• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.197-197
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• 1999

Gate oxide 의 두께 감소는 gate의 캐패시턴스를 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압 동작을 가능하게 하기 때문에 gate oxide 두께는 MOS 공정 세대가 진행되어감에 따라 계속 감소할 것이다. 이러한 얇은 산화막은 device design에 명시된 두께의 특성을 나타내야 한다. Gate oxide의 두께가 작아질수록 gate oxide와 crystalline silicon간의 계면효과가 박막의 두께의 결정에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵다. 이러한 영향과 계측방법에 따라서 두께 계측의 차이가 나타난다. XTEM은 사용한 parameter에, Ellipsometer는 refractive index에, MEIS(Medium) Energy Ion Scattering)은 에너지 분해능에, Capacitor-Voltage 측정은 depletion effect에 의해 영향을 받는다. 우리는 계면의 원자분해능 분석에 통상 사용되어온 High Resolution TEM을 이용하여 약 30~70$\AA$ SiO2층의 두께와 계면 구조에 대한 분석을 하여 이를 MEIS와 0.015nm의 고감도를 가진 SE(Spectroscopy Ellipsometer), C-V 측정 결과와 비교하여 가장 좋은 두께 계측 방법을 찾고자 한다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.11
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• pp.2995-3002
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• 1995

The cooling problem of the hot internal pipe flow has been investigated. Simultaneous conduction, convection, and radiation were considered with azimuthally varying convective heat loss at the pipe wall. A complex, nonlinear integro-differential radiative transfer equation was solved by the discrete ordinates method (or called S$_{N}$ method). The energy equation was solved by control volume based finite difference technique. A parametric study was performed by varying the conduction-to-radiation parameter, optical thickness, and scattering albedo. The results have shown that initially the radiatively active medium could be more efficiently cooled down compared with the cases otherwise. But even for the case with dominant radiation, as the medium temperature was lowered, the contribution of conduction became to exceed that of radiation.n.

• Current Applied Physics
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• v.18 no.11
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• pp.1338-1344
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• 2018

Band parameters and superconductivity of yttrium hypocarbide ($Y_2C$) have been investigated. The computations are performed using first-principles pseudopotential method within a generalized gradient approximation. The equilibrium lattice parameters have been determined and compared with experiment. Moreover, the material of interest is found to be stiffer for strains along the a-axis than those along the c-axis. A band-structure analysis of $Y_2C$ implied that the latter has a metallic character. The examination of Eliashberg Spectral Function indicates that Y-related phonon modes as well as C-related phonon modes are considerably involved in the progress of scattering of electrons. By integrating this function, the value of the average electron-phonon coupling parameter (${\lambda}$) is found to be 0.362 suggesting thus that $Y_2C$ is a weak coupling Bardeen-Copper-Schrieffer superconductor. The use of a reasonable value for the effective Coulomb repulsion parameter (${\mu}^*=0.10$) yielded a superconducting critical temperature $T_c$ of 0.59 K which is comparable with a previous theoretical value of 0.33 K. Upon compression (at pressure of 10 GPa) ${\lambda}$ and $T_c$ are increased to be 0.366 and 0.89 K, respectively, showing thus the pressure effect on the superconductivity in $Y_2C$. The spin-polarization calculations showed that the difference in the total energy between the magnetic and non-magnetic $Y_2C$ is weak.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.11
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• pp.15-20
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• 2004

This paper proposed a very simple method of extracting an effective permittivity from the data of scattering parameters measured on the transmission line of coplanar waveguides in the frequency range of microwave or millimeter waves. This is an extracting method of an effective permittivity $\varepsilon$$_{eff}$ in the case of $\beta$$\ell$ =n$\pi$ (n=integer), where the value of S$_{11}$ changes abruptly following the operating frequency. The experimental value of the effective permittivity $\varepsilon$$_{eff}$ on a dielectric substrate of Rogers 4003$^{TM}$ material of $\varepsilon$$_{r}$ =3.38 showed the value of 2.042, which differs in the error of -3.4% to 8% from those calculated from the previously reported formulae. This result showed that the measurement method was very simple, as well as applied directly to the fabricated circuit patterns, even though the circuit patterns might be complicated or on the substrate of different dielectric materials.s.als.

• Journal of the Korean Institute of Telematics and Electronics
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• v.13 no.1
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• pp.16-22
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• 1976

Broadband operation of Y-junction microstrip circulator withlnonreciprocal device is predicteg by Rosenbaum using Bosma's Green function analysis. The anslysis has been modified to enable the scattering matrix and therefore the circulator bandwidth, to be found. The width of the coupling transmission lines is found to be a significant design parameter${\psi}$. A comparison of experimental and theoretical results for the 3-port junction shows that wide lines and a smaller 7.5U than usual disk radius can be used to obtain broadband operation. Circulator operates in the frequency band 5-11 GHz. The obtained maximum insertion loss is 0.5dB and the isolation is more than 15dB.

• Ocean and Polar Research
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• v.37 no.4
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• pp.333-340
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• 2015

The contrast (fish body to medium ratio) of density and sound speed were measured to estimate acoustic scattering from small juvenile cod (Gadus macrocephalus) with the Kirchhoff-Ray Mode backscatter model. The density contrast was measured by the density-bottle method and the sound speed contrast was estimated by the time of flight method. The results revealed that the measured density contrasts of juvenile cod varied between 1.003 and 1.029 (mean = 1.014, S.D. = 0.01). On the other hand, sound speed contrasts varied between 1.039 and 1.041 (mean = 1.041, S.D. = 0.001). The relationship between averaged target strength (TS) and total length (TL) established by the model were <$TS_{38kHz}$> = 20log(TL) - 68.8 and <$TS_{38kHz}$> = 20log(TL) - 69.4, respectively.

• Nuclear Engineering and Technology
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• v.33 no.1
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• pp.46-61
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• 2001

The neutron cross sections of $^{160}$ Dy, $^{161}$ Dy, $^{162}$ Dy, $^{l63}$Dy, and $^{164}$ Dy have been evaluated in the resonance region of which upper energy is set to several tens of keV. The cross sections are formulated with resonance parameters in the energy region under consideration. In the resolved resonance region, the positive-energy resonance parameters were adopted from the BNL compilation published in 1984 with slight, if any, modifications. A bound level resonance for each isotope except $^{162}$ Dy was invoked to reproduce the reference 2200 m/s cross sections and the bound coherent scattering length. Subsequently, the statistical behavior of the resolved resonance parameters was analyzed, and thus obtained s-wave average parameters were adopted in the unresolved resonance region. In addition, recent measurements of the capture cross sections in the unresolved region were taken into account in adjusting the average resonance parameters for high orbital angular momentum resonances. The present evaluation resulted in large improvements in the cross sections over the ENDF/B-Vl release 6.6.

• Journal of the Korean Magnetics Society
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• v.14 no.3
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• pp.99-104
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• 2004

We have studied to understand the barrier and interface qualities and structural changes through measuring temperature dependent spin-polarization as functions of plasma oxidation time and annealing time. Magnetic tunnel junctions consisting of SiO2$_2$/Ta 5/CoFe 17/IrMn 7.5/CoFe 5/Al 1.6-Ox/CoFe 5/Ta 5 (numbers in nm) were deposited and annealed when necessary. A 30 s,40 s oxidized sample showed the lowest spin-polarization values. It is presumed that tunneling electrons were depolarized and scattered by residual paramagnetic Al due to under-oxidation. On the contrary, a 60s, 70 s oxidized sample might have experienced over-oxidation, where partially oxidized magnetic dead layer was formed on top of the bottom CoFe electrode. The magnetic dead layer is known to increase the probability of spin-flip scattering. Therefore it showed a higher temperature dependence than that of the optimum sample (50 s oxidation). temperature dependence of 450 K annealed samples was improved when the as-deposited one compared. But the sample underwent 475 K and 500 K annealing exhibits inferior temperature dependence of spin-polarization, indicating that the over-annealed sample became microstucturally degraded.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.66 no.4
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• pp.242-246
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• 2017

In this study, it was investigated about optical simulation in high brightness and high uniformity general lighting using glass light guide plate. And we adopt edge-light emission type light plate. Edge-light type lighting has been used LCD application, especially note PC or smart phone backlight unit. Because it had the good properties such as slim shape and light weight. We thought this type was suitable for general lighting application such as wall attached type or ceiling mount type. But many of edge-light type lighting had problems. It called slanted output light rays. That was main key parameter how could control the direction of output light rays. We investigated the solution of this problems, using ray tracing method, we recognized the major fact of the solution relied on the geometric structure of diffusing dot shape. We set the conditions of aspect ratio in diffusing dot shape such as 0.5 to 1. And, at first, we designed diffusing dots shape based on the results of optical simulation and made specimen. as above condition, and acquired good result in confirming dots shape such as the value of the output rays's peak angle was around 75 degrees. And good light distribution characteristics were measured by slated spectro-radiometer. It was shown that the effective ways of designing light distribution characteristics using optical simulation such as ray tracing linear method for making general lighting using glass light guide plate.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.140.1-140.1
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• 2015

Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.