• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.533-536
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• 2001

Single crystal cubic silicon carbide(3C-SiC) thin film were deposited on Si(100) substrate up to a thickness of $4.3{\mu}m$ by APCVD(atmospheric pressure chemical vapor deposition) method using hexamethyildisilane(HMDS) at $1350^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like. The growth rate of the 3C-SiC films was $4.3{\mu}m/hr$. The 3C-SiC epitaxical layers on Si(100) were characterized by XRD(X-ray diffraction), raman scattering and RHEED(reflection high-energy electron diffraction), respectively. The 3C-SiC distinct phonons of TO(transverse optical) near $796cm^{-1}$ and LO(longitudinal optical) near $974{\pm}1cm^{-1}$ were recorded by raman scattering measurement. The deposition films were identified as the single crystal 3C-SiC phase by XRD spectra($2{\theta}=41.5^{\circ}$). Also, with increase of films thickness, RHEED patterns gradually changed from a spot pattern to a streak pattern.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.533-536
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• 2001

Single crystal cubic silicon carbide(3C-SiC) thin film were deposited on Si(100) substrate up to a thickness of 4.3 $\mu\textrm{m}$ by APCVD(atmospheric pressure chemical vapor deposition) method using hexamethyildisilane(HMDS) at 1350$^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like. The growth rate of the 3C-SiC films was 4.3 $\mu\textrm{m}$/hr. The 3C-SiC epitaxical layers on Si(100) were characterized by XRD(X-ray diffraction), raman scattering and RHEED(reflection high-energy electron diffraction), respectively The 3C-SiC distinct phonons of TO(transverse optical) near 796 cm$\^$-1/ and LO(longitudinal optical) near 974${\pm}$1 cm$\^$-1/ were recorded by raman scattering measurement. The deposition films were identified as the single crystal 3C-SiC phase by XRD spectra(2$\theta$=41.5$^{\circ}$). Also, with increase of films thickness, RHEED patterns gradually changed from a spot pattern to a streak pattern

• 대한기계학회논문집A
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• 제26권11호
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• pp.2457-2465
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• 2002

Numerical modeling of a nondestructive testing system plays an important role in many aspects of quantitative nondestructive evaluation (QNDE). The ultimate goal of a model is to predict test results for a specific flaw in a material. Thus, in ultrasonic testing, a system model should include the transducer, its radiation pattern, the beam reflection and propagation, and scattering from defects. In this paper attention is focused on the scattering model and the scattered fields by defects are observed by an elastodynamic boundary element method. Flaw types addressed are void-like and crack-like flaws. When transverse ultrasonic waves are obliquely incident on the flaw, the angular distribution of far-field scattered displacements are calculated and presented in the form of A-scan mode. The component signals obtained from each scattering problem are identified and their differences are addressed. The numerical results are also compared with those obtained by high frequency approximate solutions.

• 한국통신학회논문지
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• 제18권10호
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• pp.1454-1460
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• 1993

근접하고 있는 원통형 유전체 실린더들에 의한 산란전계를 수하였다. 산란체들 사이에서의 다중산란을 도려하고 실린더 표면에 경계조건을 적용하여 반복절차에 의해 산란계수를 계산하였다. M개의 실린더 중 i번째 실린더와 나머지 실린더들 사이에서의 상호영향을 반복절차에 의해 계산하여 i번째 실린더에서의 산란전계를 구하였다. 원통형 실린더가 아닌 임의의 단면을 가지는 실린더형 산란체에 대하서는 반지름이 작은 원통형 실린더들에 의해 모델링을 하였다. 그 실린더들에 의해 만들어지는 무한차원의 식들에 대해 적당한 절단을 하고 계산하여 산란계수의 값을 구할 수 있었다. 얻어진 산란계수에 의해 산란전계를 구하고 기존의 논문결과들과 비교하였다.

• Transactions on Electrical and Electronic Materials
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• 제3권3호
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• pp.1-7
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• 2002

The developed patterns by direct writing of electron beam are measured by AFM, FESEM and optical profiler of WYKO NT3300. From different measurement methods, the measured linewidths of the patterns are shown a little bit wider than designed pattern size due to electrons scattering effect during direct writing of electron beam. The optimized conditions of these experiments are suggested and explained for the forming of structures below 0.1 ㎛ dimension size. Because of electron scattering effects from the different under layers such as Si, Si$_3$N$_4$ and aluminum, the developed pattern size is also influenced by the accelerated energy of electrons, dose, resist and soft and hard bake conditions in PMMA. The distributions of electron beam and calculations of backscattering coefficient are demonstrated by Monte Carlo simulation. From the measured results, the developed linewidth of PMMA/Al /silicon is shown a little bit wider than that of PMMA/Si$_3$N$_4$/silicon structure due to the backscattering effects.

• 대한기계학회논문집A
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• 제35권1호
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• pp.107-114
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• 2011

본 논문에서는 나노 래핑 표면의 형상과 레이저산란 패턴 사이의 실험적 모델링에 관한 연구를 하였다. 우선, 반사표면에서 나타나는 산란광 속성들을 고찰하여 암시야 기반의 레이저산란 검사 메커니즘을 구성하였다. 이 메커니즘을 이용한 레이저산란 패턴 분석의 경우, 나노 래핑 표면 형상으로부터 산란된 레이저산란 성분은 불규칙하게 사선형태로 교차됨을 알 수 있다. 또한, 실험 계획법을 기반으로 도출된 매개변수로 적용된 최적의 레이저산란 영상에서 나노 래핑 표면 거칠기와 레이저산란 성분 사이의 상관관계를 회귀분석법을 이용하여 수학적 모델링을 시도 하였다. 이 모델의 검증을 위해 나노 래핑 표면 3 종류의 거칠기에 대해 50 번의 반복실험을 수행한 결과, 제시된 수학적 모델은 실제 거칠기 값에 근접하게 추정할 수 있음을 보였다.

• 한국음향학회지
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• 제19권4호
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• pp.93-100
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• 2000

수중 능동소나에 의해 표적을 분류하는데 있어 표적신호의 특징파라미터는 매우 중요하다. 광대역이고 상관성이 높은 두 개의 펄스가 시간 T의 간격으로 분리되어 있을 때, 스펙트럼에서 리플간의 1/T Hz에 해당하는 TSP, 즉 피치 성분을 가진다. 음향산란 실험에 사용된 축소표적신호 또한 이러한 TSP 특징을 잘 반영하고 있다. 본 논문에서는 각 표적신호의 특징에 해당하는 TSP 정보를 FFT를 이용하여 효과적으로 추출하였다. 네 개의 표적과 각 표적의 자세각에 따라 추출된 TSP 특징파라미터를 패턴인식 기법에 적용하여 표적을 분류하고 각 표적의 특징을 분석하였다.

• International Journal of Aeronautical and Space Sciences
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• 제14권4호
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• pp.398-407
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• 2013

Optical tomography was used to measure the pattern of spray cross-section. The maximum-likelihood estimation (MLE) algorithm was used to reconstruct the spray cross-section from the measured transmission rate of the spray. A swirl-type injector was used to form an optically dense spray, and the test was carried out in a high-pressure chamber, to control the pressure condition of the test site. Before the experiment, the reliability of the MLE-based reconstruction algorithm was verified, by comparing it with a conventional filtered back projection reconstruction (FBP) method. The MLE algorithm showed superior reconstruction of the image. In the spray patternation experiment, the results of the optical tomography and optical line patternator, which uses Mie scattering signal information, were compared. While measuring the cross-section of optically dense spray, the intensity of the scattering signal had attenuated to an uncorrectable level, which led to incorrect spray pattern measurement by the optical line patternator. However, reliable results were obtained by optical tomography, under the same condition. Finally, the pattern of the optically dense spray was measured at various chamber pressures, of up to 3 MPa. As the chamber pressure increased, the hollow cone-shaped swirl spray shrank, and the attenuation coefficient value of the inner region increased.

• 반도체디스플레이기술학회지
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• 제8권2호
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• pp.1-10
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• 2009

This study describes the electron beam lithography pattern fabrication using the proximity effect correction. When electron beam exposes into electron beam resist, the beam tends to spread inside the substance (forward scattering). And the electron beam reflected from substrate spreads again (back scattering). These two effects influence to distribution of the energy and give rise to a proximity effect while a small pattern is generated. In this article, an electron energy distribution is modeled using Gaussian shaped beam distribution and those parameters in the model are computed to solidify the model. The proximity effect is analyzed through simulations and appropriate corrections to reducing the proximity effect are suggested. It is found that the proximate effect can be reduced by adopting schemes of dose adjustment, and the optimal dose is determined through simulations. The proposed corrected proximity effect correction is proved by experiments.

• 한국가시화정보학회지
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• 제3권2호
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• pp.3-13
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• 2005

The optical patterantor provides the high resolution and quantitative information of the spray. Fuel distribution and Sauter Mean Diameter (SMD) can be measured from fluorescence and Mie-scat-tering images. To correct the attenuation of the laser beam and signal in dense spray region, the method to find the geometric mean of the signal intensities obtained from two cameras was evaluated and verified in a solid-cone spray. In high pressure environment, the increased number density of the droplets cause multiple scattering. The optical patternation technique using a laser beam instead of a laser sheet was applied to minimize the multiple scattering problem. The pattern of a coaxial spray was changed from hollow-cone to solid-cone shape, and the spray angle was reduced as the ambient pressure increased from 0.1 to 4.0 MPa.