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Surface reaction of $HfO_2$ etched in inductively coupled $BCl_3$ plasma ($BCl_3$ 유도결합 플라즈마를 이용하여 식각된 $HfO_2$ 박막의 표면 반응 연구)

  • Kim, Dong-Pyo;Um, Doo-Seunng;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.477-477
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    • 2008
  • For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

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The nutlet morphology of the genus Glechoma L. (Lamiaceae) and its related taxa (긴병꽃풀속(Glechoma L. 꿀풀과) 및 근연분류군의 소견과 형태에 관한 연구)

  • Jang, Tae-Soo;Hong, Suk-Pyo
    • Korean Journal of Plant Taxonomy
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    • v.40 no.1
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    • pp.50-58
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    • 2010
  • The nutlet morphology and pericarp structure of 14 taxa (4 taxa of the genus Glechoma and related taxa) were studied by light and scanning electron microscopy, and a detailed description of nutlet morphological features for all examined taxa is provided. The shape of the nutlet is ovate to elliptic. Its size is 1.36-3.83 mm in length and 0.80-2.65 mm in width. The largest one was found in Marmoritis rotundifolia, while the smallest one was in Agastache nepetoides. Three different surface types were recognized in the studied taxa based on differences in cell outline and cell boundary relief (rectangular, pitted, and ridged negative reticulate-cell). Three types of trichome (uni-cellular non-glandular trichome, multi-cellular non-glandular trichome, and peltate glandular trichome) were distributed in the nutlets. The pericarp is formed in three layers (i.e., exocarp, mesocarp, and endocarp including sclenchyma tissue), and the pericarp in the studied species is $39.0-237.5{\mu}m$ thick. The morphological and anatomical features (the nutlet shape, surface type, and trichome distribution) in the genus Glechoma and related taxa are described and discussed.

Effect of Sucrose and Gluten on Glass Transition, Gelatinization, and Retrogradation of Wheat Starch (밀전분의 유리전이와 호화 및 노화에 대한 sucrose와 글루텐의 영향)

  • Jang, Jae-Kweon;Pyun, Yu-Ryang
    • Korean Journal of Food Science and Technology
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    • v.36 no.2
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    • pp.288-293
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    • 2004
  • Differential scanning calorimetry (DSC) was used to study effects of sucrose and gluten on wheat starch glass transition, gelatinization, and retrogradation. Glass transition temperature ($T_{g}$) of wheat starch decreased as the ratio of sucrose or gluten to starch increased. Both peak temperature ($T_{G}$) and enthalpy values of gelatinization endotherm increased or decreased with increasing ratio of sucrose or gluten, respectively. Wheat starch gel with no sucrose and gluten recrystallized up to 4 weeks of storage at $4^{\circ}C$, whereas those with sucrose and gluten completed recrystallization within 1 week. Both wheat starch gels with no sucrose and gluten, and those with sucrose and gluten at storage temperature of $32^{\circ}C$ recrystallized up to 4 weeks, with wheat starch-sucrose-gluten (1 : 0.5 : 0.12) system, which had highest ratios of gluten and sucrose to starch, showing lowest recrystallization. Nucleation and propagation rates of starch gel recrystallization based on polymer crystallization principles can be converted into peak width (${\delta}T$) and peak temperature ($T_{R}$) of retrogradative endotherm by DSC, because higher nucleation rate at storage temperature of $4^{\circ}C$ close to $T_{g}$ showed higher ${\delta}T$, whereas higher propagation rate at $32^{\circ}C$ (close to $T_{G}$) had higher $T_{R}$.

RPC Model Generation from the Physical Sensor Model (영상의 물리적 센서모델을 이용한 RPC 모델 추출)

  • Kim, Hye-Jin;Kim, Jae-Bin;Kim, Yong-Il
    • Journal of Korean Society for Geospatial Information Science
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    • v.11 no.4 s.27
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    • pp.21-27
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    • 2003
  • The rational polynomial coefficients(RPC) model is a generalized sensor model that is used as an alternative for the physical sensor model for IKONOS-2 and QuickBird. As the number of sensors increases along with greater complexity, and as the need for standard sensor model has become important, the applicability of the RPC model is also increasing. The RPC model can be substituted for all sensor models, such as the projective camera the linear pushbroom sensor and the SAR This paper is aimed at generating a RPC model from the physical sensor model of the KOMPSAT-1(Korean Multi-Purpose Satellite) and aerial photography. The KOMPSAT-1 collects $510{\sim}730nm$ panchromatic images with a ground sample distance (GSD) of 6.6m and a swath width of 17 km by pushbroom scanning. We generated the RPC from a physical sensor model of KOMPSAT-1 and aerial photography. The iterative least square solution based on Levenberg-Marquardt algorithm is used to estimate the RPC. In addition, data normalization and regularization are applied to improve the accuracy and minimize noise. And the accuracy of the test was evaluated based on the 2-D image coordinates. From this test, we were able to find that the RPC model is suitable for both KOMPSAT-1 and aerial photography.

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The study of the stereo X-ray system for automated X-ray inspection system using 3D-reconstruction shape information (3차원 형상복원 정보 기반의 검색 자동화를 위한 스테레오 X-선 검색장치에 관한 연구)

  • Hwang, Young-Gwan;Lee, Nam-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.8
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    • pp.2043-2050
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    • 2014
  • As most the scanning systems developed until now provide radiation scan plane images of the inspected objects, there has been a limitation in judging exactly the shape of the objects inside a logistics container exactly with only 2-D radiation image information. As a radiation image is just the density information of the scanned object, the direct application of general stereo image processing techniques is inefficient. So we propose that a new volume-based 3-D reconstruction algorithm. Experimental results show the proposed new volume based reconstruction technique can provide more efficient visualization for X-ray inspection. For validation of the proposed shape reconstruction algorithm using volume, 15 samples were scanned and reconstructed to restore the shape using an X-ray stereo inspection system. Reconstruction results of the objects show a high degree of accuracy compared to the width (2.56%), height (6.15%) and depth (7.12%) of the measured value for a real object respectively. In addition, using a K-Mean clustering algorithm a detection efficiency of 97% is achieved. The results of the reconstructed shape information using the volume based shape reconstruction algorithm provide the depth information of the inspected object with stereo X-ray inspection. Depth information used as an identifier for an automated search is possible and additional studies will proceed to retrieve an X-ray inspection system that can greatly improve the efficiency of an inspection.

Fabrication of 2D Bravais Nano Pattern and Growth of ZnO Nano Rods with Photonic Crystal Effect (2차원 Bravais Lattice를 가지는 나노 패턴 제조 및 광결정 효과를 가지는 ZnO 나노 기둥 성장)

  • Kim, Tae-Un;Moon, Jong-Ha;Kim, Seon-Hoon;Kim, Doo-Gun;Kim, Jin-Hyeok
    • Korean Journal of Materials Research
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    • v.21 no.12
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    • pp.697-702
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    • 2011
  • Two-dimensional (2D) nano patterns including a two-dimensional Bravais lattice were fabricated by laser interference lithography using a two step exposure process. After the first exposure, the substrate itself was rotated by a certain angle, $90^{\circ}$ for a square or rectangular lattice, $75^{\circ}$ for an oblique lattice, and $60^{\circ}$ for a hexagonal lattice, and the $90^{\circ}$ and laser incident angle changed for rectangular and the $45^{\circ}$ and laser incident angle changed for a centered rectangular; we then carried out a second exposure process to form 2D bravais lattices. The band structure of five different 2D nano patterns was simulated by a beam propagation program. The presence of the band-gap effect was shown in an oblique and hexagonal structure. The oblique latticed ZnO nano-photonic crystal array had a pseudo-bandgap at a frequency of 0.337-0.375, 0.575-0.596 and 0.858-0.870. The hexagonal latticed ZnO nano-crystallite array had a pseudo-bandgap at a frequency of 0.335-0.384 and 0.585-0.645. The ZnO nano structure with an oblique and hexagonal structure was grown through the patterned opening window area by a hydrothermal method. The morphology of 2D nano patterns and ZnO nano structures were investigated by atomic force microscopy and scanning electron microscopy. The diameter of the opening window was approximately 250 nm. The height and width of ZnO nano-photonic crystals were 380 nm and 250 nm, respectively.

Ansanella granifera gen. et sp. nov. (Dinophyceae), a new dinoflagellate from the coastal waters of Korea

  • Jeong, Hae Jin;Jang, Se Hyeon;Moestrup, Ojvind;Kang, Nam Seon;Lee, Sung Yeon;Potvin, Eric;Noh, Jae Hoon
    • ALGAE
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    • v.29 no.2
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    • pp.75-99
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    • 2014
  • A small dinoflagellate, Ansanella granifera gen. et sp. nov., was isolated from estuarine and marine waters, and examined by light microscopy, scanning electron microscopy, and transmission electron microscopy. In addition, the identity of the sequences (3,663-bp product) of the small subunit (SSU), internal transcribed spacer (ITS) region (ITS1, 5.8S, ITS2), and D1-D3 large subunit (LSU) rDNA were determined. This newly isolated, thin-walled dinoflagellate has a type E eyespot and a single elongated apical vesicle, and it is closely related to species belonging to the family Suessiaceae. A. granifera has 10-14 horizontal rows of amphiesmal vesicles, comparable to Biecheleria spp. and Biecheleriopsis adriatica, but greater in number than in other species of the family Suessiaceae. Unlike Biecheleria spp. and B. adriatica, A. granifera has grana-like thylakoids. Further, A. granifera lacks a nuclear fibrous connective, which is present in B. adriatica. B. adriatica and A. granifera also show a morphological difference in the shape of the margin of the cingulum. In A. granifera, the cingular margin formed a zigzag line, and in B. adriatica a straight line, especially on the dorsal side of the cell. The episome is conical with a round apex, whereas the hyposome is trapezoidal. Cells growing photosynthetically are $10.0-15.0{\mu}m$ long and $8.5-12.4{\mu}m$ wide. The cingulum is descending, the two ends displaced about its own width. Cells of A. granifera contain 5-8 peripheral chloroplasts, stalked pyrenoids, and a pusule system, but lack nuclear envelope chambers, a nuclear fibrous connective, lamellar body, rhizocysts, and a peduncle. The main accessory pigment is peridinin. The SSU, ITS regions, and D1-D3 LSU rDNA sequences differ by 1.2-7.4%, >8.8%, and >2.5%, respectively, from those of the other known genera in the order Suessiales. Moreover, the SSU rDNA sequence differed by 1-2% from that of the three most closely related species, Polarella glacialis, Pelagodinium bei, and Protodinium simplex. In addition, the ITS1-5.8S-ITS2 rDNA sequence differed by 16-19% from that of the three most closely related species, Gymnodinium corii, Pr. simplex, and Pel. bei, and the LSU rDNA sequence differed by 3-4% from that of the three most closely related species, Protodinium sp. CCMP419, B. adriatica, and Gymnodinium sp. CCMP425. A. granifera had a 51-base pair fragment in domain D2 of the large subunit of ribosomal DNA, which is absent in the genus Biecheleria. In the phylogenetic tree based on the SSU and LSU sequences, A. granifera is located in the large clade of the family Suessiaceae, but it forms an independent clade.

Characteristics of Remote Sensors on KOMPSAT-I (다목적 실용위성 1호 탑재 센서의 특성)

  • 조영민;백홍렬
    • Korean Journal of Remote Sensing
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    • v.12 no.1
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    • pp.1-16
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    • 1996
  • Korea Aerospace Research Institute(KARI) is developing a Korea Multi-Purpose Satellite I(KOMPSAT-I) which accommodates Electro-Optical Camera(EOC), Ocean Color Imager(OCI), Space Physics Sensor(SPS) for cartography, ocean color monitoring, and space environment monitoring respectively. The satellite has the weight of about 500 kg and is operated on the sun synchronized orbit with the altitude of 685km, the orbit period of 98 minutes, and the orbit revisit time of 28days. The satellite will be launched in the third quarter of 1999 and its lifetime is more than 3 years. EOC has cartography mission to provide images for the production of scale maps, including digital elevation models, of Korea from a remote earth view in the KOMPSAT orbit. EOC collects panchromatic imagery with the ground sample distance(GSD) of 6.6m and the swath width of 15km at nadir through the visible spectral band of 510-730 nm. EOC scans the ground track of 800km per orbit by push-broom and body pointed method. OCI mission is worldwide ocean color monitoring for the study of biological oceanography. OCI is a multispectral imager generating 6 color ocean images with and <1km GSD by whisk-broom scanning method. OCI is designed to provide on-orbit spectral band selectability in the spectral range from 400nm to 900nm. The color images are collected through 6 primary spectral bands centered at 443, 490, 510, 555, 670, 865nm or 6 spectral bands selected in the spectral range via ground commands after launch. SPS consists of High Energy Particle Detector(HEPD) and Ionosphere Measurement Sensor(IMS). HEPD has mission to characterize the low altitude high energy particle environment and to study the effects of radiation environment on microelectronics. IMS measures densities and temperature of electrons in the ionosphere and monitors the ionospheric irregularities in KOMPSAT orbit.

Toxic dinoflagellate Gymnodinium catenatum Graham(Dinophyceae) from the southern coast of Korea: morphology, phylogeny and effects of temperature and salinity on growth (남해안에서 분리한 유독 와편모조류 Gymnodinium catenatum Graham (Dinophyceae): 형태, 분자계통학적 특성 및 온도와 염분에 따른 성장 특성)

  • Han, Kyong Ha;Li, Zhun;Kang, Byeong Jun;Youn, Joo Yeon;Shin, Hyeon Ho
    • Korean Journal of Environmental Biology
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    • v.37 no.1
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    • pp.31-41
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    • 2019
  • The toxic dinoflagellate Gymnodinium catenatum isolated from the southern coast of Korea was described under light and scanning electron microscopy, and its large subunit (LSU) rDNA was sequenced. In addition, the effects of temperature and salinity on its growth were investigated. The cells of G. catenatum, as viewed under the electronic microscope, were green-brown color, $38.1-77.4{\mu}m$ in length and $26.1-40.8{\mu}m$ in width. The epicone was conical, while the hypocone was trapezoidal. The nucleus was located at the central part of the cell. The apical groove was horseshoe-shaped and small pores were irregularly distributed on the cell surface. Molecular phylogeny based on LSU rDNA gene sequences showed that the Korean G. catenatum and previously reported species formed a monophyletic clade within Gymnodinium sensu stricto clade. The maximum growth rate of $0.37day^{-1}$, was obtained at $25^{\circ}C$ and 35 psu, and the maximum cell density of $1,073cells\;mL^{-1}$, was observed at $20^{\circ}C$ and 25 psu. However, G. catenatum did not grow at temperature < $15^{\circ}C$ and < $30^{\circ}C$. These results suggest that environmental conditions of summer and autumn in the southern coast of Korea may be favorable for the growth of G. catenatum.

A Study on Particle and Crystal Size Analysis of Lithium Lanthanum Titanate Powder Depending on Synthesis Methods (Sol-Gel & Solid-State reaction) (분말 합성법(Sol-Gel & Solid-State reaction)에 따른 Lithium Lanthanum Titanate 분말의 입자 및 결정 크기 비교 분석에 관한 연구)

  • Jeungjai Yun;Seung-Hwan Lee;So Hyun Baek;Yongbum Kwon;Yoseb Song;Bum Sung Kim;Bin Lee;Rhokyun Kwak;Da-Woon Jeong
    • Journal of Powder Materials
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    • v.30 no.4
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    • pp.324-331
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    • 2023
  • Lithium (Li) is a key resource driving the rapid growth of the electric vehicle industry globally, with demand and prices continually on the rise. To address the limited reserves of major lithium sources such as rock and brine, research is underway on seawater Li extraction using electrodialysis and Li-ion selective membranes. Lithium lanthanum titanate (LLTO), an oxide solid electrolyte for all-solid-state batteries, is a promising Li-ion selective membrane. An important factor in enhancing its performance is employing the powder synthesis process. In this study, the LLTO powder is prepared using two synthesis methods: sol-gel reaction (SGR) and solid-state reaction (SSR). Additionally, the powder size and uniformity are compared, which are indices related to membrane performance. X-ray diffraction and scanning electron microscopy are employed for determining characterization, with crystallite size analysis through the full width at half maximum parameter for the powders prepared using the two synthetic methods. The findings reveal that the powder SGR-synthesized powder exhibits smaller and more uniform characteristics (0.68 times smaller crystal size) than its SSR counterpart. This discovery lays the groundwork for optimizing the powder manufacturing process of LLTO membranes, making them more suitable for various applications, including manufacturing high-performance membranes or mass production of membranes.