• 전기의세계
• /
• v.28 no.4
• /
• pp.39-46
• /
• 1979

The effective ionization coefficient in $SF_{6}$/$N_{2}$ mixtures was attempted to derive from the pure gases. Measurements of static breakdown voltage were made under the uniform field at pressures up to 4 bar in order to compare with the results obtained from this assumption. The relative performance of $SF_{6}$/$N_{2}$ mixtures to pure $SF_{6}$ was also investigated. The effect of surface roughness on discharge thresholds in $SF_{6}$/$N_{2}$ mixtures was calculated employing the simplified model and mesurements of breakdown voltages for a gap with an artificial protrustion were also made. The experimental results show that the effective ionization coefficient in gas mixtures can not be reliably estimated from the values measured for the pure gases. Therefore, basic parameters for $SF_{6}$/$N_{2}$ mixtures must be measured by investigation of the mixtures themselves. The relative performance of mixtures to pure $SF_{6}$ could be considered with the values of pR.

• JOURNAL OF ELECTRICAL WORLD
• /
• no.2 s.134
• /
• pp.59-62
• /
• 1988

• Proceedings of the KIEE Conference
• /
• 1999.11d
• /
• pp.867-869
• /
• 1999

In this study, $SrBi_{2}Ta_{2}O_{9}$(SBT) thin films were etched as a function of $SF_6$/Ar gas mixing ratio in magnetically enhanced inductively coupled plasma(MEICP) system fer a fixed rf power, dc-bias voltage, and chamber pressure. The etch rate of SBT thin film was $1500{\AA}/min$ and the selectivities of photoresist (PR) and $SiO_2$ to SBT thin film were 0.48 and 0.62, respectively when the samples were etched at a rf power of 600W, a dc-bias voltage of -150V, a chamber pressure of 10 mTorr and a gas mixing ratio of $SF_6/(SF_6+A)$=0.1. In order to examine the chemical reactions on the etched surface, X-ray photoelectron spectroscopy(XPS) and secondary ion mass spectrometry(SIMS) were done.

• Korean Journal of Materials Research
• /
• v.19 no.2
• /
• pp.68-72
• /
• 2009

This study investigated dry etching of acrylic in capacitively coupled $SF_6$, $SF_6/O_2$ and $SF_6/CH_4$ plasma under a low vacuum pressure. The process pressure was 100 mTorr and the total gas flow rate was fixed at 10 sccm. The process variables were the RIE chuck power and the plasma gas composition. The RIE chuck power varied in the range of $25{\sim}150\;W$. $SF_6/O_2$ plasma produced higher etch rates of acrylic than pure $SF_6$ and $O_2$ at a fixed total flow rate. 5 sccm $SF_6$/5 sccm $O_2$ provided $0.11{\mu}m$/min and $1.16{\mu}m$/min at 25W and 150W RIE of chuck power, respectively. The results were nearly 2.9 times higher compared to those at pure $SF_6$ plasma etching. Additionally, mixed plasma of $SF_6/CH_4$ reduced the etch rate of acrylic. 5 sccm $SF_6$/5 sccm $CH_4$ plasma resulted in $0.02{\mu}m$/min and $0.07{\mu}m$/min at 25W and 150W RIE of chuck power. The etch selectivity of acrylic to photoresist was higher in $SF_6/O_2$ plasma than in pure $SF_6$ or $SF_6/CH_4$ plasma. The maximum RMS roughness (7.6 nm) of an etched acrylic surface was found to be 50% $O_2$ in $SF_6/O_2$ plasma. Besides the process regime, the RMS roughness of acrylic was approximately $3{\sim}4\;nm$ at different percentages of $O_2$ with a chuck power of 100W RIE in $SF_6/O_2$ plasma etching.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 2007.11a
• /
• pp.39-43
• /
• 2007

In this paper the experiments of breakdown characteristics $SF_6$ liquid ($LSF_6$) in model GIS(Gas Insulated Switchgear) were described. From the experiments results, The ability of $LSF_6$ insulation is higher than high-pressurized $SF_6$ gas. The breakdown characteristics of $LSF_6$ were produced by bubble formed evaporation of $LSF_6$ and bubble caused by high electric emission. It is considered in this paper that the results are fundamental data for electric insulation design of superconductor and cryogenic equipments machinery which will be studied and developed in the future.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 2008.10a
• /
• pp.261-264
• /
• 2008

In this paper the experiments of breakdown characteristics $SF_6$ liquid ($LSF_6$) in model GIS(Gas Insulated Switchgear) were described. From the experiments results, The ability of $LSF_6$ insulation is higher than high-pressurized $SF_6$ gas. The breakdown characteristics of $LSF_6$ were produced by bubble formed evaporation of $LSF_6$ and bubble caused by high electric emission. It is considered in this paper that the results are fundamental data for electric insulation design of superconductor and cryogenic equipments machinery which will be studied and developed in the future.

• Proceedings of the KIEE Conference
• /
• 2007.07a
• /
• pp.252-253
• /
• 2007

In this paper the experiments of breakdown characteristics $SF_6$ liquid ($LSF_6$) in model GIS(Gas Insulated Switchgear) were described. From the experiments results, The ability of $LSF_6$ insulation is higher than high-pressurized $SF_6$ gas. The breakdown characteristics of $LSF_6$ were produced by bubble formed evaporation of $LSF_6$ and bubble caused by high electric emission. It is considered in this paper that the results are fundamental data for electric insulation design of superconductor and cryogenic equipments machinery which will be studied and developed in the future.

• Electrical & Electronic Materials
• /
• v.11 no.10
• /
• pp.13-18
• /
• 1998

Many factors influence SF6 insulation and a number of them have been clarified quantitatively. For the next generation of gas-insulated switchgear (GIS), quantitative considerations of these factorsare necessary to enhance reliability and to make GIS more compact. Advanced insulation technology this purpose is described.

• Progress in Superconductivity
• /
• v.13 no.3
• /
• pp.189-194
• /
• 2012

Studies on the development of high voltage superconducting apparatuses, such as transmission superconducting fault current limiters (SFCLs) and superconducting cables, have been performed worldwide. In this paper, a study on the electrical insulation characteristics of electro negative gas according to various pressures and utilization factors was conducted as a part of developing a high voltage superconducting coil with a sub-cooled nitrogen cooling system. Some gases such as helium (He), nitrogen ($N_2$), and sulfur hexafluoride ($SF_6$) are considered for pressurizing the sub-cooled nitrogen cooling system of high voltage SFCLs and superconducting cables. $SF_6$ is used to pressurize and enhance the dielectric performance of a superconducting system of a sub-cooled nitrogen cooling system for superconducting cables being developed in the Republic of Korea. In this paper, dielectric experiments on AC voltage, as well as lightning impulse voltage of $SF_6$, are conducted according to various utilization factors by using several kinds of sphere-to-plane electrode systems. As results, it is known that the empirical formulae of $SF_6$, known as an electro negative gas, are derived according to various pressures and utilization factors. Also, the appropriate pressure condition for designing a high voltage superconducting coil is found from the viewpoint of dielectric performance.

• Electrical & Electronic Materials
• /
• v.6 no.6
• /
• pp.524-535
• /
• 1993

본 연구에서는 SF$_{6}$가스의 전자이동속도를 더블히트파이프 실험장치를 이용하여 유도전류법에 의해 실험적으로 측정하였다. 그리고 전자수송계수의 정량적인 산출은 볼츠만 수송 방정식의 Backward-Prolongation을 이용하여 계산하고 해석하였다. 이때 전자에너지 분포함수와 전리 및 부착계수를 구하고 운동량변환단면적을 결정하였다. 그리고 실험적으로 측정된 SF$_{6}$가스의 전자이동속도와 계산된 전자수송계수를 비교 검토하여 해석함으로서 절연체의 기초적인 물성자료로 사용할 수 있다.