• 제목/요약/키워드: SLS crystallization

검색결과 28건 처리시간 0.028초

레이저 결정화 방법을 적용한 3차원 적층 CMOS 인버터의 전기적 특성 개선 (Electrical characteristics of 3-D stacked CMOS Inverters using laser crystallization method)

  • 이우현;조원주;오순영;안창근;정종완
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.118-119
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    • 2007
  • High performance three-dimensional (3-D) stacked poly-Si complementary metal-oxide semiconductor (CMOS) inverters with a high quality laser crystallized channel were fabricated. Low temperature crystallization methods of a-Si film using the excimer-laser annealing (ELA) and sequential lateral solidification (SLS) were performed. The NMOS thin-film-transistor (TFT) at lower layer of CMOS was fabricated on oxidized bulk Si substrate, and the PMOS TFT at upper layer of CMOS was fabricated on interlayer dielectric film. The 3-D stacked poly-Si CMOS inverter showed excellent electrical characteristics and was enough for the vertical integrated CMOS applications.

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Channel Orientation Dependent Electrical Characteristics of Low Temperature Poly-Si Thin-film Transistor Using Sequential Lateral Solidification Laser Crystallization

  • Lai, Benjamin Chih-ming;Yeh, Yung-Hui;Liu, Bo-Lin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1263-1265
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    • 2007
  • The electrical characteristics of low temperature poly-Si (LTPS) thin-film transistors (TFT) with channel parallel and perpendicular to the direction of lateral growth were studied. The poly-Si film was crystallized using sequential lateral solidification (SLS) laser crystallization technique. The channel orientation dependent turn-on characteristics were investigated by using gated-diodes and capacitance-voltage measurements

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Recent advances in excimer-laser-based crystallization for active-matrix displays

  • Turk, Brandon A.;Herbst, Ludolf;Simon, Frank;Paetzel, Rainer
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.12-15
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    • 2007
  • Excimer-laser-based crystallization is ideallysuited for forming crystalline Si films on glass substrates for use in active-matrix displays. In this paper, we will report on recent and significant technical advances in light sources and beam delivery systems targeted at enabling ultra-uniform mura-free low-temperature polycrystalline silicon active-matrix backplanes while simultaneously lowering production costs and increasing throughput.

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Sodium Lignosulfonate 표면처리가 탄산칼슘/폴리프로필렌 복합체에서 탄산칼슘의 분산에 미치는 영향 (Effect of Sodium Lignosulfonate Treatment on the Dispersion of CaCO3 in CaCo3/Polypropylene Composite)

  • 송준영;곽영제;정영진
    • 폴리머
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    • 제39권3호
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    • pp.382-387
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    • 2015
  • 본 연구에서는 탄산칼슘($CaCO_3$)의 폴리프로필렌에 분산과 탄산칼슘 입자의 크기가 폴리프로필렌의 결정성에 미치는 영향을 연구하였다. 무기물로 충전된 고분자복합재료는 일반적으로 취성(brittleness)의 문제를 가지고 있으며, 이러한 문제는 주로 무기물입자의 크기와 분산에 의해서 영향을 받는다. 따라서 탄산칼슘의 분산성을 향상시키기 위한 방법으로 sodium lignosulfonate(SLS)의 함량을 달리하면서 탄산칼슘을 전처리하고 이에 따른 분산효과를 고찰하였다. 그 결과 3 wt%의 SLS로 처리된 탄산칼슘은 미처리 탄산칼슘에 비해 우수한 분산성을 보였으며, 열분석에서도 빠른 결정형성능을 보였다. 이러한 결정형성능은 탄산칼슘 입자의 크기에 의해서도 영향을 받았으며, 입자의 크기가 커지면 용융과 결정화 과정에서의 엔탈피 출입이 줄어드는 것으로 관찰되었다. 이러한 결과들은 무기물 고분자복합재료의 취성을 해결할 수 있는 단서를 제공한다고 할 수 있겠다.

SLS of Si Films on Polymer Substrates;Materials and Devices

  • Limanov, A.B.;Wilt, P.C. van der;Kane, M.G.;Firester, A.H.;Goodman, L.;Lee, J;Abelson, J.R.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.491-494
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    • 2006
  • A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs. In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

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(100) Textured Si Films with Controlled Microstructures Obtained via Hybrid SLS

  • Wilt, P.C. Van Der;Chitu, A.M.;Turk, B.A.;Chung, U.J.;Limanov, A.B.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.768-771
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    • 2006
  • Uniformity and performance characteristics of LTPS TFTs are important parameters for making advanced active-matrix displays. In this paper, we describe an SLS-based crystallization approach for producing orientation-controlled Si films with reduced concentrations of planar defects that stand to potentially deliver unprecedented levels of device uniformity and performance. Specifically, a 2-step process referred to as hybrid SLS has been developed that produces a variety of high-quality {100} surface-oriented Si films.

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Excimer Laser-induced Crystallization of Si Films for Manufacturing LTPS TFT-based Displays

  • Chung, U.J.;Limanov, A.B.;Wilt, P.C. Van Der;Chitu, A.M.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.7-7
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    • 2007
  • Laser-irradiation-induced crystallization of as-deposited amorphous precursor films constitutes an integral step in fabricating LTPS TFTs. Consideration of various factors leads one to conclude that, for display manufacturers, choosing how to crystallize the films can be identified as being tactically and strategically significant. This paper will begin by reviewing the fundamental aspects of laser crystallization, and then present noteworthy advances and progress, which have recently been accomplished in the field. In particular, we will focus on communicating the evolving status associated with the sequential lateral solidification (SLS) method, which can be presently identified as the most strategically enabling crystallization method.

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야자경화유를 이용한 Interesterification 반응 중의 고체지 함량 변화 (Change of solid fat index during interesterification of hydrogenated coconut oil)

  • 신정아;배상균;이기택
    • 농업과학연구
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    • 제37권1호
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    • pp.69-72
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    • 2010
  • This study explored the solid fat index (SFI) of structured lipids (SLs) synthesized by lipase-catalyzed (Lipozyme TLIM) interesterification using hydrogenated coconut oil (HCO), palm oil (PO) and palm stearin solid (PSS). SLs were produced using three blends of HCO/PO (60:40, w/w), HCO/PSS (40:60 and 60:40, w/w), and HCO/PO/PSS (32:48:18, w/w/w) to find a desirable confectionary fat by monitoring melting and crystallization behaviors of SFI of SLs using differential scanning calorimetry (DSC). SFI of HCO/PSS (60:40) and HCO/PO/PSS (32:48:18) at $25^{\circ}C$ were 70% and 68%, respectively. These results suggest that HCO/PSS (60:40) and HCO/PO/PSS (32:48:18) may be useful as potential SLs of a confectionary fat.

Development of World's Largest 21.3' LTPS LCD Using Sequential Lateral Solidification (SLS) Technology

  • Kang, Myung-Koo;Kim, H.J.;Chung, J.K.;Kim, D.B.;Lee, S.K.;Kim, C.H.;Chung, W.S.;Hwang, J.W.;Joo, S.Y.;Maeng, H.S.;Song, S.C.;Kim, C.W.;Chung, Kyu-Ha
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.241-244
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    • 2003
  • The world largest 21.3" LTPS LCD has been successfully developed using SLS crystallization technology. Successful integration of gate circuit, transmission gate and level shifter was performed in a large area uniformly. Uniformity and high performance from high quality grains of SLS technology make it possible to come true a uniform large size LTPS TFT-LCD with half number of data driver IC's used in typical a-Si LCD. High aperture ratio of 65% was obtained using an organic inter insulating method, which lead a high brightness of 500cd/cm2.

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