• 한국분말재료학회지
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• 제8권4호
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• pp.239-244
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• 2001

To investigate the effect of process parameters on selective laser sintering of Cu/polyamide mixed powder, Cu/polyamide mixed powder was sintered by selective laser with changing laser power and scanning speed. The properties of sintered body were evaluated by measuring the density and tensile strength, and analysis of XRD, FT-Raman and microstructure. With an increase in the laser power, the density and ultimate tensile strength of sintered Cu/polyamide body increase and then decrease. The maximum values of the density and ultimate tensile strength were decreased with increasing laser scanning speed. These changes were concerned with the difference of irradiation energy of laser into the powder layer. It was considered that the change of the mechanical property of the sintered body with irradiation energy of laser is due to the changes of amount of copper particle and property of polyamide.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.841-844
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.552-556
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• 1997

The Direct Metal Prototyping(DMP), one of the rapid prototyping technologies, allows the manufacturing of three-dimensional metallic parts using metal powders directly from the CAD data. Laser power and scanning speed are the most important variables of the process. The objective of this study is to obtain the design data for laser power and scanning speed to bond metal powders effectively using the finite element method. To obtain the design values, a numerical analysis considering two-dimensional heat transfer during the sintering of metal powder layers of the process was performed. The laser beam has been modeled to have directionality in its heat flux distribution, i. e., in the scanning direction a Gaussian beam mode distribution has been assumed and in the thickness direction a square beam mode distribution. The three-dimensional irregular distribution of metal powders of the powder layer is idealized as two-dimensional distribution in which metal powders are located regularly and periodically on the plate. In this study the design values of laser power vs scanning speed have been obtained. Temperature distribution and temperature variation of the powder layers with respect to time have been predicted. The commputed dsign data will be useful in determining the initial conditions of the process.

• 한국정밀공학회지
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• 제30권7호
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• pp.702-708
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• 2013

The white-light scanning interferometer (WSI) is an effective optical measurement system for high-precision industries (e.g., flat-panel display and electronics packaging manufacturers) and semiconductor manufacturing industries. Its major disadvantages include a slow image-capturing speed for interferogram acquisition and a high computational cost for peak-detection on the acquired interferogram. Here, a WSI system is proposed for the semiconductor inspection process. The new imaging acquisition technique uses an 'on-the-fly' imaging system. During the vertical scanning motion of the WSI, interference fringe images are sequentially acquired at a series of pre-defined lens positions, without conventional stepwise motions. To reduce the calculation time, a parallel computing method is used to link multiple personal computers (PCs). Experiments were performed to evaluate the proposed high-speed WSI system.

• 한국분말재료학회지
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• 제8권1호
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• pp.42-49
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• 2001

Ti-50Ni(at%) and Ti-40Ni-10Cu(at%) alloy powders have been fabricated by ball milling method, and their microstructure and phase transformation behavior were investigated by means of scanning electron microscopy/energy dispersive spectrometry, differential scanning calorimetry (DSC), X-ray diffractions and transmission electron microscopy. In order to investigate the effect of ball milling conditions on transformation behavior, ball milling speed and time were varied. Ti-50Ni alloy powders fabricated with the milling speed more than 250 rpm were amorphous, while those done with the milling speed of 100rpm were crystalline. In contrast to Ti-50Ni alloy powders, Ti-40Ni-10Cu alloy powders were crystalline, irrespective of ball milling conditions. DSC peaks corresponding to martensitic transformation were almost discernable in alloy powders fabricated with the milling speed more than 250 rpm, while those were seen clearly in alloy powders fabricated with the milling speed of 100 rpm. This was attributed to the fact that a strain energy introduced during ball milling suppressed martensitic transformation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.187-187
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• 2012

In this report, the plasmonic nanopores of less than 5 nm diameter were fabricated on the apex of the pyramidal cavity array. The metallic pyramidal pit cavity can also utilized as the plasmonic bioreactor, and the fabricated Au or Al metallic nanopore can provide the controllable translocation speed down using the plasmonic optical force. Initially, the SiO2 nanopore on the pyramidal pit cavity were fabricated using conventional microfabrication techniques. Then, the metallic thin film was sputter-deposited, followed by surface modification of the nanometer thick membrane using FESEM, TEM and EPMA. The huge electron intensity of FESEM with ~microsecond scan speed can provide the rapid solid phase surface transformation. However, the moderate electron beam intensity from the normal TEM without high speed scanning can only provide the liquid phase surface modification. After metal deposition, the 100 nm diameter aperture using FIB beam drilling was obtained in order to obtain the uniform nano-aperture. Then, the nanometer size aperture was reduced down to ~50 nm using electron beam surface modification using high speed scanning FESEM. The followed EPMA electron beam exposure without high speed scanning presents the reduction of the nanosize aperture down to 10 nm. During these processes, the widening or the shrinking of the nanometer pore was observed depending upon the electron beam intensity. Finally, using 200 keV TEM, the diameter of the nanopore was successively down from 10 nm down to 1.5 nm.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2006년도 Proceedings of ISRS 2006 PORSEC Volume I
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• pp.386-389
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• 2006

The sea surface wind speed (SSWS) derived by microwave radiometer can be contaminated by change of microwave brightness temperature owing to the angle between the sensor azimuth and the wind direction (Relative Wind Direction). We attempt to correct the contamination to the SSWS derived by Advanced Microwave Scanning Radiometer (AMSR) on Advanced Earth Observing Satellite II (ADEOS-II), by applying the method proposed by Konda and Shibata (2004). The improvement of accuracy of the SSWS estimation amounts to roughly 60% of the error caused by the RWD effect.

• Journal of Electrical Engineering and Technology
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• 제6권1호
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• pp.48-58
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• 2011

In this paper, an attempt has been made to design the current and speed proportional and integral (PI) regulators of self-commutating current source inverter-fed induction motor drive having capacitors at the machine end and to investigate the transient performance of the same for step changes in reference speed. The mathematical model of the complete drive system is developed in closed loop, and the characteristic equations of the systems are derived using perturbation about steady-state operating point in order to develop the characteristic equations. The D-partition technique is used for finding the stable region in the parametric plane. Frequency scanning technique is used to confirm the stability region. Final selection of the regulator parameters is done by comparing the transient response of the current and speed loops for step variations in reference. The performance of the drive is observed analytically through MATLAB simulation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.653-656
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• 2005

This paper introduces design, fabrication and experiment process of a novel scanner for the high speed AFM(Atomic Force Microscope). A proper design modification is proposed through analyses on the dynamic characteristics of the existing linear motion stages using a dynamic analysis program, Recurdyn. Since the scanning speed of each direction is allowed to be different, the linear motion stage for the high-speed scanner of AFM can be so designed to have different resonance frequencies for the modes with one dominant displacement in the desired directions. One way to achieve this objective is to use one-direction flexure mechanism for each direction and to mount one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separates the frequencies of the two vibration modes with one dominant displacement in each desired direction, hence, the coupling between the motions in the two directions. In addition, a pair of actuators is used for each axis to decrease the cross talks in the two motions and gives a force large enough to actuate the slow motion stage, which carries the fast motion stage. After these design modifications, a novel scanner with scanning speed higher than 10 Hz can be achieved to realize undistorted images in the high speed AFM.