• Title/Summary/Keyword: SLS

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Formation of single-crystal Si islands via continuous-scan Sequential Lateral Solidification

  • Turk, B.A.;Wilt, P.C. var der;Limanov, A.B.;Chitu, A.M.;Im, J.S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.245-247
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    • 2003
  • We have previously shown that single-crystal Si regions on glass substrates can be obtained by crystallizing as-deposited a-Si films using a specific version of the SLS process, referred to as dot-SLS Such single-crystal islands can, for instance, be used for manufacturing of high-performance TFTs that are expected to become increasingly more relevant in the future. In this paper, we demonstrate that the dot-SLS process can be implemented using a continuous-scan SLS scheme that enables the attainment of high crystallization rates that are desired for industrial applications. We will furthermore report on recent experimental findings regarding the nature of the defects that can be created during the process.

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Optimization of Build Parameters in SLS Process (SLS의 공정 파라미터 최적화에 관한 연구)

  • Heo, Seong-Min;O, Do-Geun;Choe, Gyeong-Hyeon;Lee, Seok-Hui
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.3 s.174
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    • pp.769-776
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    • 2000
  • RP(Rapid Prototyping) technology is gaining its popularity in building a prototype in all industries. SLS(Slective Laser Sintering) is one of RP technologies, which is focused on tooling processes as well as three dimension solid model. There are several factors, the length and the cross-sectional area of a part, that have an effect on build setup in SLS process. In this paper, the computation on geometrical relationship is used to slice STL file and to estimate these factors. Based on these values, the build setup parameters such as the heating temperature, the laser power, and the powder cartridge feed rate are determined by neural network approaches. The test results show that the computation time is saved and the neural network approach is able to apply to get the optimal parameters of build process within an acceptable error rate.

Fabrication of Microcantilever Ultrasound Sensor and Its Application to the Scanning Laser Source Technique

  • Sohn, Young-Hoon;Krishnaswamy, Sridhar
    • Journal of the Korean Society for Nondestructive Testing
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    • v.25 no.6
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    • pp.459-466
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    • 2005
  • The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects, By monitoring the amplitude and frequency changes of the ultrasound generated as the SLS scans over a defect, the SLS technique has provided enhanced signal-to-noise performance compared to the traditional pitch-catch or pulse-echo ultrasonic methods, An extension of the SLS approach to map defects in microdevices is proposed by bringing both the generator and the receiver to the near-field scattering region of the defects, To facilitate near-field ultrasound measurement, silicon microcantilever probes are fabricated using microfabrication technique and their acoustical characteristics are investigated, Then, both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.

Low Temperature Sequential Lateral Solidification(SLS) Poly-Si Thin Film Transistor(TFT) with Molybdenum Gate (Molybdenum 게이트를 적용한 저온 SLS 다결정 TFT 소자 제작과 특성분석에 관한 연구)

  • Kho, Young-Woon;Oh, Jae-Young;Kim, Dong-Hwan;Pak, Jung-Ho
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.2014-2016
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    • 2002
  • Liquid crystal displays(LCDs)의 스위칭 소자로써 thin film transistors(TFTs)를 적용하기 위해서 저온 공정이 가능하도록 molybdenum 금속을 게이트에 사용하여 저온 다결정 TFTs 소자를 제작하였다. 또한, 채널 길이 방향으로 결정을 성장시켜 결정립이 큰 다결정 실리콘을 얻을 수 있는 sequential lateral solidification(SLS) 결정화 방법을 사용하였다. SLS-TFT 소자를 $2{\mu}m$에서 $20{\mu}m$까지의 다양한 채널 길이와 폭으로 제작한 후 각 소자들의 I-V 특성 곡선과 소자의 물성 분석을 위해 필요한 변수들을 구하여 이들의 전기적인 특성을 비교, 분석하였다. 제작된 소자들로부터 측정된 이동도는 $100{\sim}400Cm^2$/Vs, on/off 전류비는 약 $10^7$, off-state 전류는 약 $100{\times}10^{-12}A$로 대체적으로 우수한 특성을 보였다.

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ELA Poly-Si과 SLS Poly-Si에서 Boron Activation에 관한 연구

  • Hong, Won-Ui;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.376-376
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    • 2012
  • 본 연구는 Poly-Si에 이온 주입된 Boron의 Activation 거동을 연구하고자 SLS (Sequential Lateral Solidification) Poly-Si과 ELA (Excimer Laser Annealing) Poly-Si의 활성화 거동을 비교 분석하였다. SLS 및 ELA 결정화 방법으로 제조된 Poly-Si을 모재로 비 질량 분리 방식의 ISD (Ion Shower Doping) System을 사용하여 2.5~7.0 kV까지 이온주입 하였다. 이온주입 후 두 가지의 열처리 방법, 즉, FA 열처리(Furnace Annealing)와 RTA 열처리(Rapid Thermal Annealing)를 사용하여 도펀트 활성화 열처리를 수행하고 이온주입 조건 및 활성화 열처리 방법에 따른 결함 회복 및 도펀트 활성화 거동의 변화를 관찰하였다. TRIM-code Simulation 결과 가속 이온 에너지와 조사량이 증가 할수록 이온주입 시 발생하는 결함의 양이 증가하는 것을 정량적으로 계산하였다. 실험 결과 결함의 양이 증가 할수록 Activation이 잘되는 것을 관찰할 수 있었다. SLS Poly-Si에 비하여 ELA Poly-Si의 경우 도펀트 활성화 열처리 후 활성화 효율이 높게 나타났다. 본 결과는 Grain Boundary의 역할과 밀접한 관계가 있으며 간단한 정성적인 Model을 제시하였다. 활성화 효율의 경우 RTA 열처리 시편이 FA 시편에 비하여 높은 것이 관찰되었다. 본 결과는 열처리 온도 및 시간에 따라 변화하는 Boron의 특이한 활성화 거동인 Reverse Annealing 효과에 기인하는 것으로 규명되었다.

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Characterization for selective laser sintered Fe-Cr powder (SLS 공정을 이용한 Fe-Cr 분말의 적층에 관한 연구)

  • Son, Y.M.;Jang, J.J.;Joo, B.D.;Sung, M.Y.;Moon, Y.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.05a
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    • pp.282-285
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    • 2009
  • Selective laser sintering (SLS) is a fast growing process of rapid production fur metallic based parts. To restore damaged mold surface using SLS, single layer experiments of $20{\mu}m$ Fe-Cr powder was performed under various heat input. Process window of $20{\mu}m$ Fe-Cr powder provided feasible process parameters for the smooth regular surface. To estimate coherence between melted powder and basematal, tendency of hardness distribution has been observed. Hardness of melted zone and remelted zone was diversified from 5GPa to 6.5GPa. It is over 2 times compared of hardness of basemetal. Average surface roughness of each direction on surface of melted powder was measured. Experimental results show that the mold restoring process using SLS can be successfully applied in the mold repair industry.

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Effect of Surfactants on Dissolution Rate of Mefenamic Acid Capsules (메페남산 캅셀의 용출에 미치는 계면활성제의 영향)

  • Jun, Young-Bin;Kim, Seung-In;Kim, Young-Il
    • Journal of Pharmaceutical Investigation
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    • v.20 no.3
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    • pp.121-127
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    • 1990
  • Mefenamic acid has been widely used clinically as an anti-inflammatory analgesic. It has poor solubility in water $(41\;{\mu}g/ml)$ and there is the difficulty of dissolution in the mefenamic acid capsules. A study was made to investigate the effect of various surfactants on the dissolution of mefenamic acid capsules. The surfactants used were sodium lauryl sulfate (SLS), Pluronic F-68, F-77, and F-127. Mefenamic acid capsule containing surfactant showed significantly improved dissolution characteristics. The dissolution rate was fast in the order of SLS > F-77 > F-68 > F-127 in mefenamic acid capsules containing 0.2 w/w % surfactant. SLS was selected for further study on the bioavailability in rabbits. The area under the plasma concentration-time curve $(AUC_{0-24})$ of mefenamic acid capsule containing SLS was higher than one of mefenamic acid capsule not containing surfactant.

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SLS Technology for High Performance Poly-Si TFTs and Its Application to Advanced LCD and SOG

  • Ryu, Myeong-Gwan;Son, Gon;Kim, Cheon-Hong;Lee, Jeong-Yeol
    • Electrical & Electronic Materials
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    • v.19 no.9
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    • pp.11-19
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    • 2006
  • SLS crystallization and CMOS LTPS process have been developed for high performance and uniform characteristics. By strictly optimizing SLS optics in conventional 2 shot SLS process, threshold voltage variation of 720 pixel TFTs in 2.2-inch QVGA panel (240xRGB) was remarkably decreased from 1.89 V to 0.56 V of 3sigma value. Mobility of the channel doped NTFT and PTFT for circuits were $146\;and\;38cm^{2}/Vs$, respectively. Functional unit circuits for SOG were also fabricated and properly operated.

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Condition Setting for Oral Mucosal Irritation Evaluation using Hamster Cheek Pouch (햄스터 볼주머니를 이용한 구강점막 자극평가 조건설정)

  • Park, Kyo-Hyun;Kim, Kwang-Mahn;Kim, Bae-Hwan
    • Journal of Environmental Health Sciences
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    • v.41 no.6
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    • pp.405-411
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    • 2015
  • Objectives: The purpose of this study is to evaluate the optimum conditions for oral mucosal irritation testing using the buccal pouch of hamsters. Methods: Test materials were applied to the buccal pouch of seven-week old male Syrian hamsters (SLC, Japan) four times at one-hour intervals and macroscopic changes were examined at 24 hours after final treatment. After sacrifice, the buccal pouches were removed and prepared for histopathological evaluation. In order to set the exposure time, we performed exposure tests of 5, 12, 18 and 23 minutes using sodium lauryl sulfate (SLS) 1% and set the treatment volume from the test results at 2, 3, or 4 ml treatment using SLS 1%, Triton X-100 1% and ethanol. After setting the experimental conditions, seven groups of materials [sodium lauryl sulfate (SLS) (1%), Triton X-100 (1%), hydrogen peroxide (3%), ethanol (100%), chlorhexidine (0.2%, 2%), phosphate buffer saline (PBS)] were assessed. Results: Experimental conditions of material exposure time were fixed as 18 minutes from the exposure tests of 5, 12, 18 or 23 min using sodium lauryl sulfate (SLS) 1%. Treated volume was set as 4 ml per each pouch from the test results of 2, 3, or 4 ml treatments using SLS 1%, Triton X-100 1% and ethanol. The results in terms of irritation degree were in the order of sodium lauryl sulfate (SLS) (1%) > Triton X-100 (1%) ${\fallingdotseq}$ hydrogen peroxide (3%) > ethanol (100%) ${\fallingdotseq}$ chlorhexidine (0.2%, 2%) > phosphate buffer saline (PBS). Conclusion: From this study, suitable conditions for hamster mucosal irritation testing were suggested and this method was verified through materials commonly used on oral mucosal membranes.

A Study on Variations of Halitosis According to Sodium Lauryl Sulfate Content of Toothpaste (세치제의 Sodium Lauryl Sulfate 함유정도에 따른 구취변화)

  • Jeong, Hwa-Young;Jeong, Sang-Hee;Jeong, Mi-Ae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.11 no.8
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    • pp.2935-2941
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    • 2010
  • This study used 3 kinds of experimental toothpaste with different contents(0%, 1.1%,2.2% of SLS. A total of 150 young adults in their 20's without any systemic disease were recruited for the study. These 150 subjects were subdivided into three groups(each having 50 subjects) according to the results of preliminary oral examination.After 4 weeks application of the three groups of toothpaste, Group C showed the highest halitosis index, followed by Groups A and B which had similar halitosis indices. Both oral sulfur compound and aerobic sulfur compound were measured at high content possibly because higher SLS content which is associated with the lower salivary flow rate is causing the xerostomia. SLS content was correlated with oral sulfur compound (r=0.412) and aerobic sulfur compound (r=0.285).