Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2003.11a
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- Pages.841-844
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- 2003
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- 1598-2548(pISSN)
A Study on Transport Mechanism of the Ultrasonic Transporting System using Laser Scanning Vibrometer
Laser Scanning Vibrometer를 이용한 초음파 이송시스템의 이송 메커니즘에 관한 연구
Abstract
In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.
Keywords