Development of an Energy MonItorIng System for Gas Scrubber |
Kim, Sun-Man
(Hanyang UnI. Graduated School)
Im, Ik-Tea (Chonbuk Nat. UnI Mech. DesIgn Eng.) Ahn, Kang-Ho (Hanyang UnI. Dept. of Mech. Eng.) |
1 | SEMI S23-0708 Guide for Conservation of Energy, Utilities and Materials used by Semiconductor manufacturing Equipment. |
2 | 국가 LCI 데이터베이스정보망. |
3 | 에너지관리공단 연도별 전력수급현황. |