• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.79-83
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• 2001

In order to compare the barrier properties of Ta-N/Si(001) with those of Ta-N/Ta/Si(001), we studied structural properties of films grown by RF magnetron sputtering with various $Ar/N_2$ ratios. To evaluate the barrier properties, the samples were annealed in a vacuum chamber. Ex-situ x-ray scattering measurements were done using an in-house x-ray system. With increasing nitrogen ratio in Ta-N/Si(001), the barrier property of Ta-N/Si(001) was enhanced, finally failed at $750^{\circ}C$ due to the crystallization and silicide formation. Compared with Ta-N/Si(001), Ta-N/Ta/Si(001) forms silicides at $650^{\circ}C$. However it does not crystallize even at $750^{\circ}C$. With increasing nitrogen composition in Ta-N/Ta/Si(001), the formation of tantalum silicide was reduced and the surface roughness was improved. To observe the surface morphology of Ta-N/Ta/Si(001) during annealing, we performed an in-situ x-ray scattering experiment using synchrotron radiation of the 5C2 at Pohang Light Source(PLS). Addition of Ta layer between Ta-N and Si(001) improved the surface morphology and reduced the surface degradation at high temperatures. In addition, increasing $N_2/Ar$ flow ratio reduced the formation of tantalum silicide and enhanced the barrier properties.

• 한국표면공학회지
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• 제29권5호
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• pp.399-406
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• 1996

The orientational cross-over phenomena in an RF sputtering growth of TiN films were studied in an in-situ, real-time synchrotron x-ray scattering experiment. For the films grown with pure Ar sputtering gas, the cross-over from the more strained (002)-oriented grains to the less strained (111)-oriented grains occurred as the film thickness was increased. As the sputtering power was increased, the cross-over thickness, at which the growth orientation changes from the <002> to the <111> direction, was decreased. The addition of $N_2$ besides Ar as sputtering gas suppressed the cross-over, and consequently resulted in the (002) preferred orientation without exhibiting the cross-over. We attribute the observed cross-over phenomena to the competition between the surface and the strain energy. The x-ray powder diffraction, the x-ray reflectivity, and the ex-situ AFM surface topology study consistently suggest that the microscopic growth front was in fact always the (002) planes. In the initial stage of growth, the (002) planes were aligned to the substrate surface to minimize the surface energy. At later stages, however, the (002) growth front tilted away from the surface by about $60^{\circ}$ to relax the strain, which caused the cross-over of the preferred growth direction to the <111> direction.

• 한국방사선학회논문지
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• 제11권7호
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• pp.663-669
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• 2017

진단목적의 방사선 의료 영상의 활용의 증가에 따라 환자의 피폭 선량 증가와 의료영상의 진단적 가치 저하에 기여하는 산란선의 관리 및 저감을 위한 연구는 필수적이라 할 수 있다. 이에 본 연구에서는 관전압 증가에 따른 산란선의 증감이 영상 화질에 미치는 영향을 분석하였다. 이를 위해 ANSI 흉부 팬텀을 이용하여, 관전압 변화에 따른 산란선 발생 비율을 측정하고, 산란선의 발생에 따른 화질 영향을 RMS(Root Mean Square) 입상성 평가, RSD(Relative Standard Deviation) 및 NPS(Noise Power Spectrum) 분석을 통해 고찰하였다. 관전압 증가에 따른 산란선 발생비율은 73 kV 관전압에서 48.8%, 93 kV 관전압 인가시 80.1%로 점차 증가하는 것으로 확인되었다. 관전압 증가에 따른 산란선 증가의 화질 영향을 분석하기 위한 RMS 분석 결과, 관전압 증가에 따른 RMS 값이 증가하는 것으로 나타나 영상의 입상성이 떨어지는 결과로 도출되었다. 공간주파수 2.5 lp/mm에서의 NPS 값 또한 관전압 73 kV 인가에 비해 93kV 관전압 증가시 20% 정도 영상의 잡음이 증가하는 것으로 나타났다. 본 연구를 통하여 관전압 변화에 따른 산란선 발생이 화질에 미치는 영향을 확인할 수 있었으며, 이러한 연구 결과는 의료영상 품질 개선을 위한 연구의 기초 자료로서 활용 가능할 것으로 판단된다.

• 대한방사선기술학회지:방사선기술과학
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• 제43권5호
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• pp.375-382
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• 2020

PET/CT is a medical equipment that detects 0.511 MeV of gamma rays. The radiation workers are inevitably exposed to ionizing radiation in the process of handling the isotope. Accordingly, PET/CT workers use syringe shields made of lead and tungsten to protect their hands. However, lead and tungsten are known to generate very high scattering particles by interacting with gamma rays. Therefore, in this study, we tried to find out the effect on the scattering particles emitted from the syringe shield. In the experiment, first, the exposure dose to the hand (Rod phantom) was evaluated according to the metal material (lead, tungsten, iron, stainless steel) using Monte Carlo simulation. The exposure dose was compared according to whether or not plastic is attached. Second, the exposure dose of scattering particles was measured using a dosimeter and lead. As a result of the experiment, the shielding rate of plastics using the Monte Carlo simulation showed the largest difference in dose of about 40 % in lead, and the lowest in iron, about 15 %. As a result of the dosimeter test, when the plastic tape was wound on lead, it was found that the reduction rate was about 15 %, 28 %, and 39 % depending on the thickness. Based on the above results, it was found that 0.511 MeV of gamma ray interacts with the shielding tool to emit scattered rays and has a very large effect on radiation exposure. However, it was considered that the scattering particles could be sufficiently removed with plastics with a low atomic number. From now on, when using high-energy radiation, the shielding tool and the skin should not be in direct contact, and should be covered with a material with a low atomic number.

• Applied Microscopy
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• 제33권4호
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• pp.251-259
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• 2003

물질의 구조 특성파악에 많이 사용되는 X-선과 전자선에 대한 소스 원을 살펴보고 물질과의 반응을 atomic scattering factor의 항으로 설명하였다. 물질과의 회절을 역 격자 공간에서의 Ewald sphere로 설명하고 유한 크기의 소스 파장과 검출기의 효과도 함께 고려하였다.

• 대한전기학회논문지
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• 제41권1호
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• pp.89-94
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• 1992

In this paper, the static limit of Helmholtz equation is discussed for the analysis of wave scattering in a wave scattering in a waveguide. Boundary integral equation method is used to formulato the scattering process in the exterior of the scatterer and finite element method in the interior of the scatterer. And hybrid ray-mode method is used to provide the Green's function in the waveguide. The proposed algorithm is applied algarithm is applied to a sample problem with arbitrary scatterer in a waveguide. The results are compared with those of static analysis.

• 한국결정학회지
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• 제4권1호
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• pp.36-41
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• 1993

BaTi-에톡사이드로 부터 유도된 솔의 옥소폴리머에 대하여 저각 X선 산란을 이용하여 조사하였다. NH, OH를 사용하거나 혹은 촉매제가 없이 얻어진 솔에서 옥소폴리머 구조의 성장은 비슷하다. 이 솔들의 선회반경은 1.66-2.08nm이다. 이들은 차원 값이 1.6인 질량 프락탈의 거동을 따르며 이 거동은 NH40H 첨가량에 는 거의 무관하다. CHSCOOH를 촉매로 사용하여 얻은 솔의 선회반경은 2.87-3.67nm로서 염기성 촉매 혹은 촉매없이 얻은 솔에 비해 보다 큰 값을 가진다 이들 솔의 산란곡선은 중간 Q 영역에서 비슷하며 프락탈 차원은 1.8이다. 염기성 혹은 중성 수화조건으로 부터 얻 은 솔의 윽소폴리머는 짧은 사슬형 구조를 가질 것이나 산성 수화조건에서는 이들은 보다 분기되고 길어지는 사슬형으로 성장되는 경향을 가진다.

• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.953-957
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• 2002

Single crystal 3C-SiC (cubic silicon carbide) thin-films were deposited on Si(100) wafer up to the thickness of 4.3 ${\mu}{\textrm}{m}$ by APCVD (atmospheric pressure chemical vapor deposition) method using HMDS (hexamethyildisilane; ｛CH$_{3}$｝$_{6}$ Si$_{2}$) at 135$0^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC film was 4.3 ${\mu}{\textrm}{m}$/hr. The 3C-SiC epitaxial film grown on Si(100) wafer was characterized by XRD (X-ray diffraction), AFM (atomic force microscopy), RHEED (reflection high energy electron diffraction), XPS (X-ray photoelecron spectroscopy), and Raman scattering, respectively. Two distinct phonon modes of TO (transverse optical) near 796 $cm^{-1}$ / and LO (longitudinal optical) near 974$\pm$1 $cm^{-1}$ / of 3C-SiC were observed by Raman scattering measurement. The heteroepitaxially grown film was identified as the single crystal 3C-SiC phase by XRD spectra (2$\theta$=41.5。).).

• Bulletin of the Korean Chemical Society
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• 제34권10호
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• pp.2942-2946
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• 2013

Nanostructured Ag thin films could be facilely prepared by soaking glass substrates in ethanolic solutions containing $Ag_2O$ powders at an elevated temperature. The formation of zero-valent Ag was corroborated using X-ray diffraction and X-ray photoelectron spectroscopy. The deposition of Ag onto a glass substrate was readily controlled simply by changing the reaction time. Due to the aggregated structures of Ag, the surface-enhanced Raman scattering spectra of benzenethiol could be clearly identified using the Ag-coated glass. The enhancement factor at 514.5 nm excitation estimated using benzenethiol reached $1.0{\times}10^5$ while the detection limit of rhodamine 6G was found to be as low as $1.0{\times}10^{-13}$ M. Since this one-pot fabrication method is eco-friendly and is suitable for the mass production of diverse Ag films, it is expected to play a significant role in the development of surface plasmon-based analytical devices.

• Elastomers and Composites
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• 제54권2호
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• pp.156-160
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• 2019

The changes in the dispersion of carbon black in liquid polyisoprene under shear flow with time have been investigated by time-resolved ultra small-angle X-ray scattering (USAXS) method. The analyses of USAXS profile immediately after the start of shear flow clarified that the aggregates of carbon black with a mean radius of gyration of 14 nm and surface fractal dimension of 2.5 form the fractal network structure with mass-fractal dimension of 2.9. After the application of the shear flow, the scattering intensity increases with time at the observed whole entire q region, and then the a shoulder appears at $q=0.005nm^{-1}$, indicating that the agglomerate is broken and becomes smaller by shear flow. The analysis by the Unified Guinier/Power-law approach yielded several characteristic parameters, such as the sizes of aggregate and agglomerate, mass-fractal dimension of agglomerate, and surface fractal dimension of the primary particle. While the mean radius of gyration of the agglomerate decreases with time, the mean radius of gyration of the aggregate, mass fractal dimension, and surface fractal dimension don't change with time, indicating that the aggregates peel off the surface of the agglomerate.