• 제목/요약/키워드: Scanning Mobility Particle Sizer(SMPS)

검색결과 53건 처리시간 0.033초

3개 입자측정스시템별 디젤 극미세입자의 수량분포 특성 비교 (Analysis of Diesel Nano-particle Number Distribution Characteristics for Three Different Particle Measurement Systems)

  • 이진욱;김홍석;조규백;정용일
    • 한국자동차공학회논문집
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    • 제15권6호
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    • pp.144-150
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    • 2007
  • In recent years, the particle number emissions rather than particulate mass emissions in automotive engine have become the subject of controversial discussions. Recent results from the health effects studies imply that it is possible that particulate mass does not properly correlated with the variety of health effects attributed to diesel exhaust. So, the concern is instead now focusing on nano-sized particles emitted from I. C. engine. This study has been performed for the better understanding about the engine nano-particle for 3-measurement systems with different measuring principle. Firstly, EEPS is a newly introduced instrument for size distribution measurement of engine exhaust particles. It can measure nano-particles with an adequate resolution and in real time. In this study, the characteristics of EEPS were compared with ELPI and SMPS. As a research results, EEPS showed a same effect of engine load on the size distribution with ELPI and SMPS. But the quantitative results of EEPS were more similar to SMPS than ELPI, because the EEPS and SMPS use a same principle for classifying particles by size. The capability for transient measurement of EEPS was equivalent to that of ELPI.

대기중 에어로졸 입경분포의 변화 (Variations of Aerosol Size Distribution on Ambient Air)

  • 김신도;안기석;김종호;김태식
    • 한국대기환경학회:학술대회논문집
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    • 한국대기환경학회 1999년도 추계학술대회 논문집
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    • pp.83-84
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    • 1999
  • 시정악화나 광화학 스모그를 비롯하여 지구 온난화에 부유 입자상 물질이 미치는 영향 등을 파악하기 위해선 중량농도, 화학적 성분분석 등과 함께 그 입경별 크기 분포도 반드시 고려되어야만 한다. 입경분포 측정을 위하여 다단식 임팩터(Cascade Impactor)나 광학입자계수기(OPC, Optical Particle Counter), Aerosizer, SMPS (Scanning Mobility Particle Sizer), EAA(Electrical Aerosol Analyzer) 등 이주로 사용되고 있다.(중략)

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반도체 세정 공정 평가를 위한 나노입자 안착 시스템 개발 (Development of Particle Deposition System for Cleaning Process Evaluation in Semiconductor Fabrication)

  • 남경탁;김호중;김태성
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.3168-3172
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    • 2007
  • As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

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VACES을 이용한 대기 중 입자상물질의 농축기술 및 특성 연구 (Characteristics of Aerosol Particle Concentration by the Versatile Aerosol Concentration Enrichment System (VACES))

  • 박정호
    • 한국환경과학회지
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    • 제21권11호
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    • pp.1339-1348
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    • 2012
  • The versatile aerosol concentration enrichment system (VACES) have proven useful for providing elevated levels of atmospheric aerosol to human and animal exposures. In this study, we describe a VACES and tests conducted to both optimize the enhancement factor (EF) and characterize how it depends on experiment conditions. Particle number concentrations were measured from upstream and downstream of the system by scanning mobility particle sizer (SMPS) with a long differential mobility analyzer (DMA) in combination with a condensation particle counter (CPC). SMPS was used for to determine VACES particle EF. Particle EF tends to increase for higher the saturator temperature ($T_{Sat}$) and lower the condenser temperature ($T_{Con}$). $T_{Con}$ higher than $0^{\circ}C$ and $T_{Sat}$ lower than $50^{\circ}C$ was the best to obtain the most increase in particle concentration. Correlation analysis of EF with factor variables of $T_{Sat}$ and $T_{Con}$ resulted in correlation 0.662 and 0.416, respectively. With all five predictor variables included in a multiple regression model, the EF had a liner correlation with $R^2=0.643$.

화학기상응축 공정에서 TiO2 나노입자 특성에 미치는 반응온도와 전구체 농도의 영향 - Part I: SMPS를 이용한 실시간 입자특성 평가 (Effects of Temperature and Precursor-concentration on Characteristics of TiO2 Nanoparticles in Chemical Vapor Condensation Process -Part I: Real-time Particle Characterization by SMPS)

  • 이창우;유지훈;임성순;윤성희;이재성;좌용호
    • 한국재료학회지
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    • 제13권5호
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    • pp.323-327
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    • 2003
  • Properties of nanoparticles synthesized during gas phase reaction were studied in terms of particle behaviors using real-time particle characterization method. For this study, $TiO_2$ nanoparticles were synthesized in the chemical vapor condensation process(CVC) and their in-situ measurement of particle formation and particle size distribution was performed by scanning mobility particle sizer(SMPS). As a result, particle behaviors in the CVC reactor were affected by both of number concentration and thermal coagulation, simultaneously. Particularly, growth and agglomeration between nanoparticles followed two different ways of dominances from coagulations by increase of number concentration and sintering effect by increased temperature.

SMPS와 TR-DMPS를 이용한 도로변 초미세 입자 모니터링 결과의 비교 (Comparison of Ultrafine Particles Monitored at a Roadside Using an SMPS and a TR-DMPS)

  • 우대광;이승복;배귀남;김태성
    • 한국대기환경학회지
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    • 제24권4호
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    • pp.404-414
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    • 2008
  • A Transient Differential Mobility Particle Spectrometer (TR-DMPS) with a short response time was recently developed to monitor high concentration of ultrafine particles emitted from vehicles. To investigate the availability of the TR-DMPS for monitoring transient roadside aerosols, the number size distribution of ultrafine particles was monitored at the Cheongnyangni roadside in Seoul on March 23, 2007 together with a Scanning Mobility Particle Sizer (SMPS). The roadside aerosols were monitored every 5 min and 0.1 sec by using the SMPS and the TR-DMPS, respectively. The concentration of ultrafine particles at the roadside was highly fluctuated for a short duration. From the comparison of particle number concentrations and size distributions between two instruments, it was confirmed that the SMPS provided fairly good time-averaged number size distribution although it did not follow rapid change of particle number concentration at the roadside. The TR-DMPS quickly responded to a rapid change of particle number concentration due to abrupt traffic flow. However, the TR-DMPS frequently showed electrical noise events, resulting in underestimated particle contamination. A more stable operation of the TR-DMPS is needed in application of roadside aerosol monitoring.

상압에서 열분해법을 이용한 실리콘 입자 제조 (Formation of Silicon Particles Using $SiH_4$ pyrolysis at atmospheric pressure)

  • 우대광;남경탁;김영길;김광수;강윤호;김태성
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.126-129
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    • 2007
  • The particle formation using pyrolysis has many advantages over other particle manufacturing techniques. The particles by pyrolysis have relatively uniform size and chemical composition. Also, we can easily produce high purity particles. Thus, we studied the formation of silicon particles by pyrolysis of 50% $SiH_4$ gas diluted in Ar gas. A pyrolysis furnace was used for the thermal decomposition of $SiH_4$ gas at $800^{\circ}C$ and atmospheric pressure. The aerosol flow from furnace is separated into two ways. The one is to the Scanning Mobility Particle Sizer (SMPS) for particle size distribution measurement and the other is to the particle deposition system. The produced silicon particles are deposited on the wafer in the deposition chamber. SEM measurement was used to compare the particle size distribution results from the SMPS. Depending on the experimental conditions, particles of high concentration in the $30\sim80$ nm size range were generated.

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에어로졸 중화기의 성능이 고하전 입자의 크기분포 측정에 미치는 영향 (Effect of Performance of Aerosol Charge Neutralizers on the Measurement of Highly Charged Particles Using a SMPS)

  • 지준호;배귀남;황정호
    • 대한기계학회논문집B
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    • 제27권10호
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    • pp.1498-1507
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    • 2003
  • A SMPS(scanning mobility particle sizer) system measures the number size distribution of particles using electrical mobility detection technique. An aerosol charge neutralizer, which is a component of the SMPS, is a bipolar charger using a radioactive source to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. In this study, the effect of the particle charging characteristics of two aerosol charge neutralizers on the measurement using a SMPS system was experimentally investigated for highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0.5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.3 to 3.0 L/min. The results show that the non-equilibrium character in particle charge distribution appears as the air flow rate increases although the particle number concentration is relatively low in the range of 1.5∼2x10$^{6}$ particles/㎤. The low neutralizing efficiency of the $^{85}$ Kr aerosol charge neutralizer for highly charged particles can cause to bring an artifact in the measurement using a SMPS system. However, the performance of the $^{210}$ Po aerosol charge neutralizer is insensitive to the air flow rate.

전기적 임팩터용 페러데이 케이지의 성능평가 (Performance Evaluation of the Faraday Cage for a Electrical Impactor)

  • 지준호;배귀남;황정호;이규원
    • 한국대기환경학회:학술대회논문집
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    • 한국대기환경학회 2000년도 추계학술대회 논문집
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    • pp.117-118
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    • 2000
  • 대전 입자의 거동은 입자의 제어 측면뿐만 아니라 입자의 측정에서 중요한 요소 중 하나이다. 특히, 입자를 실시간으로 측정하는 경우 입자의 대전량을 정밀하고 정확하게 측정하는 것은 측정 대상이 심하게 변할 때 매우 중요하다. 입자의 전기적 특성(대전량)을 이용하여 입경분포를 측정하는 장비로는 EAA(electrical aerosol analyzer), SMPS(scanning mobility particle sizer), ELPI(electrical low pressure impactor) 등이 있다. (중략)

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디젤기관차 엔진에서 배출되는 입자의 특성분석 (An Analysis of Characteristics of Particulate Matter Exhausted from Diesel Locomotive Engines)

  • 박덕신;김태오;김동술
    • 한국대기환경학회지
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    • 제19권2호
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    • pp.133-143
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    • 2003
  • Numerous evidence have been reported that fine particulate matters can play an important role in threatening human health. Recently concerns on fine particle pollution from various engines may require re-examination of particulate emission standards. The particles emitted by most diesel engines are mainly divided into their size ranges such as Dp< 50 nm and 50 nm< Dp< 1,000 nm. In this work, the number concentration and the size distribution of fine particles emitted from an exhaust manifold of a railroad diesel engine were measured under load test conditions using a scanning mobility particle sizer (SMPS). The fine particles observed were within the range of 7 to 304 nm under different load conditions with two different dilution ratios. The fine particles exhibited unique patterns showing bimodal shapes in size distribution.