• 대한기계학회논문집 C: 기술과 교육
• /
• 제1권1호
• /
• pp.13-19
• /
• 2013

$F{\theta}$ 렌즈는 레이저 프린터의 LSU(Laser Scanning Unit)의 중요 부품으로서 $F{\theta}$ 렌즈를 통과한 주사빔의 상 위치는 주사빔의 렌즈 입사각에 비례한다. 본 논문에서는 당사에서 개발한 A4 사이즈용 $F{\theta}$ 렌즈를 설계, 제작하고 보정하는 과정을 소개하였다. 렌즈 개발에서 광학설계는 Zemax를 사용하였고 주사빔의 주주사방향 및 부주사방향의 왜곡을 최소화 하기 위하여 렌즈면은 특수한 토릭면으로 하였다. 렌즈 금형은 1nm 의 분해능을 갖는 초정밀 가공기로 제작하였다. 렌즈 사출 후 성능을 평가하고 측정값과 설계값의 차이를 바탕으로 설계보정식을 유도하여 렌즈 금형을 수정하였다. 금형 수정 후 사출렌즈의 재측정 결과 초기 설계값에 가까운 성능을 확인하였다.

• 대한공간정보학회지
• /
• 제24권2호
• /
• pp.79-87
• /
• 2016

As 3D geospatial information is demanded, terrestrial laser scanners which can obtain 3D model of objects have been applied in various fields such as Building Information Modeling (BIM), structural analysis, and disaster management. To acquire precise data, performance evaluation of a terrestrial laser scanner must be conducted. While existing 3D surveying equipment like a total station has a standard method for performance evaluation, a terrestrial laser scanner evaluation technique for users is not established. This paper categorizes and analyzes error sources which generally occur in terrestrial laser scanning. In addition to the prior researches about categorizing error sources of terrestrial Laser scanning, this paper evaluates the error sources by the actual field tests for the smooth in-situ applications.The error factors in terrestrial laser scanning are categorized into interior error caused by mechanical errors in a terrestrial laser scanner and exterior errors affected by scanning geometry and target property. Each error sources were evaluated by simulation and actual experiments. The 3D coordinates of observed target can be distortedby the biases in distance and rotation measurement in scanning system. In particular, the exterior factors caused significant geometric errors in observed point cloud. The noise points can be generated by steep incidence angle, mixed-pixel and crosstalk. In using terrestrial laser scanner, elaborate scanning plan and proper post processing are required to obtain valid and accurate 3D spatial information.

• 한국정밀공학회지
• /
• 제23권8호
• /
• pp.72-79
• /
• 2006

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.

• 마이크로전자및패키징학회지
• /
• 제31권2호
• /
• pp.9-15
• /
• 2024

칩 온 보드(chip on board) 패키지 적용을 위해 프리프레그(prepreg) 표면에 잔류하는 불순물이 봉지재(encapsulant)의 젖음성에 미치는 영향을 규명하기 위해 전자현미경(scanning electron microscope)과 X-선 광전자 분광기(X-ray photoelectron spectroscopy)를 이용하여 미세구조, 조성 및 화학 결합을 분석하였다. 프리프레그 표면에 잔류 불순물이 존재하는 시편의 경우 잔류 불순물이 존재하지 않는 시편보다 접촉각이 28° 높게 측정되었으며, C-O 결합은 4% 낮게 도출되었다. 이는 공정 중 잔류 불순물인 Na, F이 프리프레그 표면에 존재하는 C와 화학 반응을 하여 C-F 결합 생성으로 인해 프리프레그 표면의 C-O 결합이 끊어지면서 프리프레그 표면에너지가 낮아지게 되고 이로 인해 접촉각이 증가하게 되면서 봉지재의 젖음성이 저하되는 것으로 판단된다.

• 한국재료학회지
• /
• 제8권10호
• /
• pp.884-889
• /
• 1998

대면적의 비정질 실리콘 박막을 가우스 분포(Gaussian Profile)의 일차원 선형빔(line shape beam)을 가지는 엑시머 레이저를 사용하여 결정화를 시켰다. (Corning 7059 glass)위에 증착된 비정질 실리콘 박막이 재결정화된 실리콘 박막의 경우, 두께에따라 결정화되는 모양이 다르게 나타났다. 따라서 두께에 따라 결정화되는 상태의 변화를 조사하기 위하여 angle wrapping 방법을 새롭게 도입하여 깊이에 따른 Si층이 5${\mu}m$ 이상되도록 angle wrapping한 후에 박막의 두께에 따른 micro-raman spectra를 측정하여 결정화상태에 따른 잔류응력을 조사하였다. 또한 기판의 온도가 상온인 경우에 엑시머 레이저의 밀도가 300mJ/${cm}^2$에서 열처리한 경우에 재결정화된 Si 박막의 잔류응력에 박막의 표면에서 박막의 깊이에 따라 $1.3{\times}10^10$에서 $1.6{\times}10^10$을 거쳐 $1.9{\times}10^10$ dyne/${cm}^2$으로 phase의 변화에 따라 증가하였다. 또한 기판의 온도가 $400^{\circ}C$에서 최적의 열처리 에너지 밀도인 300mJ/${cm}^2$에서는 박막의 깊이에 따른 결정화 상태의변화에 따라 thermal stress 의 값이 $8.1{\times}10^9$에서 $9.0{\times}10^9$를 거쳐 $9.9{\times}10^9$ dyne/${cm}^2$으로 변화하는 것을 알 수 있다. 따라서 liquid phase에서 solid phaserk 변화함에 따라 stress값이 증가하는 것을 알 수 있다.

• 한국표면공학회지
• /
• 제45권3호
• /
• pp.111-116
• /
• 2012

Oblique angle deposition (OAD) is a physical vapor deposition method which utilizes non-normal angles between the substrate and the vaporizing source. It has been known that tilting the substrate changes the properties of the film deposited on it, which was thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer Al films by magnetron sputtering. The magnetron sputtering source of 4 inch diameter was used to deposit the films. Al films have been deposited on Si wafers and cold-rolled steel sheets. The multilayer films were prepared by changing the tilting angle upside down at each layer interval, which means that when the first layer was deposited at an angle of $+45^{\circ}$, the second layer was deposited at an angle of $-45^{\circ}$, and vice versa. The microstructure, surface roughness and reflectance of the films were investigated using a scanning electron microscope, a surface profiler and a spectrophotometer, respectively. The corrosion resistance was measured and compared using the salt spray test. The single layer film prepared at an oblique angle of $60^{\circ}$ prepared at other angles. However, for the multilayer films, the film prepared at an oblique angle of $45^{\circ}$ showed the most compact and featureless structure. The multilayer films were found to exhibit higher corrosion resistance than the single layer films.

• 한국표면공학회지
• /
• 제45권3호
• /
• pp.106-110
• /
• 2012

Oblique angle deposition (OAD) is a physical vapor deposition where incident vapor flux arrives at non-normal angles. It has been known that tilting the substrate changes the properties of the film, which is thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer TiN films by cathodic arc deposition. TiN films have been deposited on cold-rolled steel sheets and stainless steel sheet. The deposition angle as well as substrate temperature and substrate bias was changed to investigate their effects on the properties of TiN films. TiN films were analyzed by color difference meter, scanning electron microscopy, nanoindenter and x-ray diffraction. The color of TiN films was not much changed according to the deposition conditions. The slanted and zigzag structures were observed from the single and multilayer films. The relation between substrate tilting angle (${\alpha}$) and the growth column angle (${\beta}$) followed the equation of $tan{\alpha}=2tan{\beta}$. The indentation hardness of TiN films deposited by OAD was low compared with the ones prepared at normal angle. However, it has been found that $H^3/E^2$ ratio of 3-layer TiN films prepared at OAD condition was a little higher than the ones prepared at normal angle, which can confirm the robustness of prepared films.

• 한국신뢰성학회지:신뢰성응용연구
• /
• 제17권1호
• /
• pp.78-82
• /
• 2017

Purpose: The purpose of this study is to evaluate failure characteristic and mechanism of four commercial water-repellent coatings for elevated temperature machinery applications. Method: Thermal degradation was performed for up to 64 thermal cycles. 1 cycle consists of 15 minute holding at 523K under 300rpm revolution and 15 minute-natural cooling. Contact angle was measured and microstructure of the coating layer was observed by using a scanning electron microscope. Results: Four kinds of commercial repellent coating showed hydrophobic or super-hydrophobic property implying that all coatings are suitable for room temperature application. Contact angle of three kinds of commercial coatings decreased rapidly after thermal exposure, while only one specimen having hydrophobic surface showed extremely slow degradation. Conclusion: Observed decrease in contact angle of the coatings were attributed to formation of macro-sized pores and disappearance of micro-protrusion during thermal exposure. Optimum water-repellent coating needs to be selected under the consideration of initial contact angle as sell as service temperature.

• 패션비즈니스
• /
• 제19권3호
• /
• pp.130-143
• /
• 2015

By studying 3-D virtual human modeling, motion-capturing and clothing simulation for easier and safer work clothes development, this research aimed (1) to categorize heavy manufacturing work motions; (2) to generate a 3-D virtual male model and establish painting work motions within a 3-D virtual clothing simulation system through computerized body scanning and motion-capturing; and finally (3) to suggest simulated clothing images of painting work clothes developed based on virtual male avatar body measurements by implementing the work motions defined in the 3-D virtual clothing simulation system. For this, a male subject's body was 3-D scanned and also directly measured. The procedures to edit a 3-D virtual model required the total body shape to be 3-D scanned into a digital format, which was revised using 3-D Studio MAX and Maya rendering tools. In addition, heavy industry workers' work motions were observed and recorded by video camera at manufacturing sites and analyzed to categorize the painting work motions. This analysis resulted in 4 categories of motions: standing, bending, kneeling and walking. Besides, each work motion category was divided into more detailed motions according to sub-work posture factors: arm angle, arm direction, elbow bending angle, waist bending angle, waist bending direction and knee bending angle. Finally, the implementation of the painting work motions within the 3-D clothing simulation system presented the virtual painting work clothes images simulated in a dynamic mode.

• 한국자기학회지
• /
• 제4권4호
• /
• pp.313-318
• /
• 1994

전자빔 증착 Co/Pt 다층박막에서 증발원자의 입사방향이 자기 및 자기광학적 성질에 미치는 영향을 조사하였다. 조성변조 Co/Pt 다층박막을 증발원자의 입사방향이 $0^{\circ},\;15^{\circ},\;30^{\circ},\;45^{\circ},\;60^{\circ}$이 되도록 하여 전자빔 증착법으로 제조한 후 x-ray 회절실험, 주사전자현미경으로 구조분석을 하였고, VSM, torque magnetometer, Kerr loop tracer를 사용하여 자기 및 자기광학적 성질을 조사하였다. x-ray 회절실험을 통해 모든 시료가 조성변조 다층박막 구조로 만들어졌음을 확인하였고, 입사각이 증가함에 따라 주상구조의 성장방향은 기판 수직선에서 벗어나지만 <111> 결정방향은 기판 수직선 가까이에 존재함이 관찰되었다. 포화자화값 $M_{s}$, Kerr회전각 ${\theta}k$는 입사각이 증가하면 줄어들었는데 이는 박막의 밀도 감소 때문이다. 자기이방성 또한 입사각의 증가에 따라 줄어들었다.