• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• 한국동물학회지
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• 제35권3호
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• pp.295-307
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• 1992

In order to study the differentiation of the epithelial cells during the development of fetal rat lung tissue, histological changeB in organotypic culture and in vivo were examined. Light microscopy and scanning electron microscopy were used to analvre the histological change in rat lung from the 15th nary of gestation to the 111th nary after birth. In organotypic culture system, the pulmonary epithelial cell differentiation was studied by scanning electron microscopy. The results obtained from this study were as follows. 1. During deveiopment of lung, the glandular stage lasted from the Isth day to the lsth naut of gestation; the canalicular stage from the 17th nay to the 19th naut of gestation; the saccuiar stage from 20th nary to the birth. Alveolar stage was observed at the 3rd nary of postnatal rat lung. 2. In organotvpic culture of fetal rat lung cells organized alveolar-like structures resembling those of in uiuo state were observed on the gelatin matrix. In contrast with in vivo state, fetal lung cells formed group of type ll pneumocytes predominently along the contours of the matrix. These cells have large apical surface, short microvilli and secreted materials which may be sunactant. These results suggested that an orsanotypic culture retaining epithelial- -mesenchvmal relationships is appropriate culture model to study the pulmonary epithelial cell (especially type ll pneumocvte) differentation.

• 한국레이저가공학회지
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• 제18권3호
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• pp.6-8
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• 2015

Finishing process includes deburring, polishing and edge radiusing. It improves the surface profile of specimen and eliminates the alien substance on surface. Deburring is the elimination process for debris of edges. Polishing lubricates surfaces by rubbing or chemical treatment. There are two types for electron finishing. The one is using pulse beam. The other is using the convergent and scanning electron beam. Pulse type device appropriates the large area process. But it does not control the beam dosage. Scanning type device has advantages for dosage control and edge deburring. We design the convergence and scan type. It has magnetic lenses for convergence and scan device for scanning beam. Magnetic lenses consist of convergent and objective lens. The lenses are designed by the specification(beam size and working distance). In this paper, we evaluate the convergence performance by pattern process. Also, we analysis the results and important factors for process. The important factors for process are beam size, pressure, stage speed and vacuum. These results will be utilized into systematizing pattern shape and the factors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.665-666
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• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• Composites Research
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• 제37권1호
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• pp.15-20
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• 2024

수소탱크의 잔류응력은 내구도와 직접적인 관련이 있기 때문에 안전을 위해 이를 줄이는 것이 매우 중요하다. Type II~IV 수소탱크는 섬유에 수지를 함침시켜 라이너에 감는 필라멘트 와인딩 공법으로 제작하게 된다. 필라멘트 와인딩에서 잔류응력은 경화조건, 섬유 인장 등에 영향을 받게 되는데, 본 연구에서는 탄소섬유 필라멘트 와인딩 공정을 이용한 Type III 수소탱크 제작 시 경화조건이 잔류응력에 미치는 영향을 분석하였다. 먼저 에폭시 수지의 경화거동을 시차주사열량계를 이용하여 분석하였다. 이를 통해 경화온도를 140℃로 설정하였다. 같은 경화시간 동안 140℃에 먼저 도달하는 2-stage 경화조건과, 보다 늦게 도달하는 4-stage 경화조건으로 각각 시편을 경화시켰다. 경화 후 복합재 부분의 잔류응력을 ring slitting 법으로 측정하였고, 이 실험값을 수치해석적인 값과 비교하였다. 그 결과, 경화조건 최적화에 따른 유의미한 잔류응력의 차이가 발생함을 확인하였다.

• 자원환경지질
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• 제24권1호
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• pp.1-8
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• 1991

North ore deposits of the Dunjeon gold mine is disseminated-stockworks deposits emplaced in Ordovician Dongjeom quartzite. Six types of fluid inclusions are recongnized in the stage I quartz. Among them polyphase inclusions(type-IV-A, B) are predominent in the lower part of stage I quartz crystals whereas liquid and gas inclusions(type I, II) are abundant in the upper part of the same quartz crystals. Liquid $CO_2$-bearing inclusions(type III-A, B)occur as pseudosecondary inclusions. Solid phases in polyphase inclusions are identified by using scanning electron microscopy combined with energy dispersive x-ray spectroscopy. The solid phases are as follows; halite, sylvite, hydrophyllite, quartz, muscovite, calcite, ankerite, K-Mg-Fe-Al-Si mineral, Ca-Fe-Si mineral, Mg-Al-Si mineral, two kinds of Fe-mineral and Cu-Fe mineral. Results of freezing and heating experiments of fluid inclusions and identification of daughter minerals in polyphase inclusions in the stage I quartz reveal that ore fluids were high saline system NaCl-KCl-$CaCl_2$-$H_2O$ in the earier stage and then evolved to rather simple system NaCl-$H_2O$ in the later stage, and temporally fluid mixing occured with system $CO_2$-$H_2O$. Homogenization temperatures and salinity of fluid inclusions in the stage I range from 290 to $454^{\circ}C$ and from 0.2 to 54.2 wt. % equivalent to NaCl.

• 지질공학
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• 제29권3호
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• pp.237-249
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• 2019

본 연구에서는 지하수의 이동에 영향을 주는 암반의 균열에 대해서 고온하에서의 다단계 압력실험을 통해 균열면의 거칠기 변화에 대한 분석을 실시하였다. 연구에 사용된 시료는 지표에서 지하 500 m 구간에서 획득한 조립질 화성암과 세립질 화성암 시료 중 심도 약 40 m와 270 m의 시료를 실험에 사용하였다. 압력은 최대 120 MPa 까지 가압을 하였으며, 단계적으로 10 MPa씩 증가하면서 실험을 수행하였다. 각 단계에서의 표면 변화를 관측하기 위해서 고분해능 3차원 다초점 레이저 스캔 현미경(Confocal Laser Scanning Microscope, CLSM)을 사용하였으며, 이를 통해서 미세한 표면의 거칠기를 확인할 수 있었다. 거칠기의 변화에 대해서는 거칠기 인자값을 기준으로 변화된 양을 계산하였다. 본 실험에 사용된 시료는 $20{\times}40{\times}5mm$ 크기를 가지고 있으며, 가압장치는 나사방식으로 압력을 가할 수 있도록 제작한 챔버를 활용하여 실험을 수행하였다. 실험결과 단계적으로 압력이 가해지는 조건에서 압력에 따른 균열면의 거칠기는 입자의 크기에 따라 다른 변화를 보이는 것으로 확인되었으며, 이러한 자료는 추후 암석의 균열면을 따라 이동할 수 있는 지하수의 흐름에 대한 예측을 위한 기초자료로 활용 될 수 있을 것으로 기대한다.

• 한국동물위생학회지
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• 제20권1호
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• pp.55-67
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• 1997

The morphological development of lungs in fetuses of 60, 90 and 120 days of gestation and neonates of Korean native goats was investigated by light, scanning and transmission electron mictroscope. The results were summarized as follows ; 1. Gross findings ; In the 60-days-old fetus, the lung was developed and differentiated into six lobes. 2. Light microscopic findings : The gland-like bronchioles were formed in loose mesenchyme at 60 days of gestation and the bronchial wall contained smooth muscles. The loose mesenchyme had been replaced by compact parenchymal tissue at 90 days of gestation and the cartilage plates appeared in bronchial wall which contained blood vessels, submucosal glands and smooth muscles. The lung parenchyma consisted of a fine network of alveoli at 120 days of gestation and the bronchial wall contained well-developed blood vessels, submucosal glands, cartilage plates and smooth muscles. In neonates, the lung tissue was similar to the mature lung tissue and the bronchial wall contained well developed cartilage plates. 3. Scanning electron microscopic findings : The epithelial cells lining the tubules were composed of cuboidal or columnar at 60 days of gestation and the epithelial cells lining the large airways were often ciliated : some were covered with stubby microvilli. The epithelial cells lining the canals were cuboidal at 90 days of gestation and the epithelial cells lining the bronchioles were ciliated cells or nonciliated(clara) cells, The clara cells contained row microvilli. The alvealor development of this stage was rapidly progressed ; the subdivision of canals by alveolar crests and assosiated wall attenuation resulted alveoli at 120 days of gestation and the respiratory bronchioles were lined by ciliated or nonciliated epithelial cells. In neonates, the epithelial cells lining the alveolar walls were mainly covered with pneumocyte type I ; Some were covered with pneu-mocyte type II. 4. Transmission electron microscopic findings : The epithelial cells lining the tubules were adhered with tight junction at apical borders of the adjacent cells at 60 days of gestation, which contained few organells and glycogen. The epithelial cells lining the canals were composed mostly of cuboidal cell at 90 days of gestation and the epithelial cells lining of the bronchioles were ciliated of nonciliated cell, which contained few organelles and abundant glycogen. The epithelial cells lining the alveolar walls were composed of pneumocyte type I and a few pneumocyte type II at 120 days of gestation. The epithelial cells lining of the bronchioles were ciliated or nonciliated cells. In neonates, pneumocyte type I was observed as flat and thin cytoplasmic extension in shape. Otherwise, pneumocyte type II was observed as cuboidal type with apical microvilli and contained osmiophillic lamellar inclusion bodies. Putting these various experiment results together, the lung development was slowly progressed at early stage, which was rapidly progressed in the late stage of gestation.

• 한국세라믹학회지
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• 제22권2호
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• pp.33-38
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• 1985

The hydration of supersulphated slag cement which is the mixture of granuloated blast furnace slag anhydrite $C_4A_3$ type clinker and calcined dolomite was studied by X-ray diffraction differential thermal analysis scanning electron microscope observation and measurement of the rate of heat liberation. The main hydrates were ettrigite and C-S-H. This supersulphated slag cement enhanced rapid-hardening and increased in strength at early stage due to the much of ettrigite. Furthermore the hardened cement became stronger due to the C-S-H that was produced from the hydration of the $eta$-$C_2S$ in $C_4A_3$ type clinker and the hydration of the dissolved components from slag at later period.