• 한국전기전자재료학회논문지
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• 제11권1호
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• pp.33-40
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• 1998

The composite SiO$_2$/Si$_3$N$_4$/SiO$_2$(ONO) film formed by oxidation on nitride film has been widely studied as DRAM stacked capacitor multi-dielectric films. Load lock(L/L) LPCVD system by HF cleaning is used to improve electrical capacitance and to scale down of effective thickness for memory device, but is brings a new problem. Nitride film deposited using HF cleaning shows selective deposition on poly silicon and oxide regions of capacitor. This problem is avoidable by carpeting chemical oxide using $H_2O$$_2$cleaning before nitride deposition. In this paper, we study the limit of nitride thickness for abnormal oxidation and the initial deposition time for nitride deposition dependent on underlayer materials. We proposed an advanced fabrication process for stacked capacitor in order to avoid selective deposition problem and show the usefulness of nitride deposition using L/L LPCVD system by $H_2O$$_2$cleaning. The natural oxide thickness on polysilicon monitor after HF and $H_2O$$_2$cleaning are measured 3~4$\AA$, respectively. Two substrate materials have the different initial nitride deposition times. The initial deposition time for polysilicon is nearly zero, but initial deposition time for oxide is about 60seconds. However the deposition rate is constant after initial deposition time. The limit of nitride thickness for abnormal oxidation under the HF and $H_2O$$_2$cleaning method are 60$\AA$, 48$\AA$, respectively. The results obtained in this study are useful for developing ultra thin nitride fabrication of ONO scaling and for avoiding abnormal oxidation in stacked capacitor application.

• 청정기술
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• 제27권3호
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• pp.207-216
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• 2021

석탄화력발전소로부터 배출되는 질소산화물(NO + NO₂ = NO_x)은 NH₃를 환원제로 사용하여 선택적으로 환원시키는 SCR(selective catalytic reduction) 탈질촉매시스템에서 효과적으로 제거될 수 있다. 이 SCR 촉매공정에서 원소수은을 산화시켜 후속공정에서 제거하기 위하여 수많은 산화촉매들이 제안되었으나 MW급 석탄연소시설이나 상업운전 중인 석탄발전소 탈질시스템에서 원소수은 산화성능을 실증한 사례들은 매우 드물다. 실배가스에서 수행한 실증연구들을 심층적으로 조사·분석한 바는 기존 SCR 탈질촉매뿐 아니라 수은산화능을 향상시킨 신촉매의 원소수은 산화활성은 석탄연소, 실배가스 등의 특성에 따라 매우 복잡한 양상을 띤다는 점이다. 그럼에도 불구하고 석탄연소시설에 사용하는 원료탄, 탈질시스템과 실증조건이 원소수은 산화능에 가장 큰 영향을 미치는 핵심 요소이다. 특히, 원료탄에 함유된 할로겐 함량은 탈질촉매공정의 중요성을 넘어서는 것으로 보여진다. 석탄에 존재하는 대표적인 할로겐 성분은 Cl, Br과 F이고 이들 중에서 Cl이 지배적이며 다른 할로겐계처럼 염으로 존재하지만 석탄연소 과정에서 미량의 Cl₂와 함께 HCl로 전환된다. 이러한 HCl은 원소수은 산화에 있어서 강력한 산화제로 작용하지만 석탄마다 Cl 함량이 다르기 때문에 HCl 농도 또한 강하게 의존한다.

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.1-12
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• 2006

This work reviews the effects of catalyst formulation and exhaust gas composition on soot oxidation in CDPF (Catalytic Diesel Particulate Filter). DOC's (Diesel Oxidation Catalysts) have been loaded with Pt catalyst (Pt/$Al_{2}O_3$) for reduction of HC and CO. Recent CDPF's are coated with the Pt catalyst as well as additives like Mo, V, Ce, Co, Fe, La, Au, or Zr for the promotion of soot oxidation. Alkali (K, Na, Cs, Li) doping of metal catalyst tends to increase the activity of the catalysts in soot combustion. Effects of coexistence components are very important in the catalytic reaction of the soot. The soot oxidation rate of a few catalysts are improved by water vapor and NOx in the ambient. There are only a few reports available on the mechanism of the PM (particulate matter) oxidation on the catalysts. The mechanism of PM oxidation in the catalytic systems that meet new emission regulations of diesel engines has yet to be investigated. Future research will focus on catalysts that can not only oxidize PM at low temperature, but also reduce NOx, continuously self-cleaning diesel particulate filters, and selective catalysts for NOx reduction.

• 한국자동차공학회논문집
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• 제20권6호
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• pp.73-82
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• 2012

The main and side reactions of the three selective catalytic reduction (SCR) reactions with ammonia over a vanadium-based catalyst have been investigated using synthetic gas mixtures in the temperature range of $170{\sim}590^{\circ}C$. The three SCR reactions are standard SCR with pure NO, fast SCR with an equimolar mixture of NO and $NO_2$, and $NO_2$ SCR with pure $NO_2$. Vanadium based catalyst has no significant activity in NO oxidation to $NO_2$, while it has high activity for $NO_2$ decomposition at high temperatures. The selective catalytic oxidation of ammonia and the formation of nitrous oxide compete with the SCR reactions at the high temperatures. Water strongly inhibits the selective catalytic oxidation of ammonia and the formation of nitrous oxide, thus increasing the selectivity of the SCR reactions. However, the presence of water inhibits the SCR activity, most pronounced at low temperatures. In this study, the experimental results are analyzed by means of a dynamic one-dimensional isothermal heterogeneous plug-flow reactor (PFR) model according to the Eley-Rideal mechanism.

• 한국식품과학회지
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• 제33권1호
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• pp.40-44
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• 2001

이 연구에서는 TEMPO와 NaBr의 농도 및 온도가 옥수수 전분 내 1차 알코올기의 선택적 산화 반응에 미치는 영향을 조사하였다. TEMPO와 NaBr 및 온도의 수준이 증가함에 따라 반응 시간은 감소되는 경향을 나타내었다. TEMPO, NaBr 및 온도의 수준이 각각 1.7 mM/100 mM AGU, 100 mM/100 mM AGU 및 $14^{\circ}C$까지는 이들의 수준이 증가함에 따라 반응 시간이 급격히 단축되었으나, 이 이후의 수준부터는 단축정도가 적었다. 수율은 NaBr의 수준이 증가함에 따라 감소하였고, TEMPO와 온도는 수율에 큰 영향을 주지 않는 것으로 나타났다. 선택성은 NaBr의 농도와 온도가 각각 100 mM/100 mM AGU와 $6^{\circ}C$까지는 유의적인 차이를 보이지 않았으며, 이 이후의 수준부터 NaBr 및 온도가 증가함에 따라 유의적으로 감소하는 것으로 나타났다.

• 한국수소및신에너지학회논문집
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• 제14권2호
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• pp.155-170
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• 2003

$Cu-Ce/{\gamma}-Al_2O_3$ based catalysts were prepared and tested for selective oxidation of CO in a $H_2$-rich stream(1% CO, 1% $O_2$, 60% $H_2$, $N_2$ as balance). The effects of Cu loading and weight ratio(=Cu/(Cu+Ce)) upon both activity and selectivity were investigated upon the change in temperatures, It was also examined how the activity and selectivity of catalysts were varied with the presence of $CO_2$ and $H_2O$ in the reactant feed. Among the various Cu-Ce catalysts with different catalytic metal composition, Cu-Ce(4 : 16 wf%) /${\gamma}-Al_2O_3$ catalyst showed the highest activity(>$T_{99}$) and selectivities(50-80%) under wide range of temperatures($175-220^{\circ}C$). However, in the Cu-Ce(4 : 16 wt%)/ ${\gamma}-Al_2O_3$, the presence of $CO_2$ and $H_2O$ in the reactant feed decreased the activity and the maximum activity(>$T_{99}$) in terms of reaction temperature moved by about $25^{\circ}C$ toward higher temperature, the $T_{>99}$ window was seen between $210-230^{\circ}C$ (selectivity 50-75%). From $CO_2-/H_2O-TPD$, it can be concluded that the main cause for the decrease in catalytic activity may be attributed to the blockage of the active sites by competitive adsorption of water vapor and $CO_2$ with the reactant at low temperatures.

• 공업화학
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• 제2권2호
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• pp.155-164
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• 1991

o-자일렌 산화반응의 반응메카니즘과 촉매활성에 대한 산화바나듐의 산화상태 및 담체의 영향을 연구하였다. o-자일렌의 산화반응은 연계반응 메카니즘 및 병렬반응 메카니즘에 의해 동시에 진행되는 것으로 나타났다. 높은 산화수를 지닌 산화바나듐은 무수프탈산으로의 선택적 산화반응에 유리한 것으로 나타났고, 반면에 낮은 산화수의 경우는 무수프탈산의 CO 및 $CO_2$로의 완전 산화반응을 유발함을 알 수 있었다. 그리고 결정성 $V_2O_5$가 낮은 비결정성의 경우보다 부분 산화반응에 대한 높은 선택도를 나타내었다.

• Corrosion Science and Technology
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• 제6권4호
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• pp.193-197
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• 2007

It is well known that the development of Advanced High Strength Steels (AHSS) is very important for the automotive industry in order to improve fuel efficiency and the reduction of material costs. However, it is particularly difficult to improve the surface quality of AHSS because the high amount of Si, Al, Mn and Ti etc. in AHSS promote selective oxidation, resulting in surface defects. The reheating process in the hot strip mill would cause severe oxidation because it is carried out at elevated temperatures under aggressive environments. In this study a reheating furnace simulator was developed to investigate oxidation phenomena in the reheating process. The environmental gas for the reheating furnace was made by burning coke oven gas with air in the simulator. The air/fuel ratio is precisely controlled by MFC. Ti oxides are easily formed on grain boundaries and Mn and Si oxides are usually formed in inner grains near the steel surface with a small round shape.

• Bulletin of the Korean Chemical Society
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• 제33권8호
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• pp.2748-2752
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• 2012

Cr(III) and Co(III) complexes with acetylacetonate were anchored onto a mesoporous MCM-41 through Schiff condensation. The materials were characterized by XRD, FT-IR, BET, CHN and ICP techniques. Elemental analysis of samples revealed that one C=N bond was formed through Schiff condensation on MCM-41 surface. The catalysts were tested for the alcohol oxidations using t-butyl hydroperoxide (TBHP) and $H_2O_2$ as oxidant. The catalytic experiments were carried out at both room temperature and reflux condition. Various solvents such as dichloromethane, acetonitrile and water were examined in the oxidation of alcohols. Among the different solvents, catalytic activity is found more in acetonitrile. Further, the catalysts were recycled three times in the oxidation of alcohols and no major change in the conversion and selectivity is observed, which shows that the immobilized metal-acetylacetonate complexes are stable under the present reaction conditions.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2004년도 제28회 KOSCO SYMPOSIUM 논문집
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• pp.112-117
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• 2004

The effects of laser heating on soot formation and oxidation of propylene diffusion flames have been studied experimentally under nearly sooting conditions. The non-sooting flame can be converted to a sooting flame when the laser light heats up a flame at 7 mm height, while a sooting flame can be changed to a non-sooting flame when a flame is heated with laser light at flame height of 13 mm. The selective heating at the soot formation and/or oxidation region determines the sooting behavior of a diffusion flame. The increased soot/flame temperatures are most likely to be responsible for both the decreased and increased soot formation/oxidation.