• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2013.05a
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• pp.531-533
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• 2013

In this paper, to study the IPMC (Ionic exchange Polymer Metal Composite) material consisting of a sulfonic acid ion and fluoride combination of carbon with Nafion film greatly affected the electro-active polymer (Electro Active Polymer) characteristics and the presence of water and cationshave properties. Use or electrical energy into mechanical energy, mechanical energy, electrical energy, and can be utilized to its characteristics, depending on the water and cations in water varies greatly. Configure the device simulations in order to study the electrical properties of these IPMC. Stepper Motor using MCU and simulator designed for the electrical characterization due to the movement and to the implementation of the mechanical movement of ocean currents. In this study, configuration the IPMC and simulation device to the area of the IPMC to the efficient use of energy currents, frequency, salinity concentration, through the efficient use of the IPMC due to the bend angle of the electrical analysis and research methods we propose.

• Korean Journal of Optics and Photonics
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• v.4 no.2
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• pp.157-161
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• 1993

An optical autofocus system for a DUV KrF excimer laser wafer stepper was developed by using the PSD (Position Sensitive Detector) as the position sensor. The laser beam was incident on the surface of wafer and the reflected beam was magnified optically by a lens. And the beam was directed onto the surface of PSD by a mirror system. The spatial resolution of the autofocus system was found to be $0.03{\mu}m$.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1766-1767
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• 2011

본 논문에서는 기존의 proportional-integral-derivative (PID) 제어기의 이득조정과정에서 linear quadratic regulator(LQR)을 이용하여 이득조정을 하는 방법을 제안한다. 제안된 제어기의 이득은 LQR의 수식으로 표현되어지며 Matlab/simulink을 이용한 모의실험을 통해 위치프로파일에 대한 위치추종오차의 성능이 평가되어진다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1186-1189
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• 2004

A new pump used in arthroscopy surgery was developed. The pump is driven by pneumatic air compressor and controlled by a stepper motor connected to an air regulator. Pressure control performance was observed to be similar compared to commercially available artheroscopy pumps. However, pressure pulses observed in the commercial pumps driven by multiple rollers disappeared in the pneumatically driven pump. The new pump required containers to enclose and squeeze saline solution packs. A dramatic saving in manufacture cost is expected considering the simple pneumatic drive used in this pump.

• Journal of information and communication convergence engineering
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• v.8 no.1
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• pp.95-98
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• 2010

The Electro Magnetic (EM) Acceleration and Deceleration (ACC/DCC) system of the Ferromagnetic Ball(FB) is the linear motor's final structural development which can be used for devices that conserve energy, gaming or rail gun. By accelerating the FB within the coil structure, it is difficult to utilize the FB's magnetizing feature via the ACC/DCC system. There is much monopole space inside the monopole coil. By using this particular feature of the FB, starting coil and Monopole Coil Structure (MCS) can be structurally separated and another simple electric related control system can be experimented for further development. For the purpose of development a review is needed of the control system of both basic stepper motor and BLDC motor.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.3
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• pp.23-31
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• 2005

The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.192-197
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• 1993

반도체 기억소자의 급격한 발전추세에 대응하기 위해서는 노광(exposure) 장비의 증첩정밀도 (overlay accuracy)가 같이 개선되어야 한다. 본 연구에서는 64M ERAM 제조를 목적으로개발된 스텝 퍼(stepper) 시스템의 성능평가 항목 중에서 증첩정밀도에대한 측정방법 및 현재까지의 연구결과를 기술하였다. 제작된 웨이퍼 정렬계는 off-axis 및 TTL 광학계와 이들 정렬신호에 따라 움직이는 웨이 퍼 구동계로 구성되어 있다. off-axis 광학계는 화상처리와 회절의 두 가지 방식이 가능하도록 설계 제작되었으며, TTL 광학계는 dual beam interferometric method를 이용하였다. 본 실험의 결과는 웨이퍼 정렬계의 특성을 평가한 것으로서, 현재까지 off-axis 정렬 방법만으로 얻은 증첩정밀도는 0.26-0.29$\mu$m (m+3 $\sigma$ )이다. 따라서 여기에 이미 제작되어 있는 TLL 정렬광학계를 추가로 사용하면 0.1 $\mu$m 이하의 정밀도에 이를 것으로 예측된다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.836-841
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• 2002

This paper is concerned with the development of remote control and measurement systems system using the internet. Recently, various techniques are developed based on the advance of the internet environment. In this study, we developed the remote control and measurement system using the internet server programming technique, stepper motor control and the data acquistion programming techniques. Hence, we can perform measurement and control remotely. The feasibility of the system is validated using the experimental setup. A personal computer is equipped with the stepping motor controller which control the weight and the A/D board which measures the strain of the beam, server program was then installed on the PC and can be accessed through internet.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2001.05a
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• pp.213-216
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• 2001

A micro hole punching system was developed and micro holes of 100m in diameter were successfully made on brass sheets of loom in thickness. A micro punch made of tungsten carbide was designed to withstand the punch load, considering the buckling and the bending moment due to possible misalignment error. The punch was fabricated by the grinding process with diamond wheel. The die was designed considering the punch load and fabricated by micro electrodischarge machining process. In this system the stripper is designed to guide punch tip to minimize the possible misalignment. The punch was installed on a vertical stepper and the die was mounted on an X-Y translation unit. The precision motion controller controlled all motions of the micro hole punching system. In this study technical difficulties and solutions in the micro hole punching process were also discussed.