• Journal of the Semiconductor & Display Technology
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• v.10 no.2
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• pp.13-17
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• 2011

We have developed a new energy-consuming monitoring system that has made it possible to measure the energy consumption of a gas scrubber, one of semiconductor processing equipments, and installed this system to the gas scrubber under operating at a manufacture site. Using this system, we have measured consumptions of electric power and processing gas consumed at standby to operating mode. In case of the gas scrubber, processing gas flows continuously into it at standby and operating mode. Therefore, if the electric power has been supplied, the processing gas can flows into the device for 24 hours. Moreover, at operating of gas scrubber, the amount of electricity consumption is 5 kWh. At Standby of gas scrubber, it spends 3kwh. It is certain that the energy consumption is greater at operating mode than at standby mode. The carbon emission rates from 24 hour gas scrubber operation are 236 $kgCO_2$/day of $N_2$, 57 $kgCO_2$/day of electric power and 0.001 $kgCO_2$/day of cooling water. Most of carbon is emitted from $N_2$ gas and electric power consumption.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.3
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• pp.339-345
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• 2010

There have been a number of efforts to satisfy national emission regulations and reduce the amount of emitted air pollutants. There are several air pollution control devices, however, only wet scrubber is efficiently used to remove particulate matters and gaseous pollutants, even if it has minimum collection efficiency in the particle size range of $0.1{\sim}1{\mu}m$. This study aimed to improve the collection efficiency of a spray tower type scrubber by introducing an electrospray system with two-flow nozzle. We found that the collection efficiency of a spray tower type scrubber was similar to that of a conventional wet scrubber. However, installation of an electrospray system in the scrubber resulted in drastic further improvement of collection efficiency comparing to that of a conventional scrubber, which is 26%, 35.2%, and 45.1% at the liquid to gas ratio of 0.26 $L/m^3$ and 19.9%, 35.1%, and 42.5% at 0.34 $L/m^3$ for the applied voltage of -30 kV, -35 kV, and -40 kV, respectively. Therefore, we found that the introduction of an electrospray system is very effective to improve the collection efficiency of a spray tower type scrubber.

• Clean Technology
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• v.23 no.1
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• pp.34-41
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• 2017

The scrubber wastewater should be replaced frequently to maintain efficiency. Most chemical companies consign scrubber wastewater, because there are no wastewater treatment facilities. So scrubber wastewater is not frequently replaced because of high treatment cost. For this reason, the most scrubber exhaust gas exceeds the odor emission limit or has a phenomenon that the odor intensity of exhaust gas becomes higher. Therefore we have developed a scrubber wastewater cleaning system consisting of filtration and adsorption processes. The scrubber wastewater cleaning system was applied two chemical companies. We evaluated the water quality and odor reduction effect before and after system application. As a result, scrubber wastewater quality improved by 50% or more, odor reduction efficiency of scrubber exhaust gas improved by 20% or more. And the total operating costs of the scrubber could be reduced by 40% or more.

• Nuclear Engineering and Technology
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• v.54 no.12
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• pp.4585-4600
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• 2022

A pool scrubber is often used as a wet-type design to mitigate the consequence of a severe nuclear accident. While studies indicated higher decontamination performance of a deeper pool, utilizing a very tall pool can be problematic due to potential structural stability and water backflow issues. This study proposes, as an alternative to a single pool system, a pool scrubber system composed of serially connected multiple pools with lower heights. Since large fraction of aerosol removal takes place in the injection region, serially connected pool scrubber system is expected to enhance the overall decontamination capability of a pool scrubber system. To support the analysis of the proposed system's decontamination capability, a new computer model was developed in the study to describe the bubble size dependent effect on aerosol removal including the effect of pool residence time. The accuracy of the new model was examined against experimental data for its validation. The proposed scrubber system composed of serially connected multiple shorter pools is found to have much improved decontamination performance over the current single pool system design.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.6
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• pp.744-751
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• 2007

Wet scrubber is widely used to remove toxic gaseous contaminants in various industries such as semi-conductor industry, display manufacturing industry and so on. In this study, to optimize a packed bed scrubber as one of typical wet scrubber size while keeping its performance, four different packing materials were investigated at different air flow rates, liquid-gas ratios and pH values. Ammonia, hydrochloric acid and hydrofluoric acid were used as test gases to characterize the scrubber performance. Gas removal efficiency increased as the packing size decreased, which resulted in the increase of specific surface area. The increase of air flow rate led to the decrease of gas removal efficiency, while the increase of liquid-gas ratio led to the increase of gas removal efficiency. For the case of $NH_3$ gas, lower pH, and for the cases of HCl and HF, higher pH contributed to higher gas removal efficiency. Gas removal efficiency of a wet scrubber increased in the order of HCl < $NH_3$ < HF according to its water solubility.

• Asian Journal of Atmospheric Environment
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• v.8 no.2
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• pp.89-95
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• 2014

There have been a lot of efforts to keep permissible emission standards and to reduce the amount of emitted air pollutants. There are several air pollution control equipments, however, wet scrubber is used to remove particulate matters and gaseous pollutants simultaneously, even if it has low collection efficiency in the particle size less than $5.0{\mu}m$. To overcome this problem, we introduced a spray tower scrubber with an electrospray system which a high voltage was indirectly applied. We found that collection efficiency of fine particles in the electrospray system was improved by increasing electrical field strength and the ratio of liquid-gas flow rate (from 41% to 84% for $0.3{\mu}m$ particles). In addition, a number of small droplets generated from an electrospray system led high collection efficiency, resulting from electrostatic attraction between droplets and particles and higher collision frequency. Therefore, we can conclude that the introduction of an electrospray system is quite effective to increase the particle removal efficiency of a spray tower scrubber.

• Nuclear Engineering and Technology
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• v.45 no.2
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• pp.203-210
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• 2013

The objective of this conducted research is to study the iodine removal efficiency in a self-priming venturi scrubber for submerged and non-submerged operating conditions experimentally and theoretically. The alkaline solution is used as an absorbent, which is prepared by dissolving sodium hydroxide (NaOH) and sodium thiosulphate ($Na2S_2O_3$) in water to remove the gaseous iodine ($I_2$) from the gas. Iodine removal efficiency is examined at various gas flow rates and inlet concentrations of iodine for submerged and non-submerged operating conditions. In the non-submerged venturi scrubber, only the droplets take part in iodine removal efficiency. However, in a submerged venturi scrubber condition, the iodine gas is absorbed from gas to droplets inside the venturi scrubber and from bubbles to surrounding liquid at the outlet of a venturi scrubber. Experimentally, it is observed that the iodine removal efficiency is greater in the submerged venturi scrubber as compare to a non-submerged venturi scrubber condition. The highest iodine removal efficiency of $0.99{\pm}0.001$ has been achieved in a submerged self-priming venturi scrubber condition. A mathematical correlation is used to predict the theoretical iodine removal efficiency in submerged and non-submerged conditions, and it is compared against the experimental results. The Wilkinson et al. correlation is used to predict the bubble diameter theoretically whereas the Nukiyama and Tanasawa correlation is used for droplet diameter. The mass transfer coefficient for the gas phase is calculated from the Steinberger and Treybal correlation. The calculated results for a submerged venturi scrubber agree well with experimental results but underpredicts in the case of the non-submerged venturi scrubber.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2002.05a
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• pp.75-82
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• 2002

The effects of intake mixture temperature on performance and exhaust emissions under four kinds of engine loads were experimentally investigated by using a four-cycle four-cylinder, swirl chamber type, water-cooled diesel engine with scrubber EGR system operating at three kinds of engine speeds. The purpose of this study is to develop the scrubber exhaust gas recirculation(EGR) control system for reducing $NO_x$ and soot emissions simultaneously in diesel engines. The EGR system is used to reduce NOx emissions. And a novel diesel soot-removal device with a cylinder-type scrubber which has five water injection nozzles is specially designed and manufactured to reduce soot contents in the recirculated exhaust gas to the intake system of the engine. The influences of cooled EGR and water injection, however, would be included within those of scrubber EGR system. In order to study the effect of intake mixture temperature, a intake mixture heating device which has five heating coils is made of a steel drum. It is found that the specific fuel consumption rate is considerably elevated by the increase of intake mixture temperature, and that NOx emissions are markedly decreased as EGR rates are increased and intake mixture temperature is dropped, while soot emissions are increased with increasing EGR rates and intake mixture temperature.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.2
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• pp.315-331
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• 2004

The effects of intake mixture temperature on performance and exhaust emissions under four kinds of engine loads were experimentally investigated by using a four-cycle. four-cylinder. swirl chamber type. water-cooled diesel engine with scrubber EGR system operating at three kinds of engine speeds. The purpose of this study is to develop the scrubber exhaust gas Recirculation (EGR) control system for reducing $\textrm{NO}_{x}$ and soot emissions simultaneously in diesel engines. The EGR system is used to reduce $\textrm{NO}_{x}$ emissions. And a novel diesel soot-removal device of cylinder-type scrubber with five water injection nozzles is specially designed and manufactured to reduce soot contents in the recirculated exhaust gas to the intake system of the engine. The influences of cooled EGR and water injection. however. would be included within those of scrubber EGR system. In order to survey the effects of cooled EGR and moisture on $\textrm{NO}_{x}$ and soot emissions. the intake mixtures of fresh air and recirculated exhaust gas are heated up using a heater with five heating coils equipped in a steel drum. It is found that intake and exhaust oxygen concentrations are decreased, especially at higher loads. as EGR rate and intake mixture temperature are increased at the same conditions of engine speed and load. and that $\textrm{NO}_{x}$ emissions are decreased. while soot emissions are increased owing to the decrease in intake and exhaust oxygen concentrations and the increase in equivalence ratio. Thus ond can conclude that $\textrm{NO}_{x}$ and soot emissions are considerably influenced by the cooled EGR.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.100-111
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• 2002

The effects of intake mixture temperature on performance and exhaust emissions under four kinds of engine loads were experimentally investigated by using a four-cycle, four-cylinder, swirl chamber type, water-cooled diesel engine with scrubber EGR system operating at three kinds of engine speeds. The purpose of this study is to develop the scrubber exhaust gas recirculation(EGR) control system for reducing $NO_x$ and soot emissions simultaneously in diesel engines. The EGR system is used to reduce $NO_x$ emissions. And a novel diesel soot-removal device of cylinder-type scrubber with five water injection nozzles is specially designed and manufactured to reduce soot contents in the recirculated exhaust gas to the intake system of the engine. The influences of cooled EGR and water injection, however, would be included within those of scrubber EGR system. In order to survey the effect of intake mixture temperature on performance and exhaust emissions, the intake mixtures of fresh air and recirculated exhaust gas are heated by a heating device with five heating coils made of a steel drum. It is found that the specific fuel consumption rate is considerably elevated by the increase of intake mixture temperature, and that $NO_x$ emissions are markedly decreased as EGR rates are increased and intake mixture temperature is dropped, while soot emissions are increased with increasing EGR rates and intake mixture temperature. Thus one can conclude that the performance and exhaust emissions are considerably influenced by the cooled EGR.