• 통합자연과학논문집
• /
• 제4권4호
• /
• pp.311-314
• /
• 2011

Application of self-assembled monolayers (SAMs) to the fabrication of organic thin film transistor has been recently reported very often since it can help to provide ohmic contact between films as well as to form simple and effective electrode pattern. Accordingly, quality of these ultra-thin films is becoming more imperative. In this study, in order to manufacture a high quality SAM pattern, a hydrophobic alkylsilane monolayer and a hydrophilic aminosilane monolayer were selectively coated on $SiO_2$ surface through the consecutive procedures of a micro-contact printing (${\mu}CP$) and dip-coating methods under extremely dry condition. On a SAM pattern cleaned with SC1 solution immediately after ${\mu}CP$, poly(3,4-ethylenedioxythiophene) (PEDOT) source and drain electrode array were very selectively and nicely vapour phase polymerized. On the other side, on a SC1-untreated SAM pattern, PEDOT array was very poorly polymerized. It strongly suggests that the SC1 cleaning process effectively removes unwanted contaminants on SAM pattern, thereby resulting in very selective growth of PEDOT electrode pattern.

• 한국분말재료학회지
• /
• 제30권2호
• /
• pp.156-168
• /
• 2023

The semiconductor industry faces physical limitations due to its top-down manufacturing processes. High cost of EUV equipment, time loss during tens or hundreds of photolithography steps, overlay, etch process errors, and contamination issues owing to photolithography still exist and may become more serious with the miniaturization of semiconductor devices. Therefore, a bottom-up approach is required to overcome these issues. The key technology that enables bottom-up semiconductor manufacturing is area-selective atomic layer deposition (ASALD). Here, various ASALD processes for elemental metals, such as Co, Cu, Ir, Ni, Pt, and Ru, are reviewed. Surface treatments using chemical species, such as self-assembled monolayers and small-molecule inhibitors, to control the hydrophilicity of the surface have been introduced. Finally, we discuss the future applications of metal ASALD processes.

• 전기화학회지
• /
• 제5권3호
• /
• pp.143-152
• /
• 2002

Self-assembled monolayer(SAM)로 변형된 금 전극 위로 폴리피롤의 전기화학적 석출 과정을 수용액 상태에서 in-situ EQCM (Electrochemical Quartz Crystal Microbalance)과 ex-situ AFM (Atomic Force Microscopy)을 이용하여 조사하였다. 금 전극에서 cyclic voltammetry로 살펴본 폴리머의 석출은 산화 제한 전위 (anodic limiting potential) 값에 매우 의존적이었으며 주사 횟수에는 의존하지 않았다. 제한 산화 전위가 0.8V (vs Ag | ArCl) 이상일 때 폴리머의 석출은 크게 증가하였다. 그리고 주사 횟수가 증가하면서 질량의 비이상적 변화가 관찰되었는데 이것은 폴리피롤 필름의 rearrangement가 원인이라고 생각된다. 1-dodecanethiol SAM 전극과 thiophene SAM전극에서는 폴리머가 3차원적으로 성장하며 필름의 rearrangement를 수반하였지만 BPUS $(Bis(\omega(N-pyrrolyl)-n-undecyl)disulfide)$ SAM 전극에서는 2차원적인 layer-by-layer 성장을 하고 필름의 rearrangement는 관찰되지 않았다. 폴리머가 급격하게 전극 면으로 석출되면 사슬 모양과 도너츠 모양의 폴리머를 만들며, 정류 상태에 이르면서 주름잡힌 폴리머 필름이 생성되는 것이 원자 힘 현미경 (Atomic Force Microscopy) 이미지로 관찰되었다.

• Bulletin of the Korean Chemical Society
• /
• 제35권2호
• /
• pp.569-574
• /
• 2014

Inverted bulk hetero-junction polymer solar cells (iPSC) composed of P3HT/PC61BM blends on the ZnO modified with benzoic acid derivatives-based self-assembled monolayers (SAM) are fabricated. Compared with the device using the pristine ZnO, the devices with ZnO surface modified SAMs derived from benzoic acid such as 4-(diphenylamino)benzoic acid (DPA-BA) and 4-(9H-carbazol-9-yl)benzoic acid (Cz-BA) as an electron transporting layer show improved the performances. It is mainly attributed to the favorable interface dipole at the interface between ZnO and the active layer, the eective passivation of the ZnO surface traps, decrease of the work function and facilitating transport of electron from PCBM to ITO electrode. The power conversion eciency (PCE) of iPSCs based on DPA-BA and Cz-BA treated ZnO reaches 2.78 and 2.88%, respectively, while the PCE of the device based on untreated ZnO is 2.49%. The open circuit voltage values ($V_{oc}$) of the devices with bare ZnO and SAM treated ZnO are not much different. Whereas, higher the fill factor (FF) and lower the series resistance ($R_s$) are obtained in the devices with SAMs modification.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제51권4호
• /
• pp.175-183
• /
• 2002

In this paper, the surface modification effect of self-assembled monolayer(SAM) of 1-dodecanethiol [$CH_3$($CH_2$)$_{11}$SH] used as an anti-adhesive film in micromolding process was studied. Monolayers of 1-dodecanethiol[$CH_3$(CH$_2$)$_{11}$SH] were obtained by immersing a metal place in pure 1-dodecanethiol. SAM film on the nickel plate has been examined by using X-ray photoelectron spectroscopy(XPS). The focus has been placed on S-Ni bonding. From the XPS analysis, sulfur atoms were detected from the SAM film as a chemical composition of S-Ni. In order to measure an adhesion force of the SAM-coated nickel surface, atomic force microscopy(AFM) was used in force-distance mode, which whows the micro-adhesive force on solid surface. It was shown that adhesion forces measured from the SAM-coated nickel surface and the Ni surface without SAM coating were 3.52nN and 5.32nN, respectively. In order to investigate the effect of SAM coating on the surface foughness the replica in demolding process, hot embossing experiments were performed using a SAM-coated nickel master and a nickel master without SAM coating. Surface roughness of replica from the SAM-coated master showed 25nm and that of replica from master without SAM coating was 35nm. The smoother surface roughness of the replica from the SAM-coated, master is believed to result from reduction in the adhesion forces.ces.

• 마이크로전자및패키징학회지
• /
• 제30권2호
• /
• pp.13-20
• /
• 2023

마이크로 전자기계 시스템 공정에서 표면 처리는 공정 방법의 일환이자 디바이스에 자체적인 기능을 부여하는 역할을 한다. 특히 자기 조립 단분자층은 마이크로 전자기계 시스템 공정에서 표면 개질 및 기능화를 수행하는 표면처리 방법으로 침지 시간과 용액 농도에 따라 강도를 정밀하게 조절할 수 있는 유기 단분자막이다. 고분자 기판이나 금속/세라믹 부품에 자발적으로 흡착되어 형성되는 자기 조립 단분자층은 표면 특성의 개질 뿐만 아니라 나노스케일 단위의 높은 정밀도로 하여금 양산용 리소그래피 기술 및 초민감 유기/생체분자 센서에도 응용되고 있다. 본 논문에서는 마찰 특성의 조절부터 생체 분자의 탐침 기능까지 자기 조립 단분자층 기술이 발전되어 응용되고 있는 다양한 분야들에 대해 소개한다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1539-1542
• /
• 2005

Self-assembled monolayers (SAMs) formed by the adsorption of alkanethiols, $HS(CH_2)_nX$, where X is an organic functional group, onto gold surfaces have attracted widespread interest as templates for the fabrication of molecular and biomolecular microstructures. Previously photopatterning has been thought of as being restricted to the micron scale, because of the wellknown diffraction limit. So, we have explored a novel approach to nanofabrication by utilizing a femtosecond laser coupled to a near-field scanning optical microscope (NSOM).

• KIEE International Transactions on Electrophysics and Applications
• /
• 제5C권4호
• /
• pp.161-164
• /
• 2005

Viologen has been extensively investigated in the paper because their well-behaved electrochemistry has led to their use in a variety of theses, including the electron acceptor for the electric charge delivery mediation of the devices. It was formed monolayer in QCM by self-assembly method. We could know the adsorbed mass of viologen molecules from the frequency shift. We calculated that the adsorbed mass was about 196 [$ng/cm^2$]. We studied the electron transfer property of viologen by the cyclic voltammetry among the electrochemical process so we changed an anion like 0.1 M $NaClO_4$ and $Na_3PO_4$ electrolyte solution and investigated the interrelationship between scan rate and peak current when scan rates were increased twice.

• 분석과학
• /
• 제18권6호
• /
• pp.460-468
• /
• 2005

The biotin-avidin complex, as a model recognition system, has been constructed through N-hydroxysuccinimide(NHS) reaction on a variety of substrates such as a smooth Au film, electrochemically roughened Au electrode and chemically modified mica. Stepwise self-assembled monolayers (SAMs) of biotin-avidin system were characterized by surface-enhanced resonance Raman scattering (SERRS) spectroscopy, atomic force microscopy (AFM) and surface plasmon resonance (SPR). A strong SERRS signal of rhodamine tags labeled in avidin from the SAMs on a roughened gold electrode indicated the successful complex formation of stepwise biotin-avidin recognition system. AFM images showed the circular shaped avidin aggregates (hexamer) with ca. $60{\AA}$ thick on the substrate, corresponding to one layer of avidin. The surface coverage and concentration of avidin molecules were estimated to be 90% and $7.5{\times}10^{-12}mol/cm^2$, respectively. SPR technique allowed one to monitor the surface reaction of the specific recognition with high sensitivity and precision.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회A
• /
• pp.409-414
• /
• 2007

Wettability of solid surfaces with liquids is governed by the chemical properties and the microstructure of the surfaces. We report on the preparation of liquid-repellent surfaces using surface-attached monolayers of perfluorinated polymer molecules on porous silica substrates. A covalent attachment of the polymer molecules to the substrate is achieved by generation of the polymer chains through starting a surface-initiated radical-chain polymerization of a fluorinated monomer. To this, self-assembled monolayers of azo initiators are attached to silica substrates, which are used to kick off the polymerization reaction in situ. The growth of the fluorinated polymer films and the characterization of the obtained surfaces by surface plasmon spectroscopy, XPS, and contact angle measurements is described. It is shown that perfluorinated polymer films can be grown with controlled thicknesses on flat and even on porous silica surfaces, essentially without changing the surface roughness. The combination of the low surface energy coating and the surface porosity allows generation of materials which are both water and oil repellent.