• Journal of Korean Society for Atmospheric Environment
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• v.28 no.4
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• pp.446-453
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• 2012

Destruction and removal efficiency (DRE) of $SF_6$ was tested with varying degrees of ionization and initial concentrations of $SF_6$. The applied dose of ionization energy varied from 0 to 400 kGy. The initial concentration of $SF_6$ gas also varied from 1,000 ppm to 2,500 ppm. In order to assess the effect of a residence time on DRE (Destruction and Removal Efficiency, %), experiments were also conducted at different irradiation times of 3, 5, 10, 15, and 20 sec, respectively. The DRE of $SF_6$ increased with an increasing amount of dose and current. Regardless of initial concentration of $SF_6$, 90% level of DRE was achieved by applying over 10 mA of electrical current.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.122.2-122.2
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• 2011

Sulfur hexafluoride ($SF_6$), one of the most potent greenhouse gases, is known as a hydrate former and has been studied at the high pressure up to 1.3 GPa with gas mixtures and with aqueous surfactant. Since we regard $SF_6$ as a potential promoter molecule that can stabilize hydrate structure more effectively compare to the other promoters, further investigation is required to verify the stabilizing ability of $SF_6$ in the hydrate structure. However, the insoluble nature of $SF_6$ in water or gases hinders fine scale analyses. This work discusses the data obtained by using molecular dynamics simulations of structure II (sII) clathrate hydrates containing $SF_6$ and $H_2$. The simulations were performed using the TIP4P/Ice model for water molecule and a previously reported $SF_6$ molecular model (optimized at the pure $SF_6$ single phase system (Olivet and Vega, 2007)), and a $H_2$ molecular model (adapted from the THF+$H_2$ hydrate system (Alavi et al., 2006)). The simulations are performed to observe the stability of $SF_6$ and $H_2$ in the sII clathrate hydrate system with varying temperature and pressure conditions and occupancies of $SF_6$ and $H_2$, which cannot be easily tuned experimentally. We observe that stability of H2 enclathrated in the hydrate structure more affected by the occupancy of $SF_6$ molecules and temperature than pressure, which ranges from 1 to 100 bar.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1582-1583
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• 2011

Recently, it has been found that trifluoroiodomethane ( $CF_3I$) gas can replace $SF_6$ gas as a prospective substitute gas. For quantitative understanding of gas discharge phenomena, we should know electron collision cross sections and electron transport coefficients. Using electron collision cross sections of $CF_3I$ and Xe, we calculated elecron drift velocity, longitudinal coefficient, effective ionization coefficient in $CF_3I$-Xe mixtures using a two-term approximation of the Boltzmann equation. We also compared the electron transport coefficients in pure gas and those of 10%, 20%, 50%, and 70% $CF_3I$-Xe mixture gases. The present data may be showed appropriate ratios of $CF_3I$-Xe mixture gas for replacing the $SF_6$ gas.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.12
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• pp.2199-2201
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• 2008

Sulfur hexafluoride($SF_6$) is a gaseous dielectric used in high voltage electrical equipment such as an insultor or arc quenching medium in the transmission and distribution of electricity. however, $SF_6$ is one of the greenhouse gases(GHG) with a global warming potential that is 23,900 times greater than that of carbon dioxide($CO_2$). for this reason, $SF_6$ emissions in electric equipment shall be controlled to reduce GHG and improve cost-effective use of $SF_6$ for economical benefits. Until recently there has not been any investigation on $SF_6$ emission characteristics and inventory in Korea. To understand emission characteristics during the use-phase, the scope of this study was limited to the following closed pressure system equipment from 10 substations in Korea. This study highlights (1) the investigation of sampling/analysis methodology for $SF_6$ emissions in high voltage equipment, (2) the estimation of $SF_6$ emissions in the use-phase, and (3) the comparison between the emission ratio and the mass-balance applied to inventory study. According to this study, the majority of emissions were related to electric equipment nameplates and the rest of the emissions were related to the handling of $SF_6$ during operations. from this result, emission ratios estimated from this study were similar; GIS was 14% and GCB was 13%, as maintenance process conditions were the same as manual process conditions for both equipment.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1999.11a
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• pp.168-171
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• 1999

This paper describes the influence of conducting particle within the coaxial cylindrical electrodes gap under alternating voltage condition investigated using charge simulation method. If the conducting particles precent in the gas insulated system, they can cause decrement of breakdown voltage. Thus, three dimensions computations of electric fields and electrostatic forces have been carried out according to particle location. The results show a good agreement with those of outside country, which can offer a practical reference on the insulation design of domestic GIS.

• 전기의세계
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• v.41 no.4
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• pp.27-34
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• 1992

절연가스 봉입식 변압기는 변압기 TANK내에 절연 및 냉각매체로서 종래의 절연유 대신에 절연가스를 봉입한 것으로서 절연가스는 절연내력이 높을것, 열적으로 안정하고 불황성일것, 불연성일것, 인체에 무해할것, 열전달 특성이 우수할 것등의 성질이 요구되며 이와 같은 성질을 잘 만족시키는 SF6 가스가 사용되고 있다. 따라서 SF6 GAS 절연변압기는 고장으로 인해서 변압기는 고장으로 인해서 변압기 내부가 이상고온으로 되더라도 화재발생의 우려가 없고 주변의 환경에 피해를 주지 않으므로 시내나 건물의 지하등에 설치하는데 적절하다.

• Membrane Journal
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• v.22 no.1
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• pp.23-34
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• 2012

In this study, we investigated the permeation property of single gases ($N_2$, $O_2$, $SF_6$, $CF_4$ through hollow fiber polymeric membrane (PSF, PC, PI) as a function of pressure and temperature to decide operating condition for $SF_6$ gas separation process. The results showed the gas permeation varied differentlydepending on the properties of gases and membrane. When permeance of each gases was represented as a function of temperature and pressure in 3 dimensional space, the surface of permeance was shown approximately flat. Thus, we established permeance models with forms of first-and second-order polynomial. These two models showed high goodness of fit. This indicates that the two polynomial models have enough applicability to predict the gas separation process.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2007.11a
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• pp.221-223
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• 2007

산업현장에서 많이 사용되고 있는 전력기기에 결함이 발생하면 치명적인 사고로 진전되어 경제적, 인적 손실이 발생될 수 있다. 본 논문은 현재 대전력기기에서 많이 사용되는 $SF_6$ 절연가스의 압력 변화에 따른 부분방전을 모의하고, UHF법을 이용한 모의 GIS 내부 부분방전 신호 측정 및 접지 전류를 측정하여 부분방전 시 방사되는 방사전자파의 스펙트럼 특성과 접지 전류 파형 특성을 분석하여, 챔버 내의 압력 변화가 $SF_6$ 가스 부분방전에 미치는 영향을 측정하였다. 이러한 연구는 현장 GIS 및 $SF_6$ 가스 절연 전력설비에서 내부 압력 변화가 원인이 되어 발생되는 절연파괴 사고의 방지에 중요한 역할을 할 것으로 사료된다.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2005.05a
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• pp.155-158
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• 2005

산업현장에서 많이 사용되고 있는 전력기기에 결함이 발생하면 치명적인 사고로 진전되어 경제적, 인적 손실이 발생될 수가 있다. 본 논문은 GIS에 사용되는 절연가스인 $SF_6$의 압력 변화에 따른 부분 방전을 모의하고, 발생되는 부분방전 신호를 절연 진단 방법 중 하나인 UHF법을 이용하여 부분방전 시 방사되는 방사전자파의 스펙트럼을 분석해 금속이물질이 $SF_6$가스 부분방전에 미치는 영향을 측정하였다. 이러한 연구는 현장 GIS 및 $SF_6$ 가스절연 전력설비에서 내부압력 변화 시 금속이물질에 의해 발생되는 절연파괴 사고의 방지에 중요한 역할을 할 것으로 사료된다.