1.50 and 2.00wt% of paraffin wax were unstable within 1 month storage. Considering the stability of emulsions, the optimum paraffin wax content was found to be about 1wt% to obtain stable antifouling coating emulsion material. The surface topology of CWPU/P film samples was characterized by atomic force microscopy (AFM). This study examined the effect of paraffin wax content on the surface roughness, water contact angle/surface energy, water swelling, light transmittance and tensile properties of CWPU/P film samples.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.5
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• pp.75-81
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• 2011

Recently prestressed concrete bridges are generally used instead of reinforced concrete. PSC is more durable than RC because it can reduce crack problems, reinforcement corrosion, leakage and carbonation etc. And also PSC is more effective because there is no crack in tension area, and the entire concrete section is considered in section analysis. And it can reduce section size because vertical component by prestressing force can reduce the shear force. However, using high strength concrete can increase the self weight of bridge because of it's higher density. So the hollowed PPC girder with light weight aggregate can be a alternative. In this study the hollowed PPC girder with light weight aggregate is designed and the performance of hollowed PPC girder is evaluated by experimental tests as well as numerical analysis. As a result, The hollowed PPC girder of light aggregate behaved fully elastically under service load of 110kN, and the plastic behavior was showed after elastic behavior through experimental test, and it can be also estimated by numerical analysis.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.4-4
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• 2012

Proteins enable biology to be viable through molecular interactions (such as in antigen-antibody, ligand-receptor, and drug-target) with

• Journal of the Society of Naval Architects of Korea
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• v.53 no.5
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• pp.400-409
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• 2016

In recent, shipping companies have made an enormous effort to improve the operation of vessel in various approaches, due to recession of shipping market and increasing competition among shipping companies. One of important parameters for improving the efficiency of vessel is the resistance performance that consist of friction and residual resistance. Especially, it is recognized that the friction resistance tends to be affected by conditions of vessel’s surface and occupies approximately 70~90% of the total resistance for slow speed ships. In general, the surface of vessel is covered with various type of paint to reduce fouling and corrosion. As time goes by, however, it is so hull roughness would be increased by fouling over the wetted surface that anti-fouling paints, such as CDP(Controlled Depletion Paint), Tin-Free SPC(Self Polishing Co-polymer) or Foul Release, are applied evenly on the hull surface. Nevertheless, these anti-fouling paints could not prevent fouling absolutely. A fundamental study on evaluating ship resistance performance variation due to hull roughness has been performed using a commercial software, Star-CCM+, which solves the continuity and Navier-Stokes equations for incompressible and viscous flow. The results of present simulation for plate are compared with some experimental data available and the effect of surface roughness to ship resistance performance is discussed.

• Korean Journal of Soil Science and Fertilizer
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• v.45 no.2
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• pp.287-292
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• 2012

This study was to build the database by collecting the results of legal leak test and self-test conducted by the owners of soil contamination facilities at soil-related specialized agency to grip objective status on soil contamination facilities and evaluate classification results. The results of the study showed that the unsuitable rate of business unit is 53.6%, the business with leak that could cause actual pollution is 25.7%, the unsuitable rate of the voluntary self-test is 57.3%, that of the compulsory inspection is 17.2% depending on the test motivation, that of the direct-test is 58.9%, and that of the indirect-test is 22.5% depending on the test methods. There was a significant difference between the test motivation conducted and the test methods applied. From the results of the unsuitable reasons obtained we could assume that about 20% of the whole target tanks became potential sources with natural defects occurred when such tanks were made, and 2.2% of the whole tankers examined that persisting period was caused by progressing corrosion below the minimum thickness.

• Journal of the Korean GEO-environmental Society
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• v.21 no.9
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• pp.25-32
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• 2020

The underground utilities installed under the ground is an important civil engineering structure, such as water supply and sewerage pipes, underground power lines, various communication lines, and city gas pipes. Such underground utilities can be exposed to risk due to external factors such as concentrated rainfall and vehicle load, and it is important to select and construct an appropriate backfill material. Currently, a method mainly used is to fill the soil around the underground utilities and compact it. But it is difficult to compact the lower part of the buried pipe and the compaction efficiency decreases, reducing the stability of the underground utilities and causing various damages. In addition, there are disadvantages such as a decrease in ground strength due to disturbance of the ground, a complicated construction process, and construction costs increase because the construction period becomes longer, and civil complaints due to traffic restrictions. One way to solve this problem is to use a liquid filler. The liquid filler has advantages such as self-leveling ability, self-compaction, fluidity, artificial strength control, and low strength that can be re-excavated for maintenance. In this study, uniaxial compression strength test and fluidity test were performed to characterize the mixed soil using marine clay, stabilizer, and in-situ soil as backfill material. A freezing-thawing test was performed to understand the strength characteristics of the liquid filler by freezing, and in order to examine the effect of the filling materials on the corrosion of the underground pipe, an electrical resistivity test and a pH test were performed.

• Journal of the Korea Safety Management & Science
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• v.22 no.3
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• pp.1-8
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• 2020

The desulfurizers facility is cylindrical shape. To operate properly it needs nozzles cleaned, get rid of lime adhesion and sludge, repair the wear and corrosion of facility regularly. For this purpose, workers shall access the ceiling or vertical wall at high place. Ordinary scaffoldings such as steel pipe scaffolding or system scaffolding have been using so that workers can access them. With these ordinary scaffoldings, openings around cylindrical wall are inevitable which make workers can expose always to the risk of falling. The purpose of this study is to develop customized scaffolding to minimize the openings to prevent workers form falling during maintenance it. It consists of a hexagonal central tower and six trapezoidal outer towers. And the bracing among the towers have connected each other for self-standing and for maintaining the structure of towers. Span decks, the circumference footstools, steps, etc. are laid on each floor. The safety is reviewed by structural analysis and performance test. With this study, openings each floor of this scaffold are removed. The gap between the cylindrical wall and the edge of the work stage is approximately 100 mm. Therefore, we expect that workers can work safely and efficiently.

• Journal of Adhesion and Interface
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• v.21 no.4
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• pp.143-155
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• 2020

Hydrophobic Organic-Inorganic (O-I) hybrid materials prepared by sol-gel process have been widely used at functional coating fields such as coatings for anti-corrosion, anti-icing, self-cleaning, anti-reflection. The key point for fabricating hydrophobic surface is to optimize the surface energy and roughness of the coating films. There are typical processes to control the surface energy and roughness which are 'In situ fabricating', 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating'. In this study, particle-binder process was used for in-situ fabrication of hydrophobic coating films. Various O-I hybrid compounds prepared using several kinds of alkoxysilane compounds were used as a binder for silica nanoparticles at particle-binder process. To study effect of fluorine content and weight ratio of particle : binder on the hydrophobicity and surface morphology, Hydrophobic coating films were prepared onto glass substrate at various content of fluorine content of O-I hybrid binder and weight ratio of particle : binder. The coating films prepared using O-I hybrid binder (GPTi-HF10) having 10 wt% of fluorine content showed the highes water contact angle (107.52±1.6°). The coating films prepared at 1:3 weight ratio of GPTi-HF10 : silica nanoparticle exhibited the highest water contact angle (130.84±1.99°).