• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.1
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• pp.33-40
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• 1998

The composite SiO$_2$/Si$_3$N$_4$/SiO$_2$(ONO) film formed by oxidation on nitride film has been widely studied as DRAM stacked capacitor multi-dielectric films. Load lock(L/L) LPCVD system by HF cleaning is used to improve electrical capacitance and to scale down of effective thickness for memory device, but is brings a new problem. Nitride film deposited using HF cleaning shows selective deposition on poly silicon and oxide regions of capacitor. This problem is avoidable by carpeting chemical oxide using $H_2O$$_2$cleaning before nitride deposition. In this paper, we study the limit of nitride thickness for abnormal oxidation and the initial deposition time for nitride deposition dependent on underlayer materials. We proposed an advanced fabrication process for stacked capacitor in order to avoid selective deposition problem and show the usefulness of nitride deposition using L/L LPCVD system by $H_2O$$_2$cleaning. The natural oxide thickness on polysilicon monitor after HF and $H_2O$$_2$cleaning are measured 3~4$\AA$, respectively. Two substrate materials have the different initial nitride deposition times. The initial deposition time for polysilicon is nearly zero, but initial deposition time for oxide is about 60seconds. However the deposition rate is constant after initial deposition time. The limit of nitride thickness for abnormal oxidation under the HF and $H_2O$$_2$cleaning method are 60$\AA$, 48$\AA$, respectively. The results obtained in this study are useful for developing ultra thin nitride fabrication of ONO scaling and for avoiding abnormal oxidation in stacked capacitor application.

• Clean Technology
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• v.27 no.3
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• pp.207-216
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• 2021

Major anthropogenic emissions of elemental mercury (Hg⁰) occur from coal-fired power plants, and the emissions can be controlled successfully using NH₃-SCR (selective catalytic reduction) systems with catalysts. Although the catalysts can easily convert the gaseous mercury into Hg²⁺ species, the reactions are greatly dependent on the flue gas constituents and SCR conditions. Numerous deNO_xing catalysts have been proposed for considerable reduction in power plant mercury emissions; however, there are few studies to date of elemental mercury oxidation using SCR processes with MW- and full-scale coal-fired boilers. In these flue gas streams, the chemistry of the mercury oxidation is very complicated. Coal types, deNO_xing catalytic systems, and operating conditions are critical in determining the extent of the oxidation. Of these parameters, halogen element levels in coals may become a key vehicle for obtaining better Hg⁰ oxidation efficiency. Such halogens are Cl, Br, and F and the former one is predominant in coals. The chlorine exists in the form of salts and is transformed to gaseous HCl with a trace amount of Cl₂ during the course of coal combustion. The HCl acts as a very powerful promoter for high catalytic Hg⁰ oxidation; however, this can be strongly dependent on the type of coal because of a wide variation in the chlorine contents of coal.

• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.1-12
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• 2006

This work reviews the effects of catalyst formulation and exhaust gas composition on soot oxidation in CDPF (Catalytic Diesel Particulate Filter). DOC's (Diesel Oxidation Catalysts) have been loaded with Pt catalyst (Pt/$Al_{2}O_3$) for reduction of HC and CO. Recent CDPF's are coated with the Pt catalyst as well as additives like Mo, V, Ce, Co, Fe, La, Au, or Zr for the promotion of soot oxidation. Alkali (K, Na, Cs, Li) doping of metal catalyst tends to increase the activity of the catalysts in soot combustion. Effects of coexistence components are very important in the catalytic reaction of the soot. The soot oxidation rate of a few catalysts are improved by water vapor and NOx in the ambient. There are only a few reports available on the mechanism of the PM (particulate matter) oxidation on the catalysts. The mechanism of PM oxidation in the catalytic systems that meet new emission regulations of diesel engines has yet to be investigated. Future research will focus on catalysts that can not only oxidize PM at low temperature, but also reduce NOx, continuously self-cleaning diesel particulate filters, and selective catalysts for NOx reduction.

• Transactions of the Korean Society of Automotive Engineers
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• v.20 no.6
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• pp.73-82
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• 2012

The main and side reactions of the three selective catalytic reduction (SCR) reactions with ammonia over a vanadium-based catalyst have been investigated using synthetic gas mixtures in the temperature range of $170{\sim}590^{\circ}C$. The three SCR reactions are standard SCR with pure NO, fast SCR with an equimolar mixture of NO and $NO_2$, and $NO_2$ SCR with pure $NO_2$. Vanadium based catalyst has no significant activity in NO oxidation to $NO_2$, while it has high activity for $NO_2$ decomposition at high temperatures. The selective catalytic oxidation of ammonia and the formation of nitrous oxide compete with the SCR reactions at the high temperatures. Water strongly inhibits the selective catalytic oxidation of ammonia and the formation of nitrous oxide, thus increasing the selectivity of the SCR reactions. However, the presence of water inhibits the SCR activity, most pronounced at low temperatures. In this study, the experimental results are analyzed by means of a dynamic one-dimensional isothermal heterogeneous plug-flow reactor (PFR) model according to the Eley-Rideal mechanism.

• Korean Journal of Food Science and Technology
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• v.33 no.1
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• pp.40-44
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• 2001

The effects of TEMPO and NaBr concentration, and temperature on the selective oxidation of primary alcohol groups in corn starch were examined. Reaction time decreased with the increased levels of TEMPO, NaBr and temperature up to 1.7 mM and 100 mM per 100 mM anhydroglucose unit(AGU) and $14^{\circ}C$, respectively, and did not change appreciably at the higher levels. Yield decreased with the increased NaBr levels and was not affected TEMPO level and the temperature. NaBr level and temperature showed negative effects on the selectivity. But the selectivity was not affected by NaBr level and temperature until 100 mM/100 mM AGU and $6^{\circ}C$. TEMPO had no effect on the selectivity significantly.

• Transactions of the Korean hydrogen and new energy society
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• v.14 no.2
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• pp.155-170
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• 2003

$Cu-Ce/{\gamma}-Al_2O_3$ based catalysts were prepared and tested for selective oxidation of CO in a $H_2$-rich stream(1% CO, 1% $O_2$, 60% $H_2$, $N_2$ as balance). The effects of Cu loading and weight ratio(=Cu/(Cu+Ce)) upon both activity and selectivity were investigated upon the change in temperatures, It was also examined how the activity and selectivity of catalysts were varied with the presence of $CO_2$ and $H_2O$ in the reactant feed. Among the various Cu-Ce catalysts with different catalytic metal composition, Cu-Ce(4 : 16 wf%) /${\gamma}-Al_2O_3$ catalyst showed the highest activity(>$T_{99}$) and selectivities(50-80%) under wide range of temperatures($175-220^{\circ}C$). However, in the Cu-Ce(4 : 16 wt%)/ ${\gamma}-Al_2O_3$, the presence of $CO_2$ and $H_2O$ in the reactant feed decreased the activity and the maximum activity(>$T_{99}$) in terms of reaction temperature moved by about $25^{\circ}C$ toward higher temperature, the $T_{>99}$ window was seen between $210-230^{\circ}C$ (selectivity 50-75%). From $CO_2-/H_2O-TPD$, it can be concluded that the main cause for the decrease in catalytic activity may be attributed to the blockage of the active sites by competitive adsorption of water vapor and $CO_2$ with the reactant at low temperatures.

• Applied Chemistry for Engineering
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• v.2 no.2
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• pp.155-164
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• 1991

The reaction mechanism and the effects of the oxidation state of vanadium oxide and of support on catalytic activity for the oxidation of o-xylene were investigated. The oxidation of o-xylene simultaneously proceeded through the consecutive and parallel mechanisms. The high valence of vanadium favored selective oxidation to phthalic anhydride, while the low valence caused complete oxidation of phthalic anhydride to CO and $CO_2$. Crystalline $V_2O_5$ showed better selectivity for partial oxidation rather than amorphous one.

• Corrosion Science and Technology
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• v.6 no.4
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• pp.193-197
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• 2007

It is well known that the development of Advanced High Strength Steels (AHSS) is very important for the automotive industry in order to improve fuel efficiency and the reduction of material costs. However, it is particularly difficult to improve the surface quality of AHSS because the high amount of Si, Al, Mn and Ti etc. in AHSS promote selective oxidation, resulting in surface defects. The reheating process in the hot strip mill would cause severe oxidation because it is carried out at elevated temperatures under aggressive environments. In this study a reheating furnace simulator was developed to investigate oxidation phenomena in the reheating process. The environmental gas for the reheating furnace was made by burning coke oven gas with air in the simulator. The air/fuel ratio is precisely controlled by MFC. Ti oxides are easily formed on grain boundaries and Mn and Si oxides are usually formed in inner grains near the steel surface with a small round shape.

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2748-2752
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• 2012

Cr(III) and Co(III) complexes with acetylacetonate were anchored onto a mesoporous MCM-41 through Schiff condensation. The materials were characterized by XRD, FT-IR, BET, CHN and ICP techniques. Elemental analysis of samples revealed that one C=N bond was formed through Schiff condensation on MCM-41 surface. The catalysts were tested for the alcohol oxidations using t-butyl hydroperoxide (TBHP) and $H_2O_2$ as oxidant. The catalytic experiments were carried out at both room temperature and reflux condition. Various solvents such as dichloromethane, acetonitrile and water were examined in the oxidation of alcohols. Among the different solvents, catalytic activity is found more in acetonitrile. Further, the catalysts were recycled three times in the oxidation of alcohols and no major change in the conversion and selectivity is observed, which shows that the immobilized metal-acetylacetonate complexes are stable under the present reaction conditions.

• 한국연소학회:학술대회논문집
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• 2004.06a
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• pp.112-117
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• 2004

The effects of laser heating on soot formation and oxidation of propylene diffusion flames have been studied experimentally under nearly sooting conditions. The non-sooting flame can be converted to a sooting flame when the laser light heats up a flame at 7 mm height, while a sooting flame can be changed to a non-sooting flame when a flame is heated with laser light at flame height of 13 mm. The selective heating at the soot formation and/or oxidation region determines the sooting behavior of a diffusion flame. The increased soot/flame temperatures are most likely to be responsible for both the decreased and increased soot formation/oxidation.