Measurement of Grating Pitch Standards using Optical Diffractometry and Uncertainty Analysis
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Kim Jong-Ahn
(한국표준과학연구원 기반표준부 길이/시간그룹)
Kim Jae-Wan (한국표준과학연구원 기반표준부 길이/시간그룹) Park Byong-Chon (한국표준과학연구원 기반표준부 길이/시간그룹) Kang Chu-Shik (한국표준과학연구원 기반표준부 길이/시간그룹) Eom Tae-Bong (한국표준과학연구원 기반표준부 길이/시간그룹) |
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